MANUFACTURED INTERCONNECT PACKAGING STRUCTURE
20210217712 ยท 2021-07-15
Assignee
Inventors
- Ioannis PAPAPOLYMEROU (Okemos, MI, US)
- Premjeet CHAHAL (Okemos, MI, US)
- John D. ALBRECHT (Okemos, MI, US)
- Michael Thomas CRATON (Lansing, MI, US)
- Christopher OAKLEY (Lansing, MI, US)
Cpc classification
B33Y10/00
PERFORMING OPERATIONS; TRANSPORTING
H01L24/19
ELECTRICITY
B33Y30/00
PERFORMING OPERATIONS; TRANSPORTING
G01S7/028
PHYSICS
H01L2223/6627
ELECTRICITY
H01L2224/24227
ELECTRICITY
H01L2223/6677
ELECTRICITY
H01L24/82
ELECTRICITY
H01L2224/06131
ELECTRICITY
H01L2224/92244
ELECTRICITY
H01L2224/24247
ELECTRICITY
H01L2924/15153
ELECTRICITY
International classification
B33Y10/00
PERFORMING OPERATIONS; TRANSPORTING
B33Y30/00
PERFORMING OPERATIONS; TRANSPORTING
Abstract
A method of manufacturing an interconnect packaging structure is provided. In one aspect, the method includes forming a first body defining a cavity around at least one integrated circuit using an additive manufacturing machine, depositing a conductive transmission line on the first body and electrically coupling the conductive transmission line and the at least one integrated circuit with a conductive interconnect.
Claims
1. A method of manufacturing an interconnect packaging structure, the method comprising: (a) forming a first body defining a cavity around at least one integrated circuit using an additive manufacturing machine such that a gap exists between a periphery of the cavity and the at least one integrated circuit, the first body made of a first dielectric material; (b) filling the gap between the periphery of the cavity and the at least one integrated circuit with a second dielectric material that forms a second body; (c) depositing a conductive transmission line on the first body, the conductive transmission line extending from an end of the first body to the second body; (d) depositing a conductive interconnect onto the second body and onto the at least one integrated circuit, the conductive interconnect electrically coupling the conductive transmission line and the at least one integrated circuit; and (e) the integrated circuit having a greater thickness than the first body with a top surface located above the first body, and a height of the first body being at least 50% of the integrated circuit with the gap extending between the entire thicknesses of the integrated circuit and the first body.
2. The method of claim 1, wherein: the step of filling the gap includes three-dimensionally printing the second dielectric material; the second dielectric material continuously contacts intersecting top and side surfaces defining a corner of the of the integrated circuit and an innermost portion of the second dielectric material ending at an outermost bonding pad located on the top surface; and the outermost bonding pad inwardly extending past an innermost edge of the conductive interconnect.
3. The method of claim 2, wherein the filled gap surrounds a periphery of the first body.
4. The method of claim 1, wherein the step of forming the first body includes three-dimensionally printing multiple layers to create a dielectric substrate with a thickness of 50-150 m, further comprising curing the layers of the dielectric substrate by heating in increasing graduated steps by a heater underneath a table top upon which the packaging structure is manufactured.
5. The method of claim 1, further comprising causing the second dielectric material at the gap to extend past an end of the gap and to extend onto a surface of the integrated circuit adjacent a bonding pad.
6. The method of claim 1, further comprising: attaching the body to a metallic substrate or printed circuit board which is larger than the body; and using conductive ink to make the transmission line and the interconnect.
7. The method of claim 1, further comprising assembling the interconnect packaging structure within an automotive vehicle sensor.
8. The method of claim 1, further comprising assembling the interconnect packaging structure to a collision detection system including a radar, radio frequency or energy emission transmitter.
9. The method of claim 1, wherein the forming and filling steps are performed by emitting the dielectric materials from at least one nozzle moving back and forth along a gantry based on signals from a programmable computer controller activating an actuator, within a gas atmosphere.
10. A method of manufacturing an electrical interconnect structure, the method comprising: (a) attaching an integrated circuit to a conductive substrate; (b) additively manufacturing multiple layers to create a dielectric substrate around a periphery of the integrated circuit with a surrounding gap between the integrated circuit and the dielectric substrate; (c) inserting a dielectric material into the gap; (d) causing the dielectric material to extend from the gap and onto a surface of the integrated circuit adjacent a bonding pad; and (e) offset angling a table top, upon which the electrical interconnect structure is manufactured, relative to a depositing machine nozzle while depositing at least one of: (i) a conductive transmission line or (ii) a conducting interconnect, onto at least one of: (iii) the dielectric substrate or (iv) the dielectric gap material.
11. The method of claim 10, wherein the inserting step includes three-dimensionally printing the dielectric material into the gap, the integrated circuit has a greater thickness than the dielectric substrate with a top surface located above the dielectric substrate, and a height of the dielectric substrate is at least 50% of the integrated circuit with the gap extending between the entire thicknesses of the integrated circuit and the dielectric.
12. The method of claim 10, wherein the dielectric material in the gap surrounds an entire periphery of the integrated circuit.
13. The method of claim 10, wherein the additively manufacturing step includes three-dimensionally printing the multiple layers to create the dielectric substrate with a thickness of 50-150 m, further comprising curing the layers of the dielectric substrate by heating.
14. The method of claim 10, wherein the integrated circuit is part of a detection system comprising: a sensor, and a transmitter including an amplifier and an oscillator.
15. The method of claim 10, wherein the conductive substrate includes a printed circuit board which is peripherally larger than the dielectric substrate.
16. The method of claim 10, wherein the depositing step includes depositing conductive ink to make the transmission line and the conducting interconnect in order to couple the transmission line to the integrated circuit, and the integrated circuit includes an RF signal amplifier.
17. The method of claim 10, further comprising emitting the dielectric material from at least one nozzle moving back and forth along a gantry based on signals from a programmable computer controller, within a gas atmosphere.
18. An automotive vehicle system comprising: (a) an integrated circuit attached to a conductive metallic substrate; (b) a body surrounding a periphery of the substrate with a continuous gap therebetween, the body being an additively depositable material located on the substrate; (c) a dielectric filler located in the gap and peripherally surrounding the body, the filler being an additively depositable dielectric material; (d) the dielectric filler being located on a substantially flat outer surface of the integrated circuit adjacent a bonding pad thereof, the surface being opposite the substrate; and (e) the integrated circuit being connected to a transmitter and an antenna.
19. The system of claim 18, wherein the dielectric materials of the body and the filler are emittable from a least one three-dimensional printer nozzle, and the integrated circuit includes an RF signal amplifier.
20. The system of claim 18, wherein the outer surface of the integrated circuit is raised above a substantially flat outer surface of the body with at least a portion of the filler having an angled ramp surface between the outer surfaces, and a height of the body being at least 50% of the integrated circuit with the gap extending between the entire thicknesses of the integrated circuit and the body.
21. The system of claim 18, further comprising: an elongated transmission line of conductive ink located on an outer surface of the body; and electric interconnects of conductive ink, connecting elongated conductors of the integrated circuit to the transmission line and spanning across the dielectric filler.
22. The system of claim 18, wherein the transmitter is part of an automotive vehicle collision detector.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
[0022] With reference to
[0023] Radar sensors 18a, 18b, 18c, 18d and 18e operate at various frequencies (including but not limited to 24 and 76 GHz systems) for detecting the secondary objects that are proximate to primary vehicle 10. The field of view for radar sensors 18a, 18b, 18c, 18d and 18e is designed to target the desired detection area to determine proximity of primary vehicle 10 to the objects. Although radar sensors 18a, 18b, 18c, 18d and 18e are disclosed by way of example, other sensors that emit energy to obtain information on surrounding objects would benefit from the present disclosure.
[0024] Radar sensors 18a, 18b, 18c, 18d and 18e are mounted behind painted bumpers 22 or vehicle fascia panels 24 at various locations of primary vehicle 10. For example, as shown in
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[0027] With Reference to
[0028] First, integrated circuit 58 is attached to a copper substrate 60 disposed on a table top 62 of printer 54 using any compatible adhesive materials such as a silver film, a gold-tin or conductive epoxy, for example. Next, a first substrate or body 64 defining cavity 66 and made of a first dielectric material, preferably polyimide, is deposited around integrated circuit 58 using printer 54 such that gap 68 approximately 50 m wide extends around and between a periphery of the cavity 66 and integrated circuit 58. First substrate 64 has a thickness in the range of 50-150 m, more preferably 100 m, for example, which is deposited approximately 1 m layer at a time. Once 20 m layers have been deposited, the first dielectric material is cured before adding more on top. This process is repeated until first substrate 64 defining cavity 66 has a thickness of approximately 100 m is formed around integrated circuit 58. Curing is achieved by heating, using a heating element 67 (e.g., hot plate, heat pad, etc.) underneath the table top 62, in a nitrogen atmosphere. First, the first substrate 64 is heated between 150 degrees Celsius and 200 degrees Celsius, preferably 180 degrees Celsius, for at least 15 minutes, more preferably 40 minutes. Then the first substrate 64 is heated between 200 degrees Celsius and 300 degrees Celsius, more preferably 280 degrees Celsius, for at least 15 minutes, more preferably 30 minutes. Finally, the first substrate 64 is heated between 300 degrees Celsius and 400 degrees Celsius, more preferably 300 degrees Celsius for at least 5 minutes, more preferably 10 minutes. Gap 68 allows for change in first substrate 64 during curing thereof, thereby avoiding damage to the interconnect packaging structure 52 and integrated circuit 58.
[0029] Next, a second dielectric material, preferably polyimide, is deposited in gap 68 extending around and between the periphery of cavity 66 and integrated circuit 58, thereby, forming a second substrate or body 70. This is done by angling the table top 62 10 degrees and depositing the dielectric material, using the nozzle 57, into gap 68 with no curing, thereby allowing the second dielectric material to fill gap 68 and form second substrate 70. Top surface 72 of integrated circuit 58 sits slightly above gap 68, therefore, filling gap 68 with the second dielectric material forms second substrate 70 having fillets or ramp surfaces 74 around integrated circuit 58. Each ramp surface 74 extends from the periphery of cavity 66 to at least an edge of integrated circuit 58. At least two ramp surfaces 74 extend onto top surface 72 of integrated circuit 58 and are adjacent to respective bonding pads 76.
[0030] Next, transmission lines 78, preferably made of silver nanoparticle ink, are deposited onto surface 80 of first substrate 64 using printer 54 and extend from or near an end of first substrate 64 to a respective ramp surface 74. Each transmission line 78 is preferably elongated and of a rectangular top view shape. Electrically conductive interconnects 82, preferably made of silver nanoparticle ink, are deposited onto respective ramp surfaces 74 and onto respective bonding pads 76 of integrated circuit 58 using printer 54, thereby electrically connecting transmission lines 78 and bonding pads 76 on integrated circuit 58. Bonding pads 76 are electrically coupled to ends of elongated conductors 81 that are fabricated on integrated circuit 58 and extend substantially parallel to each other. Interconnects 82 are deposited onto at least two ramp surfaces 74 that extend onto top surface 72 of integrated circuit 58, adjacent to respective bonding pads 76. In this way, interconnects 82 are prohibited from coming into contact with a metal seal ring (not shown) around integrated circuit 58, thereby preventing an electrical short from interconnects 82 to the metal ring. Each interconnect 82 has a generally rectangular top view shape and more preferably a square shape. Transmission lines 78 and interconnects 82 have a thickness of 2 m, which is deposited all at one time as oppose to in layers. The table top 62 is angled 10 degrees when the nozzle 57 is depositing interconnects 82 onto ramp surfaces 74 to ensure continuity therewith. Lastly, interconnect packaging structure 52 is cured by heating, using heating element 67 (e.g., hot plate, heat pad, etc.) underneath table top 62, in a nitrogen atmosphere. First, interconnect packaging structure 52 is heated between 150 degrees Celsius and 200 degrees Celsius, preferably 180 degrees Celsius, for at least 15 minutes, more preferably 40 minutes. Then, interconnect packaging structure 52 is heated between 200 degrees Celsius and 300 degrees Celsius, more preferably 280 degrees Celsius, for at least 15 minutes, more preferably 30 minutes. Finally, interconnect packaging structure 52 is heated between 300 degrees Celsius and 400 degrees Celsius, more preferably 300 degrees Celsius for at least 5 minutes, more preferably 10 minutes.
[0031] It should be appreciated that additional variations of the manufactured interconnect packaging structure of the present disclosure are also contemplated. For example, an adhesive may be used to facilitate adhesion of first and second substrates 64, 70 onto copper substrate 60. It is also envisioned that first substrate 64 defining cavity 66 may be deposited around integrated circuit 58 such that no gap extends around and between cavity 66 and integrated circuit 58. The thickness of first substrate 64 and second substrate 70 may be determined based on the height of integrated circuit 58 and may be between 50% and 150% of the height of integrated circuit 58. Alternatively, different electrical components and circuitry configurations may be manufactured according to the present method, although certain benefits of the preferred apparatus and method may not be fully realized.
[0032] Furthermore, integrated circuit 58 may be attached to a printed circuit board (PCB) as oppose to copper substrate 60. The height of integrated circuit 58 and the thickness of first substrate 64 may be of the same as opposed to being different. Also, the curing can be done in an oven as oppose to using heating element 67 underneath table top 62. It is also envisioned that transmission lines 78 may be deposited onto surface 80 of first substrate 64 and ramp surfaces 74, thereby reducing the length of interconnects 82. While certain materials have been disclosed it should be appreciated that alternate materials may be used although all of the present advantages may not be fully achieved. It is also noteworthy that any of the preceding features may be interchanged and intermixed with any of the others. Variations are not to be regarded as a departure from the present disclosure, and all such modifications are entitled to be included within the scope and spirit of the present invention.