Semiconductor device and electronic device
10784885 ยท 2020-09-22
Assignee
Inventors
Cpc classification
H01L27/06
ELECTRICITY
G11C5/147
PHYSICS
H01L29/786
ELECTRICITY
G11C11/4074
PHYSICS
G11C8/16
PHYSICS
H01L21/822
ELECTRICITY
H01L21/8234
ELECTRICITY
G11C11/401
PHYSICS
G11C11/56
PHYSICS
G11C7/1057
PHYSICS
G11C7/16
PHYSICS
International classification
G11C11/56
PHYSICS
Abstract
A semiconductor device in which an increase of circuit area is prevented is provided. A semiconductor device including a control circuit with a plurality of scan chain circuits, a DA converter electrically connected to the control circuit, and a plurality of potential holding units electrically connected to the DA converter is provided. The plurality of potential holding units each include a transistor including an oxide semiconductor in a channel formation region and a capacitor electrically connected to the transistor. In accordance with digital data held in any one of the plurality of scan chain circuits, an output potential output from the DA converter is held in any one of the plurality of potential holding units.
Claims
1. A semiconductor device comprising: a control circuit comprising a plurality of scan chain circuits; a DA converter electrically connected to the control circuit; a plurality of potential holding units electrically connected to the DA converter; and a memory electrically connected to the plurality of potential holding units, wherein each of the plurality of potential holding units comprises a transistor and a capacitor electrically connected to the transistor, wherein a channel formation region of the transistor comprises an oxide semiconductor, wherein an output potential output from the DA converter is held in one of the plurality of potential holding units, in accordance with digital data held in one of the plurality of scan chain circuits, wherein the one of the plurality of potential holing circuits supplies an analog data to the memory, and wherein the output potential output from the DA converter is held in a node where one of a source and a drain of the transistor is electrically connected to one electrode of the capacitor in the one of the plurality of potential holding units.
2. The semiconductor device according to claim 1, wherein each of the plurality of scan chain circuits comprises a flip-flop circuit.
3. The semiconductor device according to claim 1, wherein the other of the source and the drain of the transistor is electrically connected to the DA converter.
4. The semiconductor device according to claim 1, wherein the transistor comprises a gate electrode and a back gate electrode.
5. The semiconductor device according to claim 1, further comprising a monitor circuit, wherein the monitor circuit supplies to the control circuit data on an amount of current flowing through a resistor.
6. An electronic device comprising the semiconductor device according to claim 1.
7. The semiconductor device according to claim 1, wherein the memory stores a plurality bits of data.
8. A semiconductor device comprising: a control circuit comprising a plurality of scan chain circuits; a DA converter electrically connected to the control circuit; a plurality of potential holding units electrically connected to the DA converter; and a memory electrically connected to the plurality of potential holding units, wherein each of the plurality of potential holding units comprises a transistor and a capacitor electrically connected to the transistor, wherein a channel formation region of the transistor comprises an oxide semiconductor, wherein an output potential output from the DA converter is held in one of the plurality of potential holding units, in accordance with digital data held in one of the plurality of scan chain circuits, and wherein the one of the plurality of potential holing circuits supplies an analog data to the memory.
9. The semiconductor device according to claim 8, wherein each of the plurality of scan chain circuits comprises a flip-flop circuit.
10. The semiconductor device according to claim 8, wherein one of a source and a drain of the transistor is electrically connected to one electrode of the capacitor, and wherein the other of the source and the drain of the transistor is electrically connected to the DA converter.
11. The semiconductor device according to claim 8, wherein the transistor comprises a gate electrode and a back gate electrode.
12. The semiconductor device according to claim 8, further comprising a monitor circuit, wherein the monitor circuit supplies to the control circuit data on an amount of current flowing through a resistor.
13. An electronic device comprising the semiconductor device according to claim 8.
14. The semiconductor device according to claim 8, wherein the memory stores a plurality bits of data.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1)
(2)
(3)
(4)
(5)
(6)
(7)
(8)
(9)
(10)
(11)
(12)
(13)
(14)
(15)
(16)
MODES FOR CARRYING OUT THE INVENTION
(17) Embodiments will be described below with reference to drawings. However, the embodiments can be implemented in many different modes, and it will be readily appreciated by those skilled in the art that modes and details thereof can be changed in various ways without departing from the spirit and scope thereof. Thus, one embodiment of the present invention should not be interpreted as being limited to the following description of the embodiments. A plurality of embodiments described below can be combined as appropriate.
(18) Note that ordinal numbers such as first, second, and third in this specification and the like are used in order to avoid confusion among components. Thus, the ordinal numbers do not limit the number of components. The ordinal numbers do not limit the order of components either.
(19) Note that in the drawings, the same elements, elements having similar functions, elements formed of the same material, elements formed at the same time, or the like are sometimes denoted by the same reference numerals, and repeated description thereof is omitted in some cases.
Embodiment 1
(20) The configuration of a semiconductor device of one embodiment of the present invention will be described with reference to
(21) Note that in this specification and the like, a semiconductor device generally means a device that can function by utilizing semiconductor characteristics. Thus, power supply circuits described in this specification and the like are semiconductor devices.
(22) <Power Supply Circuit 100>
(23) The power supply circuit 100 includes a control circuit 101, a DAC 110, a potential holding circuit 120, and a buffer 140 (see
(24)
(25) <Control Circuit 101>
(26) The control circuit 101 includes a plurality of scan chain circuits 102_1 to 102_m (m is an integer greater than or equal to 2) and a selection circuit 105 (see
(27) The scan chain circuits 102_1 to 102_m are circuits that hold digital data (Data[0] to [N], N is an integer greater than or equal to 1) input from the outside, and include a flip-flop circuit and the like. The number of flip-flop circuits is not particularly limited; however, one flip-flop circuit is preferably provided per bit.
(28) Note that digital data (Data [0] to [N]) may be referred to as data corresponding to parameters.
(29) The selection circuit 105 includes switches 105_1 to 105_m (see
(30) <DAC 110>
(31) The DAC 110 includes a potential generating circuit 111 that generates multiple kinds of potentials, a selection circuit 112, and a plurality of wirings L1 to Lp (p is an integer greater than or equal 2) (see
(32) The potential generating circuit 111 includes a plurality of resistors 113 (see
(33) Note that an example in which a resistor string type is used for the potential generating circuit 111 is described in this embodiment; however, the configuration is not limited thereto and a resistor ladder type, a capacitor array type, a weighted resistor type, or the like may be used. In accordance with the type, resistors, capacitors, operational amplifiers, or the like are provided.
(34) The selection circuit 112 includes a plurality of selectors 114 connected in a tournament-like way (see
(35) Note that the case in which the plurality of selectors 114 are provided in three separate stages is shown in
(36) <Potential-Holding Circuit 120>
(37) The potential holding circuit 120 includes a plurality of potentials holding units 116_1 to 116_n (see
(38) Control data (H.sub.SEL) is input to a gate of the transistor 121 to control the on/off state of the transistor 121. Note that the transistor 121 preferably uses an oxide semiconductor in its channel formation region. A transistor using an oxide semiconductor has an extremely low off-state current. Thus, the transistor 121 being kept in an off-state after the output potential (V.sub.SEL) is held at the node 209 enables the potential of the node 209 to be held for a long time. The oxide semiconductor contains at least one of In, Ga, and Zn.
(39) Note that an example in which a single-gate transistor is used as the transistor 121 is shown in
(40) Note that although
(41) <Buffer 140>
(42) The buffer 140 includes a plurality of amplifiers 141 (see
(43) As described above, in one embodiment of the present invention, selection of multiple kinds of potentials is possible as a function of a semiconductor device functioning as a power supply circuit, without an increase in the number of elements included in a selection circuit. Thus, the area of the selection circuit in the semiconductor device can be reduced.
Embodiment 2
(44) In this embodiment, variations of destinations to which the potential holding units 116_1 to 116_n are connected is described with reference to
(45) The node 209 of the potential holding unit 116_1 may be connected to an operational amplifier 151 (see
(46) Furthermore, the node 209 of the potential holding unit 116_1 may be connected to a source follower circuit 152 (see
(47) Furthermore, the node 209 of the potential holding unit 116_1 may be connected to a comparator 156 (see
(48) Furthermore, the node 209 of the potential holding unit 116_1 may be connected to a voltage follower 159 (see
(49) Furthermore, the node 209 of the potential holding unit 116_1 may be connected to an analog AI circuit (see
(50) The structure described in this embodiment can be used in appropriate combination with the structures described in the other embodiments.
Embodiment 3
(51) In this embodiment, a power supply circuit that outputs 4-bit (16 kinds of) potentials, which is used for reading of a multilevel memory that stores 2-bit data, is taken as an example and the operation of the power supply circuit will be described.
(52) First, the power supply circuit 100 used in description of this embodiment will be described with reference to
(53) Next, the relationship between data held in the scan chain circuits 102_1 to 102_4 and output potential of the DAC 110 is described with reference to Table 1. In Table 1, 16 kinds of digital data that can be held in the scan chain circuits 102_1 to 102_4 and potentials Va1 to Va16 output from the DAC 110. The 16 kinds of potentials Va1 to Va16 respectively correspond to 16 kinds of digital data, and also correspond to the potentials of the wirings L1 to L16.
(54) TABLE-US-00001 TABLE 1 Digital data At the time of Output held in initializing At the time of potential of scan chain circuit operation rewriting DAC 110 1111 Va16 1110 102_4 Va15 1101 Va14 1100 102_4 Va13 1011 Va12 1010 102_3 Va11 1001 Va10 1000 102_3 Va9 0111 Va8 0110 102_2 Va7 0101 Va6 0100 102_2 Va5 0011 Va4 0010 102_1 Va3 0001 Va2 0000 102_l Va1
<Initializing Operation>
(55) The initializing operation will be described with reference to a flow chart in
(56) In Step S12, digital data is read out from any of the scan chain circuits 102_1 to 102_4. In this embodiment, the switch 105_1 is turned on, and digital data 0000 is read out from the scan chain circuit 102_1.
(57) In Step S13, an output potential is determined based on the digital data in the DAC 110. In this embodiment, the potential Va1 of the wiring L1 is the output potential of the DAC 110, based on the digital data 0000 output from the scan chain circuit 102_1.
(58) In Step S14, the output potential of the DAC 110 is held in any one of the potential holding units 116_1 to 116_4. In this embodiment, the transistor 121 of the potential holding unit 116_1 is turned on, and the potential Va1, which is the output potential of the DAC 110, is held in the node 209 of the potential holding unit 116_1.
(59) In Step S15, whether or not potentials necessary for reading a multilevel memory are obtained is determined. In the case where the potentials are obtained, the operation is terminated, while in the case where the potentials are not obtained, the operation goes to Step S12. In this embodiment, since potential setting for the potential holding units 116_2 to 116_4 is not completed, the operation goes to Step S12, and data reading from the scan chain circuit 102_2 (Step S12, 0100), determination of the output potential of the DAC 110 (Step S13, Va5), and holding of the potential in the potential holding unit 116_2 (Step S14, Va5) are performed. Then, the operation goes again to Step S12 after Step S15, and data reading from the scan chain circuit 102_3 (Step S12, 1000), determination of the output potential of the DAC 110 (Step S13, Va9), and holding of the potential in the potential holding unit 116_3 (Step S14, Va9) are performed. Then, the operation goes again to Step S12 after Step S15, and data reading from the scan chain circuit 102_4 (Step S12, 1100), determination of the output potential of the DAC 110 (Step S13, Va13), and holding of the potential in the potential holding unit 116_4 (Step S14, Va9) are performed. After that, in Step S15, it is determined that the potentials necessary for reading the multilevel memory have been obtained, and the operation is terminated.
(60) Through the above operation, the four kinds of potentials Va1, Va5, Va9, and Va13 are respectively held in the potential holding units 116_1 to 116_4, and these four kinds of potentials are used to read the multilevel memory that stores 2-bit data.
(61) <Rewriting Operation>
(62) The operation of rewriting the potential held in the potential holding unit will be described with reference to a flow chart in
(63) In Step S21 (
(64) In Step S22 (
(65) In Step S23 (
(66) In Step S24 (
(67) In Step S25 (
(68) In this embodiment, since potential rewriting for the potential holding units 116_2 to 116_4 is not completed, the operation goes to Step S22, the switch 105_2 is turned on, and data reading from the scan chain circuit 102_2 (Step S22 (
(69) In Step S26, whether or not the multilevel memory can normally be read is determined. In the case where the multilevel memory can normally be read, operation is terminated, while in the case where the multilevel memory cannot normally be read, the operation goes to Step S21. In this embodiment, four kinds of potentials Va3, Va1, Va11, and Va15 are respectively held in the potential holding units 116_1 to 116_4, and these four kinds of potentials are used for reading of the multilevel memory that stores 2-bit data. Thus, the operation is terminated.
(70) The structure described in this embodiment can be used in appropriate combination with the structures described in the other embodiments.
Embodiment 4
(71) In this embodiment, the case where a monitor circuit is connected to the potential holding unit will be described with reference to
(72) A monitor circuit 310 includes a resistor 311, a load 312, a voltage follower 313, and an ADC (Analog to Digital Converter) 314. The resistor 311 is an element with a minute resistance.
(73) The node 209 of the potential holding unit 116_1 is connected to the resistor 311 via the voltage follower 159. The resistor 311 is connected to the load 312. The potential difference between the ends of the resistor 311 is amplified by the voltage follower 313, and the amplified data is supplied to the ADC 314. The ADC 314 converts the output data of the voltage follower 313 into digital data, and supplies the digital data to the control circuit 101. The data supplied to the control circuit 101 contains data on the amount of current flowing through the resistor 311. The control circuit 101 resets the potential of the node 209 of the potential holding unit 116_1 in the case where it determines that the resetting is necessary, in accordance with the digital data supplied from the ADC 314. The case where it determines the resetting is necessary corresponds to the case where the amount of current flowing through the resistor 311 exceeds the standard.
(74) Providing the monitor circuit can prevent damage to or breakage of the potential holding unit.
(75) The structure described in this embodiment can be used in appropriate combination with the structures described in the other embodiments.
Embodiment 5
(76) <Configuration Examples of Multilevel Memory>
(77) Configuration examples of the multilevel memory will be described with reference to
(78)
(79) The memory cell array 90 includes memory cells MC provided in a matrix of m rows and n columns (m and n are each a natural number). The memory cells MC are connected to word lines WL_1 to WL_m and bit lines BL_1 to BL_n. The memory cells MC may be connected to a source line for supplying current, a wiring for applying voltage to a back gate of a transistor, a capacitor line for fixing a potential of one electrode of a capacitor, or the like, in addition to the bit lines and the word lines.
(80) The word line driver circuit 91 is a circuit that outputs a signal for selecting the memory cells MC in each row. Word lines for data writing and word lines for data reading may be provided separately as the word lines WL_1 to WL_m.
(81) The bit line driver circuit 92 is a circuit for writing data into the memory cell MC in each column, or for reading out data from the memory cells MC. Bit lines for data writing and bit lines for data reading may be provided separately as the bit lines BL_1 to BL_n.
(82)
(83) A memory cell MC_A illustrated in
(84) A memory cell MC_B illustrated in
(85) A memory cell MC_C illustrated in
(86) A memory cell MC_D illustrated in
(87) A memory cell MC_E illustrated in
(88) <Fabrication Method Example of Electronic Component>
(89)
(90) A semiconductor device formed with a transistor is completed by integrating detachable components on a printed board through the assembly process (post-process). The post-process can be finished through the steps shown in
(91)
(92) The plurality of circuit regions 7102 are each surrounded by a separation region 7104. Separation lines (also referred to as dicing lines) 7106 are set at a position overlapping with the separation regions 7104. In the dicing step ST72, the semiconductor wafer 7100 is cut along the separation lines 7106, whereby chips 7110 including the circuit regions 7102 are cut out from the semiconductor wafer 7100.
(93) A conductive layer or a semiconductor layer may be provided in the separation regions 7104. Providing a conductive layer or a semiconductor layer in the separation regions 7104 relieves ESD that might be caused in the dicing step, preventing a decrease in the yield due to the dicing step. A dicing step is generally performed while pure water whose specific resistance is decreased by dissolution of a carbonic acid gas or the like is supplied to a cut portion, in order to cool down a substrate, remove swarf, and prevent electrification, for example. Providing a conductive layer or a semiconductor layer in the separation regions 7104 allows a reduction in the usage of the pure water. Therefore, the cost of manufacturing semiconductor devices can be reduced. Furthermore, productivity of semiconductor devices can be increased.
(94) After Step ST72, a die bonding step (Step ST73) is performed, where the divided chips are separately picked up, placed on a lead frame, and bonded thereto. As the method for bonding the chips and the lead frame in the die bonding step, a method suitable for the product is selected; for example, the chips and the lead frame may be bonded with a resin or tape. In the die bonding step, the chip may be mounted on an interposer and bonded thereto. In a wire bonding step, a lead of the lead frame and an electrode on the chip are electrically connected to each other with a metal fine line (wire) (Step ST74). A silver line or a gold line can be used as the metal fine line. The wire bonding may be either ball bonding or wedge bonding.
(95) A wire-bonded chip is subjected to a molding step of sealing the chip with an epoxy resin or the like (Step ST75). By performing the molding step, the inside of the electronic component is filled with a resin, thereby reducing damage to the circuit portion and the wire embedded in the component caused by external mechanical force and reducing deterioration of characteristics due to moisture or dust. The lead of the lead frame is plated. After that, the lead is cut and processed (Step ST76). With the plating process, corrosion of the lead can be prevented, and soldering for mounting the electronic component on a printed circuit board in a later step can be performed with higher reliability. A printing process (marking) is performed on a surface of the package (Step ST77). After a testing step (Step ST78), the electronic component is completed (Step ST79). When an electronic component includes the semiconductor device of the above embodiment, the electronic component with low power consumption and a small size can be provided.
(96)
(97) The electronic component 7000 is mounted on a printed board 7002, for example. A plurality of electronic components 7000 which are combined and electrically connected to each other over the printed board 7002 can be mounted on an electronic device. A completed circuit board 7004 is provided in an electronic device or the like. When an electronic device includes the electronic component 7000, the power consumption of the electronic device can be reduced. Alternatively, the electronic device can easily have a smaller size.
(98) The electronic component 7000 can be used as an electronic component (IC chip) of electronic devices in a wide range of fields, such as digital signal processing, software-defined radio systems, avionics (electronic devices related to aviation, such as communication systems, navigation systems, autopilot systems, and flight management systems), ASIC prototyping, medical image processing, voice recognition, encryption, bioinformatics, emulators for mechanical systems, and radio telescopes in radio astronomy. Examples of such an electronic device include cameras (e.g., video cameras and digital still cameras), display devices, personal computers (PC), mobile phones, game machines including portable game machines, portable information terminals (e.g., smartphones and tablet information terminals), e-book readers, wearable information terminals (e.g., watch-type information terminals, head-mounted information terminals, goggle-type information terminals, glasses-type information terminals, armband-type information terminals, bracelet-type information terminals, and necklace-type information terminals), navigation systems, audio reproducing devices (e.g., car audio players and digital audio players), copiers, facsimiles, printers, multifunction printers, automated teller machines (ATM), vending machines, and consumer electronics.
(99) <Electronic Devices>
(100) Then, the cases of using the above electronic component in electronic devices such as a computer, a portable information terminal (including a mobile phone, a portable game machine, an audio reproducing device, and the like), electronic paper, a television device (also referred to as a television or a television receiver), and a digital video camera will be described.
(101)
(102) Note that the first display portion 803a is a panel having a touch input function, and for example, as illustrated in the drawing on the left in
(103) One of the first display portion 803a and the second display portion 803b can be detached from the portable information terminal illustrated in
(104) The portable information terminal illustrated in
(105) The portable information terminal illustrated in
(106) Furthermore, the housing 802 illustrated in
(107)
(108)
(109)
(110)
(111) As described above, in the electronic devices described in this embodiment, the semiconductor device of the above embodiment is provided. Thus, the electronic devices which achieve reduction in power consumption can be obtained.
(112) The structure described in this embodiment can be used in appropriate combination with the structures described in the other embodiments.
REFERENCE NUMERALS
(113) 100: power supply circuit, 101: control circuit, 102_m: scan chain circuit, 102_1: scan chain circuit 102, 102_2: scan chain circuit, 102_3: scan chain circuit, 102_4: scan chain circuit, 105: selection circuit, 105m: switch, 105_1: switch, 105_2: switch, 105_3: switch, 105_4: switch, 108_N: flip-flop circuit, 108_0: flip-flop circuit, 110: DAC, 111: potential generating circuit, 112: selection circuit, 113: resistor, 114: selector, 115a: wiring, 115b: wiring, 116_n: potential holding unit, 116_1: potential holding unit, 116_2: potential holding unit, 116_3: potential holding unit, 116_4: potential holding unit, 120: potential holding circuit, 121: transistor, 122: transistor, 123: transistor, 131: capacitor, 140: buffer, 141: amplifier, 151: operational amplifier, 152: source follower circuit, 153: n-channel transistor, 154: n-channel transistor, 155: terminal, 156: comparator, 159: voltage follower