Semiconductor device
10777485 ยท 2020-09-15
Assignee
Inventors
Cpc classification
H01L25/18
ELECTRICITY
H01L23/4012
ELECTRICITY
H01L2023/4087
ELECTRICITY
International classification
Abstract
A semiconductor device may include coolers, semiconductor modules, and a pair of connecting pipes. The coolers are arranged in a line and each of which includes a first flow path. Each of the semiconductor modules is interposed between a corresponding pair of the coolers. Each of the connecting pipes communicates with the adjacent coolers. A pair of coolant holes may be provided at one of the coolers located at one end in the stacking direction. A pair of second flow paths may extend respectively from the coolant holes to one of the coolers located at other end in the stacking direction. A bolt-head retainer and an internally threaded portion may be provided in each second flow path, the bolt-head retainer retaining a head of a bolt, and the internally threaded portion fixing the bolt. The coolers between the bolt-lead retainers and the internally threaded portions are fixed by the bolts.
Claims
1. A semiconductor device comprising: a plurality of coolers arranged in a line, each of the coolers including a first flow path; semiconductor modules, each of the semiconductor modules being interposed between a corresponding pair of the coolers adjacent to each other; and a pair of connecting pipes, each of the pair of connecting pipes communicating with the coolers adjacent to each other, the pair of connecting pipes located respectively at both sides of the semiconductor modules in a direction intersecting a stacking direction of the coolers and the semiconductor modules, wherein a pair of coolant holes is provided at one of the coolers located at one end in the stacking direction, each of the coolant holes overlaps corresponding one of the pair of the connecting pipes in a view along the stacking direction, a pair of second flow paths inside the pair of connecting pipes and the coolers, the pair of second flow paths extending respectively from the coolant holes to one of the coolers located at another end in the stacking direction, a bolt-head retainer and an internally threaded portion are provided inside each of the second flow paths, the bolt-head retainer retaining a head of a bolt, and the internally threaded portion fixing the bolt, and the coolers between the bolt-head retainers and the internally threaded portions are fixed by the bolts.
2. The semiconductor device of claim 1, wherein all of the coolers are fixed by the bolts.
3. The semiconductor device of claim 1, wherein a compressed spring is interposed between each of the bolt-head retainers and corresponding one of the heads of the bolts.
Description
BRIEF DESCRIPTION OF DRAWINGS
(1)
(2)
(3)
(4)
(5)
(6)
DETAILED DESCRIPTION
(7) Representative, non-limiting examples of the present invention will now be described in further detail with reference to the attached drawings. This detailed description is merely intended to teach a person of skill in the art further details for practicing preferred aspects of the present teachings and is not intended to limit the scope of the invention. Furthermore, each of the additional features and teachings disclosed below may be utilized separately or in conjunction with other features and teachings to provide improved semiconductor devices.
(8) Moreover, combinations of features and steps disclosed in the following detailed description may not be necessary to practice the invention in the broadest sense, and are instead taught merely to particularly describe representative examples of the invention. Furthermore, various features of the above-described and below-described representative examples, as well as the various independent and dependent claims, may be combined in ways that are not specifically and explicitly enumerated in order to provide additional useful embodiments of the present teachings.
(9) All features disclosed in the description and/or the claims are intended to be disclosed separately and independently from each other for the purpose of original written disclosure, as well as for the purpose of restricting the claimed subject matter, independent of the compositions of the features in the embodiments and/or the claims. In addition, all value ranges or indications of groups of entities are intended to disclose every possible intermediate value or intermediate entity for the purpose of original written disclosure, as well as for the purpose of restricting the claimed subject matter.
(10) With reference to the drawings, a semiconductor device 2 in an embodiment will be described.
(11) Each of the semiconductor modules 30 houses two transistors 31 connected in series (see
(12) The plurality of coolers 3 is arranged in a line in an X direction in the drawings, and each of the semiconductor modules 30 is interposed between a corresponding pair of the coolers 3 adjacent to each other. In other words, the coolers 3 and the semiconductor modules 30 are alternately stacked one by one. For convenience of explanation, a reference sign 3a is used for indicating the cooler 3 located at a left end in
(13) Each of the coolers 3 includes a flow path (a first flow path 12) through which a coolant passes. In
(14) The connecting pipes 4a, 4b are located respectively at both sides of the semiconductor modules 30 in a direction (a Y direction in the drawings) intersecting a stacking direction (the X direction in the drawings) of the coolers 3 and the semiconductor modules 30. The stacking direction (the X direction in the drawings) of the coolers 3 and the semiconductor modules 30 may hereinafter be simply termed stacking direction.
(15) The coolant holes 5a, 5b are provided at the cooler 3a located at one end in the stacking direction. The coolant hole 5a is provided to overlap the connecting pipes 4a in a view along the stacking direction. The coolant hole 5b is provided to overlap the connecting pipes 4b in a view along the stacking direction. A second flow path 13 is provided so as to extend straight from the coolant holes 5a (5b) to the cooler 3b located at the other end in the stacking direction, through the plurality of connecting pipes 4a (4b) and the coolers 3. Each of the second flow paths 13 communicates with the first flow paths 12 in the coolers 3. Although described in detail later, a bolt-head retainer 7 is provided in each of the coolant holes 5a, 5b. The bolt-head retainers 7 do not close the second flow paths 13. Moreover, an internally threaded portion 8 is provided at a right end of each of the second flow paths 13. The internally threaded portions 8 do not close the second flow paths 13, either.
(16) The semiconductor device 2 cools the plurality of semiconductor modules 30 in a concentrated manner. A cooling structure of the semiconductor device 2 will be described. The coolant holes 5a, 5b are connected to a coolant circulation device, which is not shown. A coolant is supplied from the coolant circulation device through one of the coolant holes, namely, the coolant hole 5a. The coolant is distributed to all of the coolers 3 (the first flow paths 12) through the second flow path 13 at a connecting pipes 4a side. While passing through the first flow paths 12, the coolant absorbs heat from the semiconductor modules 30 adjacent to the coolers 3. The coolant that has absorbed heat returns to the coolant circulation device through the second flow path 13 at a connecting pipes 45 side and the coolant hole 5b. Since each of the semiconductor modules 30 is cooled from its both sides, the semiconductor device 2 has good cooling performance for the semiconductor modules 30. The coolant is a liquid, and is typically water or an anti-freeze solution.
(17) To improve heat-transfer efficiency from the semiconductor modules 30 to the coolant, the semiconductor modules 30 and the coolers 3 are preferably kept in contact strongly with one another. In the semiconductor device 2, the semiconductor modules 30 and the coolers 3 are bound by the bolts 6a, 6b, and are pressed in the stacking direction thereby. The bolts 6a, 6b are entirely accommodated in the second flow paths 13, respectively. Therefore, there is no need to ensure space for the bolts outside the coolers 3, which provides good space efficiency. Moreover, the bolts 6a, 6b penetrate the coolers 3 through the second flow paths 13, respectively. In the semiconductor device 2, there is no need to newly provide holes, through which the bolts 6a, 6b penetrate, in outer walls of the coolers 3. In other words, the semiconductor device 2 does not need to newly include sealing means for the bolts 6a, 6b.
(18) An attachment structure for the bolts 6a, 6b will be described. The bolt-head retainer 7 that has the bolt 6a (6b) inserted therein and retain a head 61 of the bolt 6a (6b) is provided in the coolant hole 5a (5b), namely, in the second flow path 13. Moreover, the internally threaded portion 8, to which the bolt 6a (6b) is fixed, is provided in the cooler 3b located opposite to the coolant holes 5a, 5b (in other words, at ends of the second flow paths 13).
(19)
(20) The bolt-head retainer 7 is provided with a through hole 7a through which the bolt 6a is inserted.
(21)
(22) The bolt 6a is entirely accommodated in the second flow path 13 by the bolt-head retainer 7 and the internally threaded portion 8 which, are located in the second flow path 13. Therefore, there is no need to provide a space for the bolt outside the coolers 3, and there is no need to provide a sealing structure dedicated to the bolt 6a.
(23) The coolers 3 between the head 61 retained at the bolt-head retainer 7 and the internally threaded portion 8 to which the bolt 6a (6b) is fixed are tightened by the bolt 6a (6b). This tightening force presses the coolers 3 and the semiconductor modules 30, and brings the coolers 3 and the semiconductor modules 30 into contact strongly with one another.
(24) (First Variant)
(25) (Second Variant)
(26) The semiconductor device 2b includes bolt-head retainers 57 in the cooler 3c that is next to the cooler 3a located at the left end. Moreover, the semiconductor device 2b includes internally threaded portions 58 respectively in the connecting pipes 4a, 4b connected to the cooler 3b located at the right end. Neither the bolt-head retainers 57 nor the internally threaded portions 58 closes the second flow paths 13.
(27) Each of bolts 56a, 56b has its head 61 retained by its corresponding bolt-head retainer 57 and has its tip fixed to the internally threaded portion 58. When the bolts 56a, 56b are tightened, the coolers 3 located between the bolt-head retainers 57 and the internally threaded portions 58 (i.e., the coolers 3 except for the coolers 3a, 3b) are pressed in the stacking direction, and the coolers 3 and the semiconductor modules 30 are brought into intimate contact with one another. In this semiconductor device 2b, the coolers 3 except for the coolers 3a, 3b are fixed to each other by the bolts 56a, 56b. The coolers 3a, 3b may be pressed by another means.
(28) Specific examples of the present invention have been described in detail, however, these are mere exemplary indications and thus do not limit the scope of the claims. The art described in the claims include modifications and variations of the specific examples presented above. Technical features described in the description and the drawings may technically be useful alone or in various combinations, and are not limited to the combinations as originally claimed. Further, the art described in the description and the drawings may concurrently achieve a plurality of aims, and technical significance thereof resides in achieving any one of such aims.