Low-temperature co-fired microwave dielectric ceramic material, and preparation method and application thereof

Abstract

A low-temperature co-fired microwave dielectric ceramic material includes: (a) 85 wt % to 99 wt % ceramic material comprising Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, wherein a weight ratio of Mg.sub.2SiO.sub.4 relative to Ca.sub.2SiO.sub.4 is of (1x):x, a weight ratio of CaTiO.sub.3 relative to CaZrO.sub.3 is of y:z, and a weight ratio of entities of Mg.sub.2SiO.sub.4 and Ca.sub.2SiO.sub.4 relative to CaTiO.sub.3 is of (1yz):y, 0.2x0.7, 0.05y0.2, 0.05z0.4; and (b) 1 wt % to 15 wt % glass material composed of Li.sub.2O, BaO, SrO, CaO, B.sub.2O.sub.3, and SiO.sub.2.

Claims

1. A low-temperature co-fired microwave dielectric ceramic material comprising: (a) 85 wt % to 99 wt % ceramic material comprising Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, wherein a weight ratio of Mg.sub.2SiO.sub.4 relative to Ca.sub.2SiO.sub.4 is of (1x):x, a weight ratio of CaTiO.sub.3 relative to CaZrO.sub.3 is of y:z, and a weight ratio of entities of Mg.sub.2SiO.sub.4 and Ca.sub.2SiO.sub.4 relative to CaTiO.sub.3 is of (1yz):y, 0.2x0.7, 0.05y0.2, 0.05z0.4; and (b) 1 wt % to 15 wt % glass material composed of Li.sub.2O, BaO, SrO, CaO, B.sub.2O.sub.3, and SiO.sub.2.

2. The low-temperature co-fired microwave dielectric ceramic material according to claim 1, wherein Li.sub.2O accounts for a wt % (5 wt %a wt %10 wt %) by weight of the glass material; BaO accounts for b wt % (1 wt %b wt %15 wt %) by weight of the glass material; SrO accounts for c wt % (1 wt %c wt %11 wt %) by weight of the glass material; CaO accounts for d wt % (5 wt %d wt %23 wt %) by weight of the glass material; B.sub.2O.sub.3 accounts for e wt % (5 wt %e wt %30 wt %) by weight of the glass material; SiO.sub.2 accounts for f wt % (20 wt %f wt %50 wt %) by weight of the glass material; and a wt %+b wt %+c wt %+d wt %+e wt %+f wt %=100 wt %.

3. The low-temperature co-fired microwave dielectric ceramic material according to claim 1, wherein a dielectric constant of the low-temperature co-fired microwave dielectric ceramic material ranges from 8 to 15, a density thereof is in the range from 3.17 to 3.52 (g/cm.sup.3), a quality factor thereof ranges from 2900 to 6500, and an insulation resistance thereof is of 3.710.sup.12.

4. A high frequency ceramic capacitor comprising: (a) a dielectric layer composed of the low-temperature co-fired microwave dielectric ceramic material according to claim 1; (b) an internal electrode mounted on a surface of the dielectric layer; and (c) two terminal electrodes respectively mounted at two sides of the dielectric layer.

5. The high frequency ceramic capacitor according to claim 4, wherein Li.sub.2O accounts for a wt % (5 wt %a wt %10 wt %) by weight of the glass material; BaO accounts for b wt % (1 wt %b wt %15 wt %) by weight of the glass material; SrO accounts for c wt % (1 wt %c wt %11 wt %) by weight of the glass material; CaO accounts for d wt % (5 wt %d wt %23 wt %) by weight of the glass material; B.sub.2O.sub.3 accounts for e wt % (5 wt %e wt %30 wt %) by weight of the glass material; SiO.sub.2 accounts for f wt % (20 wt %f wt %50 wt %) by weight of the glass material; and a wt %+b wt %+c wt %+d wt %+e wt %+f wt %=100 wt %.

6. The high frequency ceramic capacitor according to claim 4, wherein a dielectric constant of the low-temperature co-fired microwave dielectric ceramic material ranges from 8 to 15, a density thereof is in the range from 3.17 to 3.52 (g/cm.sup.3), a quality factor thereof ranges from 2900 to 6500, and an insulation resistance thereof is of 3.710.sup.12.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a flow chart of low-temperature co-fired microwave dielectric ceramic material and preparation method thereof of the present invention;

(2) FIG. 2 is another flow chart of low-temperature co-fired microwave dielectric ceramic material and preparation method thereof of the present invention;

(3) FIG. 3 is a schematic figure showing a high frequency ceramic capacitor of the present invention; and

(4) FIG. 4 is the surface morphology of the low-temperature co-fired microwave dielectric ceramic material adding with glass material after electroplating.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

(5) The specific embodiments will be described as follows to illustrate the implementing aspects of the present invention, but not limit the scope intended to be protected by the present invention.

(6) The first embodiment of the present invention provides a low-temperature co-fired microwave dielectric ceramic material comprising: 85 wt % to 99 wt % ceramic material and 1 wt % to 15 wt % glass material. The dielectric constant of the above microwave dielectric ceramic material is of a low dielectric constant ranging from 8 to 15, and while having a microwave dielectric material with high quality factor and temperature frequency coefficient close to zero, the sintering density distribution thereof being 3.17-3.52 (g/cm.sup.3), the quality factor distribution being of 2900-6500, and the insulation resistance property being of 3.510.sup.12.

(7) The ceramic material mainly comprises Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3. Through prior researching, for ceramic powder comprising Mg.sub.2SiO.sub.4 and Ca.sub.2SiO.sub.4, if a weight ratio of Mg.sub.2SiO.sub.4 relative to Ca.sub.2SiO.sub.4 is of (1x):x, 0.2x0.7, there could be an eutectic composition. The temperature for sintering the ceramic into dense structure may be decreased from original 1300 C. to 1150 C. At the same time, this eutectic phase material also has a property of low dielectric constant and high quality factor. Appropriate CaTiO.sub.3 and CaZrO.sub.3 are added for further adjustment of overall dielectric properties of the material after sintering, the ceramic material in the first embodiment of the present invention is then obtained, wherein a weight ratio of Mg.sub.2SiO.sub.4 relative to Ca.sub.2SiO.sub.4 is of (1x):x, a weight ratio of CaTiO.sub.3 relative to CaZrO.sub.3 is of y:z, and a weight ratio of entities of Mg.sub.2SiO.sub.4 and Ca.sub.2SiO.sub.4 relative to CaTiO.sub.3 is of (1yz):y, 0.2x0.7, 0.05y0.02, 0.05z0.4.

(8) In the glass material, Li.sub.2O accounts for a wt % (0 wt %a wt %10 wt %) by weight of the glass material; BaO accounts for b wt % (1 wt %b wt %15 wt %) by weight of the glass material; SrO accounts for c wt % (1 wt %c wt %11 wt %) by weight of the glass material; CaO accounts for d wt % (5 wt %d wt %23 wt %) by weight of the glass material; B.sub.2O.sub.3 accounts for e wt % (5 wt %e wt %30 wt %) by weight of the glass material; SiO.sub.2 accounts for f wt % (20 wt %f wt %50 wt %) by weight of the glass material, and a wt %+b wt %+c wt %+d wt %+e wt %+f wt %=100 wt %.

(9) With reference to FIG. 1, the second embodiment of the present invention provides a preparation method for low-temperature co-fired microwave dielectric ceramic material comprising:

(10) (S01): wet-mixing ceramic precursor material of the ceramic material with glass precursor material of the glass material at room temperature, wherein the ceramic precursor material is composed of an eutectic phase composite and an additive, in which the eutectic phase composite is composed of a Mg.sub.2SiO.sub.4 powder and a Ca.sub.2SiO.sub.4 powder, the additive is composed of a CaZrO.sub.3 powder and a CaTiO.sub.3 powder; and

(11) (S02): sintering the mixed material at a temperature of 900-970 C. for 0.5-4 hours.

(12) The ceramic precursor material is composed of Mg.sub.2SiO.sub.4 powder, Ca.sub.2SiO.sub.4 powder, CaZrO.sub.3 powder and CaTiO.sub.3 powder. The Mg.sub.2SiO.sub.4 powder is prepared by weighing MgO and SiO.sub.2 according to stoichiometric ratio thereof and calcining them at 900-1300 C. for 4-10 hours and then grinding the obtained product for refinement. The Ca.sub.2SiO.sub.4 powder is prepared by weighing CaO and SiO.sub.2 according to stoichiometric ratio thereof and calcining them at 900-1200 C. for 4-10 hours and then grinding the obtained product for refinement. The CaTiO.sub.3 powder is prepared by weighing CaO and TiO.sub.2 according to stoichiometric ratio thereof and calcining them at 900-1200 C. for 4-10 hours and then grinding the obtained product for refinement. The CaZrO.sub.3 powder is prepared by weighing CaO and ZrO.sub.2 according to stoichiometric ratio thereof and calcining them at 900-1200 C. for 4-10 hours and then grinding the obtained product for refinement.

(13) The glass precursor material is composed of 0-10 wt % Li.sub.2O powder, 1-10 wt % BaO powder, 1-10 wt % SrO powder, 5-20 wt % CaO powder, 5-30 wt % B.sub.2O.sub.3 powder and 10-50 wt % SiO.sub.2 powder, forming the glass material of Li.sub.2OBaOSrOCaOB.sub.2O.sub.3SiO.sub.2 after the glass precursor material being melted at 1000-1300 C. for 2-10 hours and then being ground for refinement. For the property of the glass material, in addition to provide an advantageous liquid sintering property when glass precursor material being co-fired with ceramic precursor material, it also has a high chemical stability: not easily hydrolyzed in water or alcohol etc. and resistant to corrosion in electroplating baths (copper, nickel or tin).

(14) After adding water, alcohol, dispersant etc. for wet-mixing the ceramic precursor material with the glass precursor material for 2 hours, then filtering to dry. Sintering the mixed material at a low temperature of 900-970 C., and may co-fire them with Ag or Cu for 0.5-4 hours, then the dielectric constant of the above microwave dielectric ceramic material becomes a low dielectric constant ranging from 8 to 15, and while becoming a microwave dielectric material with high quality factor and temperature frequency coefficient close to zero, the sintering density distribution thereof is of 3.17-3.52 (g/cm.sup.3), the quality factor distribution is of 2900-6500, and the insulation resistance property is of 3.510.sup.12.

(15) With reference to FIG. 2, the third embodiment of the present invention provides another preparation method for low-temperature co-fired microwave dielectric ceramic material comprising:

(16) (S11): wet-mixing ceramic precursor material of the ceramic material with glass precursor material of the glass material of at room temperature, wherein the ceramic precursor material is composed of an eutectic phase composite and an additive, in which the eutectic phase composite is composed of a Mg.sub.2SiO.sub.4 powder and a Ca.sub.2SiO.sub.4 powder, the additive is composed of a CaZrO.sub.3 powder and a CaTiO.sub.3 powder; and

(17) (S12): sintering the mixed material with an Ag or Cu electrode at a temperature of 900-970 C. for 0.5-4 hours.

(18) The preparation manner for ceramic material and glass material in the third embodiment of the present invention is similar to that in the second embodiment, and will not be described in detail in the present embodiment.

(19) With reference to FIG. 3, the fourth embodiment of the present invention provides a high frequency ceramic capacitor comprising a dielectric layer (1), an internal electrode (2), and two terminal electrodes (3). The high frequency ceramic capacitor has low tight tolerance on capacitance value and low equivalent series resistance.

(20) The dielectric layer (1) comprises the low-temperature co-fired microwave dielectric ceramic material as the embodiment above. The internal electrode (2) is positioned on a surface of the dielectric layer (1), and is made of silver, palladium, nickel, or copper. The terminal electrodes (3) are respectively mounted at two sides of the dielectric layer, and each is made of silver, nickel, copper, or tin. In addition, each terminal electrode (3) comprises a substrate layer (31), a barrier layer (32), and a soldering layer (33). The substrate layer (31) is mounted at one side of the dielectric layer (1), the barrier layer (32) is mounted on the substrate layer (31), and the soldering layer (33) is mounted on the barrier layer (32).

(21) According to the formulation in the present invention: 85 wt % to 99 wt % ceramic material is mixed with 1 wt % to 15 wt % glass material, and after mixing ceramic material in the proportion of different x, y and z with that in different glass/ceramic ingredient proportions, pressing into disk and coating Ag or Cu electrode onto the disk for co-firing, and then the physical and dielectric properties of different ceramic composites after sintering are shown in Table 1. Wherein, the quality factor is obtained by inversing the dispassion factor of sintered body that is measured through a capacitance meter at 1 MHz communication signal by way of biasing 1 Vrms; and for temperature-capacitance coefficient measurement, C/C, C/C is obtained by observing the capacitance variants C at 55 C.-125 C. based on the device capacitance measured at room temperature of 25 C.

(22) Experiment 1-1: with x=0.2, y=0.05, and z=0.02, ceramic material is mixed with 1 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.23 (g/cm.sup.3); quality factor (Q) point of 6250; dielectric constant and capacitance-temperature coefficient of 8.5 and 14 ppm/ C. respectively; insulation resistance of 5.210.sup.12.

(23) Experiment 1-2: when x=0.2, y=0.05, z=0.02, ceramic material is mixed with 1 wt % glass material for co-firing test with Ag electrode at 915 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.17 (g/cm.sup.3); quality factor (Q) of 5882; dielectric constant and capacitance-temperature coefficient of 8.1 and 15 ppm/ C. respectively; insulation resistance of 4.210.sup.12.

(24) Experiment 1-3: when x=0.2, y=0.1, z=0.05, ceramic material is mixed with 5 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.28 (g/cm.sup.3); quality factor (Q) of 6666; dielectric constant and capacitance-temperature coefficient of 9.6 and 18 ppm/ C. respectively; insulation resistance of 5.410.sup.12.

(25) Experiment 1-4: when x=0.2, y=0.1, z=0.05, ceramic material is mixed with 5 wt % glass material for co-firing test with Ag electrode at 910 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.22 (g/cm.sup.3); quality factor (Q) point of 6250; dielectric constant and capacitance-temperature coefficient of 9.5 and 19 ppm/ C. respectively; insulation resistance of 4.410.sup.12.

(26) Experiment 1-5: when x=0.2, y=0.2, z=0.1, ceramic material is mixed with 10 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.35 (g/cm.sup.3); quality factor (Q) of 4762; dielectric constant and capacitance-temperature coefficient of 11.8 and 46 ppm/ C., respectively; insulation resistance of 3.910.sup.12.

(27) Experiment 1-6: when x=0.2, y=0.2, z=0.1, ceramic material is mixed with 10 wt % Li.sub.2OBaOSrOCaOB.sub.2O.sub.3SiO.sub.2 glass material for co-firing test with Ag electrode at 905 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.32 (g/cm.sup.3); quality factor (Q) of 4545; dielectric constant and capacitance-temperature coefficient of 11.9 and 37 ppm/ C., respectively; insulation resistance of 3.510.sup.12.

(28) Experiment 1-7: when x=0.2, y=0.3, z=0.15, ceramic material is mixed with 15 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.34 (g/cm.sup.3); quality factor (Q) of 4347; dielectric constant and capacitance-temperature coefficient of 11.9 and 47 ppm/ C. respectively; insulation resistance of 3.710.sup.12.

(29) Experiment 1-8: when x=0.2, y=0.3, z=0.15, ceramic material is mixed with 15 wt % glass material for co-firing test with Ag electrode at 900 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.31 (g/cm.sup.3); quality factor (Q) point of 4167; dielectric constant and capacitance-temperature coefficient of 12 and 40 ppm/ C. respectively; insulation resistance property of 3.810.sup.12.

(30) Experiment 2-1: when x=0.4, y=0.05, z=0.02, ceramic material is mixed with 1 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.25 (g/cm.sup.3); quality factor (Q) of 5263; dielectric constant and capacitance-temperature coefficient of 8.4 and 17 ppm/ C. respectively; insulation resistance property of 4.910.sup.12.

(31) Experiment 2-2: when x=0.4, y=0.05, z=0.02, ceramic material is mixed with 1 wt % glass material for co-firing test with Ag electrode at 915 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.21 (g/cm.sup.3); quality factor (Q) point of 5000; dielectric constant and capacitance-temperature coefficient of 8.1 and 15 ppm/ C. respectively; insulation resistance property of 4.310.sup.12.

(32) Experiment 2-3: when x=0.4, y=0.1, z=0.05, ceramic material is mixed with 5 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.30 (g/cm.sup.3); quality factor (Q) of 5555; dielectric constant and capacitance-temperature coefficient of 11.7 and 17 ppm/ C. respectively; insulation resistance property of 5.610.sup.12.

(33) Experiment 2-4: when x=0.4, y=0.1, z=0.05, ceramic material is mixed with 5 wt % glass material for co-firing test with Ag electrode at 910 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.25 (g/cm.sup.3); quality factor (Q) point of 5263; dielectric constant and capacitance-temperature coefficient of 11.6 and 18 ppm/ C. respectively; insulation resistance of 4.710.sup.12.

(34) Experiment 2-5: when x=0.4, y=0.2, z=0.1, ceramic material is mixed with 10 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with sintering density distribution of 3.38 (g/cm.sup.3); quality factor (Q) point of 4545; dielectric constant and capacitance-temperature coefficient of 11.8 and 46 ppm/ C. respectively; insulation resistance property of 4.810.sup.12.

(35) Experiment 2-6: when x=0.4, y=0.2, z=0.1, ceramic material is mixed with 10 wt % glass material for co-firing test with Ag electrode at 905 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.42 (g/cm.sup.3); quality factor (Q) of 4347; dielectric constant and capacitance-temperature coefficient of 11.6 and 44 ppm/ C. respectively; insulation resistance property of 3.910.sup.12.

(36) Experiment 2-7: when x=0.4, y=0.3, z=0.15, ceramic material is mixed with 15 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.37 (g/cm.sup.3); quality factor (Q) point of 3846; dielectric constant and capacitance-temperature coefficient of 14.2 and 47 ppm/ C. respectively; insulation resistance property of 4.410.sup.12.

(37) Experiment 2-8: when x=0.4, y=0.3, z=0.15, ceramic material is mixed with 15 wt % glass material for co-firing test with Ag electrode at 900 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.40 (g/cm.sup.3); quality factor (Q) of 3704; dielectric constant and capacitance-temperature coefficient of 14 and 46 ppm/ C. respectively; insulation resistance of 3.910.sup.12.

(38) Experiment 3-1: when x=0.5, y=0.05, z=0.02, ceramic material is mixed with 1 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.28 (g/cm.sup.3); quality factor (Q) point of 4545; dielectric constant and capacitance-temperature coefficient of 8.5 and 17 ppm/ C. respectively; insulation resistance of 5.310.sup.12.

(39) Experiment 3-2: when x=0.5, y=0.05, z=0.02, ceramic material is mixed with 1 wt % glass material for co-firing test with Ag electrode at 915 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.25 (g/cm.sup.3); quality factor (Q) point of 4347; dielectric constant and capacitance-temperature coefficient of 8.2 and 19 ppm/ C. respectively; insulation resistance of 4.310.sup.12.

(40) Experiment 3-3: when x=0.5, y=0.1, z=0.05, ceramic material is mixed with 5 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.36 (g/cm.sup.3); quality factor (Q) of 4762; dielectric constant and capacitance-temperature coefficient of 9.6 and 15 ppm/ C. respectively; insulation resistance property of 5.710.sup.12.

(41) Experiment 3-4: when x=0.5, y=0.1, z=0.05, ceramic material is mixed with 5 wt % glass material for co-firing test with Ag electrode at 910 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with sintering density distribution of 3.32 (g/cm.sup.3); quality factor (Q) point of 4545; dielectric constant and capacitance-temperature coefficient of 9.5 and 14 ppm/ C. respectively; insulation resistance property of 5.210.sup.12.

(42) Experiment 3-5: when x=0.5, y=0.2, z=0.1, ceramic material is mixed with 10 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with sintering density distribution of 3.45 (g/cm.sup.3); quality factor (Q) of 3846; dielectric constant and capacitance-temperature coefficient of 11.8 and 45 ppm/ C. respectively; insulation resistance of 4.910.sup.12.

(43) Experiment 3-6: when x=0.5, y=0.2, z=0.1, ceramic material is mixed with 10 wt % glass material for co-firing test with Ag electrode at 905 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with sintering density distribution of 3.41 (g/cm.sup.3); quality factor (Q) of 3571; dielectric constant and capacitance-temperature coefficient of 11.7 and 45 ppm/ C. respectively; insulation resistance of 3.910.sup.12.

(44) Experiment 3-7: when x=0.5, y=0.3, z=0.15, ceramic material is mixed with 15 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.44 (g/cm.sup.3); quality factor (Q) point of 3704; dielectric constant and capacitance-temperature coefficient of 11.9 and 46 ppm/ C. respectively; insulation resistance of 4.410.sup.12.

(45) Experiment 3-8: when x=0.5, y=0.3, z=0.15, ceramic material is mixed with 15 wt % glass material for co-firing test with Ag electrode at 900 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.42 (g/cm.sup.3); quality factor (Q) point of 3448; dielectric constant and capacitance-temperature coefficient of 12 and 47 ppm/ C. respectively; insulation resistance of 4.010.sup.12.

(46) Experiment 4-1: when x=0.7, y=0.05, z=0.02, ceramic material is mixed with 1 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.31 (g/cm.sup.3); quality factor (Q) point of 4000; dielectric constant and capacitance-temperature coefficient of 8.5 and 19 ppm/ C. respectively; insulation resistance of 5.310.sup.12.

(47) Experiment 4-2: when x=0.7, y=0.05, z=0.02, ceramic material is mixed with 1 wt % glass material for co-firing test with Ag electrode at 915 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.26 (g/cm.sup.3); quality factor (Q) of 3846; dielectric constant and capacitance-temperature coefficient of 7.9 and 15 ppm/ C. respectively; insulation resistance of 5.110.sup.12.

(48) Experiment 4-3: when x=0.7, y=0.1, z=0.05, ceramic material is mixed with 5 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.41 (g/cm.sup.3); quality factor (Q) point of 4167; dielectric constant and capacitance-temperature coefficient of 9.6 and 14 ppm/ C. respectively; insulation resistance of 6.710.sup.12.

(49) Experiment 4-4: when x=0.7, y=0.1, z=0.05, ceramic material is mixed with 5 wt % Li.sub.2OBaOSrOCaOB.sub.2O.sub.3SiO.sub.2 glass material for co-firing test with Ag electrode at 910 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.31 (g/cm.sup.3); quality factor (Q) point of 4000; dielectric constant and capacitance-temperature coefficient of 9.4 and 15 ppm/ C. respectively; insulation resistance of 6.210.sup.12.

(50) Experiment 4-5: when x=0.7, y=0.2, z=0.1, ceramic material is mixed with 10 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.50 (g/cm.sup.3); quality factor (Q) point of 3448; dielectric constant and capacitance-temperature coefficient of 11.8 and 45 ppm/ C. respectively; insulation resistance of 4.810.sup.12.

(51) Experiment 4-6: when x=0.7, y=0.2, z=0.1, ceramic material is mixed with 10 wt % glass material for co-firing test with Ag electrode at 905 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.43 (g/cm.sup.3); quality factor (Q) point of 3226; dielectric constant and capacitance-temperature coefficient of 11.6 and 39 ppm/ C. respectively; insulation resistance of 4.710.sup.12.

(52) Experiment 4-7: when x=0.7, y=0.3, z=0.15, ceramic material is mixed with 15 wt % glass material for co-firing test with Cu electrode at 970 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.52 (g/cm.sup.3); quality factor (Q) point of 3125; dielectric constant and capacitance-temperature coefficient of 11.9 and 46 ppm/ C. respectively; insulation resistance of 4.610.sup.12.

(53) Experiment 4-8: when x=0.7, y=0.3, z=0.15, ceramic material is mixed with 15 wt % glass material for co-firing test with Ag electrode at 900 C. to prepare a low-temperature co-fired microwave dielectric ceramic material with density of 3.46 (g/cm.sup.3); quality factor (Q) point of 2941; dielectric constant and capacitance-temperature coefficient of 11.8 and 44 ppm/ C. respectively; insulation resistance of 4.310.sup.12.

(54) As shown in Table 1, the density of sintered body raises with the adding amount of glass increases and the sintering density distribution is 3.17-3.52 (g/cm.sup.3); the quality factor property correlates with the adding proportion of main material with high microwave property and the density after sintering, and the quality factor distribution is 2914-6250; the dielectric constant and capacitance-temperature coefficient falls on respectively: 8.1-14.2 and 19-46 ppm/ C. In all, after being sintered with Ag or Cu, the sintered material has low dielectric constant property, and high quality factor, efficacious temperature-capacitance coefficient and high insulation resistance property (3.710.sup.12).

(55) With reference to Table 2, results of sintering property are shown when 90 wt % ceramic material (x=0.5, y=0.2, z=0.1) is mixed with 10 wt % glass material with different formulation at 900 C. The components adding into the glass material are: Li.sub.2O accounting for a wt % by weight of the glass material, 0 wt %a wt %10 wt %; BaO accounting for b wt % by weight of the glass material, 1 wt %b wt %15 wt %; SrO accounting for c wt % by weight of the glass material, 1 wt %c wt %11 wt %; CaO accounting for d wt % by weight of the glass material, 5 wt %d wt %23 wt %; B.sub.2O.sub.3 accounting for e wt % by weight of the glass material, 5 wt %e wt %30 wt %; SiO.sub.2 accounting for f wt % by weight of the glass material, 20 wt %f wt %50 wt %, wherein a wt %+b wt %+c wt %+d wt %+e wt %+f wt %=100 wt %.

(56) Experiment 5-1: when 90 wt % ceramic material (x indicates a ratio value of a weight of Ca.sub.2SiO.sub.4 relative to a sum weight of Ca.sub.2SiO.sub.4 and Mg.sub.2SiO.sub.4, x=0.5; y indicates a ratio value of a weight of CaTiO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, y=0.2; z indicates a ratio value of a weight of CaZrO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, z=0.1) being mixed with 10 wt % glass material with different formulation is co-fired with Cu electrode at 970 C. Wherein, the components adding into the glass material are: Li.sub.2O accounting for 10 wt % by weight of the glass material; BaO accounting for 10 wt % by weight of the glass material; SrO accounting for 11 wt % by weight of the glass material; CaO accounting for 14 wt % by weight of the glass material; B.sub.2O.sub.3 accounting for 5 wt % by weight of the glass material; SiO.sub.2 accounting for 50 wt % by weight of the glass material. The prepared low-temperature co-fired microwave dielectric ceramic material has a density of 3.45 (g/cm.sup.3); quality factor (Q) point of 3846; dielectric constant and capacitance-temperature coefficient of 11.8 and 45 ppm/ C. respectively; insulation resistance of 4.910.sup.12.

(57) Experiment 5-2: when 90 wt % ceramic material (x indicates a ratio value of a weight of Ca.sub.2SiO.sub.4 relative to a sum weight of Ca.sub.2SiO.sub.4 and Mg.sub.2SiO.sub.4, x=0.5; y indicates a ratio value of a weight of CaTiO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, y=0.2; z indicates a ratio value of a weight of CaZrO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, z=0.1) being mixed with 10 wt % glass material with different formulation is co-fired with Cu electrode at 935 C. Wherein, the components adding into the glass material are: Li.sub.2O accounting for 9 wt % in the glass material by weight of the glass material; BaO accounting for 1 wt % by weight of the glass material; SrO accounting for 10 wt % by weight of the glass material; CaO accounting for 5 wt % by weight of the glass material; B.sub.2O.sub.3 accounting for 29 wt % by weight of the glass material; SiO.sub.2 accounting for 46 wt % by weight of the glass material. The prepared low-temperature co-fired microwave dielectric ceramic material has a density of 3.4 (g/cm.sup.3); quality factor (Q) point of 3923; dielectric constant and capacitance-temperature coefficient of 12.3 and 40 ppm/ C. respectively; insulation resistance of 5.910.sup.12.

(58) Experiment 5-3: when 90 wt % ceramic material (x indicates a ratio value of a weight of Ca.sub.2SiO.sub.4 relative to a sum weight of Ca.sub.2SiO.sub.4 and Mg.sub.2SiO.sub.4, x=0.5; y indicates a ratio value of a weight of CaTiO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, y=0.2; z indicates a ratio value of a weight of CaZrO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, z=0.1) being mixed with 10 wt % glass material with different formulation is co-fired with Cu electrode at 960 C. Wherein, the components adding into the glass material are: Li.sub.2O accounting for 8 wt % by weight of the glass material; BaO accounting for 10 wt % by weight of the glass material; SrO accounting for 8 wt % by weight of the glass material; CaO accounting for 19 wt % by weight of the glass material; B.sub.2O.sub.3 accounting for 20 wt % by weight of the glass material; SiO.sub.2 accounting for 35 wt % by weight of the glass material. The prepared low-temperature co-fired microwave dielectric ceramic material has a density of 3.35 (g/cm.sup.3); quality factor (Q) point of 4005; dielectric constant and capacitance-temperature coefficient of 12.6 and 35 ppm/ C. respectively; insulation resistance of 6.210.sup.12.

(59) Experiment 5-4: when 90 wt % ceramic material (x indicates a ratio value of a weight of Ca.sub.2SiO.sub.4 relative to a sum weight of Ca.sub.2SiO.sub.4 and Mg.sub.2SiO.sub.4, x=0.5; y indicates a ratio value of a weight of CaTiO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, y=0.2; z indicates a ratio value of a weight of CaZrO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, z=0.1) being mixed with 10 wt % glass material with different formulation is co-fired with Cu electrode at 930 C. Wherein, the components adding into the glass material are: Li.sub.2O accounting for 5 wt % by weight of the glass material; BaO accounting for 14 wt % by weight of the glass material; SrO accounting for 10 wt % by weight of the glass material; CaO accounting for 23 wt % by weight of the glass material; B.sub.2O.sub.3 accounting for 28 wt % by weight of the glass material; SiO.sub.2 accounting for 20 wt % by weight of the glass material. The prepared low-temperature co-fired microwave dielectric ceramic material has a density of 3.38 (g/cm.sup.3); quality factor (Q) of 4265; dielectric constant and capacitance-temperature coefficient of 11.8 and 37 ppm/ C. respectively; insulation resistance of 7.910.sup.12.

(60) Experiment 5-5: when 90 wt % ceramic material (x indicates a ratio value of a weight of Ca.sub.2SiO.sub.4 relative to a sum weight of Ca.sub.2SiO.sub.4 and Mg.sub.2SiO.sub.4, x=0.5; y indicates a ratio value of a weight of CaTiO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, y=0.2; z indicates a ratio value of a weight of CaZrO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, z=0.1) being mixed with 10 wt % glass material with different formulation is co-fired with Cu electrode at 920 C. Wherein, the components adding into the glass material are: Li.sub.2O accounting for 0 wt % by weight of the glass material; BaO accounting for 15 wt % by weight of the glass material; SrO accounting for 1 wt % by weight of the glass material; CaO accounting for 17 wt % by weight of the glass material; B.sub.2O.sub.3 accounting for 30 wt % by weight of the glass material; SiO.sub.2 accounting for 37 wt % by weight of the glass material. The prepared low-temperature co-fired microwave dielectric ceramic material has a density of 3.33 (g/cm.sup.3); quality factor (Q) point of 4201; dielectric constant and capacitance-temperature coefficient of 12.5 and 40 ppm/ C. respectively; insulation resistance of 3.910.sup.12.

(61) As shown in Table 2, the quality factor is in the range from 3846 to 4065; the dielectric constant and capacitance-temperature coefficient ranges from 11.8 to12.5 and from 35 to 45 ppm/ C., respectively. In all, after being sintered with Cu, the sintered material has low dielectric constant and efficacious temperature-capacitance coefficient and insulation resistance property (3.710.sup.12). The ceramic slip prepared by alcohol with toluene and polyvinyl butyral (PVB) was a stable slip did not react with PVB and thus the gel effect did not occur, the slip viscosity being 350-450 cps; and the ceramic body made through sintering has a good anti-corrosion properties in plating solution, which has pH value less than 3. FIG. 4 shows a surface morphology of the microwave dielectric material after electroplating, which has no pinhole on the surface.

(62) Experiment 6: a low-temperature co-fired microwave dielectric ceramic material is provided, which has dielectric constant coefficient of 9.6 and quality factor (Q) point of 6666 and comprises 95 wt % ceramic material (x indicates a ratio value of a weight of Ca.sub.2SiO.sub.4 relative to a sum weight of Ca.sub.2SiO.sub.4 and Mg.sub.2SiO.sub.4, x=0.2; y indicates a ratio value of a weight of CaTiO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, y=0.1; z indicates a ratio value of a weight of CaZrO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, z=0.05) and 5 wt % glass material. Then, the dielectric ceramic material is mixed with ethanol, toluene, a dispersant, and a binder by ball milling technique to form a ceramic slip. After the slip is casted into foils, internal Cu electrode paste is printed on each foil in a thickness of 2.0-3.5 m. After which, the foils are stacked, laminated, and cut to form a lamination. The binder is burnt out from the lamination at 150-450 C., and then the lamination is sintered at 970 C. under a N.sub.2 atmosphere. After the tumbling process, terminal electrodes are pasted on the sintered lamination by termination dipping technique, and cured under a N.sub.2 atmosphere. A Ni layer (thickness of 2 m) and a Sn layer (thickness of 4-6 m) are sequentially plated on each terminal electrode so that 0201 capacitors with various capacitances of 0.10.02-1.00.02 pF are produced. As shown in Table 3, as compared with the commercial product AVX Accu-P 0201 Thin-Film RF/Microwave Capacitor, the 0201 capacitors obtained in the experiment have lower equivalent series resistance, and exhibit low energy consumption, especially at high frequency (2 GHz).

(63) Many changes and modifications in the above described embodiment of the invention can, of course, be carried out without departing from the scope thereof. Accordingly, to promote the progress in science and the useful arts, the invention is disclosed and is intended to be limited only by the scope of the appended claims.

(64) TABLE-US-00001 TABLE 1 Results of sintering property are shown when (100-m)wt % ceramic material is mixed with (m)wt % glass material with different formulation at 900 C. (CS: Ca.sub.2SiO.sub.4; MS: Mg.sub.2SiO.sub.4, CT: CaTiO.sub.3, CZ: CaZrO.sub.3; x: a ratio value of a weight of Ca.sub.2SiO.sub.4 relative to a sum weight of Ca.sub.2SiO.sub.4 and Mg.sub.2SiO.sub.4; y: a ratio value of a weight of CaTiO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3; z: a ratio value of a weight of CaZrO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3) Sintering Temperature- Ceramic x 1-x y z Glass temper- co- Dielec- Qality capacitance Insulation material value value value value material ature firing density tric factor coefficient resistance Item (1-m wt %) (CS) (MS) (CT) (CZ) (m wt %) ( C.) metal (g/cm.sup.3) constant (Q) (ppm/ C.) () Test 1-1 99 0.2 0.8 0.05 0.02 1 970 Cu 3.23 8.5 6,250 14 5.2*10.sup.12 Test 1-2 915 Ag 3.17 8.1 5,882 15 4.2*10.sup.12 Test 1-3 95 0.1 0.05 5 970 Cu 3.28 9.6 6,666 18 5.4*10.sup.12 Test 1-4 910 Ag 3.22 9.5 6,250 19 4.4*10.sup.12 Test 1-5 90 0.2 0.1 10 970 Cu 3.35 11.8 4,762 46 3.9*10.sup.12 Test 1-6 905 Ag 3.32 11.9 4,545 37 3.5*10.sup.12 Test 1-7 85 0.3 0.15 15 970 Cu 3.34 11.9 4,347 47 3.7*10.sup.12 Test 1-8 900 Ag 3.31 12 4,167 40 3.8*10.sup.12 Test 2-1 99 0.4 0.6 0.05 0.02 1 970 Cu 3.25 8.4 5,263 17 4.9*10.sup.12 Test 2-2 915 Ag 3.21 8.1 5,000 15 4.3*10.sup.12 Test 2-3 95 0.1 0.05 5 970 Cu 3.30 11.7 5,555 17 5.6*10.sup.12 Test 2-4 910 Ag 3.25 11.6 5,263 18 4.7*10.sup.12 Test 2-5 90 0.2 0.1 10 970 Cu 3.38 11.8 4,545 46 4.8*10.sup.12 Test 2-6 905 Ag 3.42 11.6 4,347 44 3.9*10.sup.12 Test 2-7 85 0.3 0.15 15 970 Cu 3.37 14.2 3,846 47 4.4*10.sup.12 Test 2-8 900 Ag 3.40 14 3,704 46 3.9*10.sup.12 Test 3-1 99 0.5 0.5 0.05 0.02 1 970 Cu 3.28 8.5 4,545 17 5.3*10.sup.12 Test 3-2 915 Ag 3.25 8.2 4,347 19 4.3*10.sup.12 Test 3-3 95 0.1 0.05 5 970 Cu 3.36 9.6 4,762 15 5.7*10.sup.12 Test 3-4 910 Ag 3.32 9.5 4,545 14 5.2*10.sup.12 Test 3-5 90 0.2 0.1 10 970 Cu 3.45 11.8 3,846 45 4.9*10.sup.12 Test 3-6 905 Ag 3.41 11.7 3,571 45 3.9*10.sup.12 Test 3-7 85 0.3 0.15 15 970 Cu 3.44 11.9 3,704 46 4.4*10.sup.12 Test 3-8 900 Ag 3.42 12 3,448 47 4.0*10.sup.12 Test 4-1 99 0.7 0.3 0.05 0.02 1 970 Cu 3.31 8.5 4,000 19 5.3*10.sup.12 Test 4-2 915 Ag 3.26 7.9 3,846 15 5.1*10.sup.12 Test 4-3 95 0.1 0.05 5 970 Cu 3.41 9.6 4,167 14 6.7*10.sup.12 Test 4-4 910 Ag 3.31 9.4 4,000 15 6.2*10.sup.12 Test 4-5 90 0.2 0.1 10 970 Cu 3.50 11.8 3,448 45 4.8*10.sup.12 Test 4-6 905 Ag 3.43 11.6 3,226 39 4.7*10.sup.12 Test 4-7 85 0.3 0.15 15 970 Cu 3.52 11.9 3,125 46 4.6*10.sup.12 Test 4-8 900 Ag 3.46 11.8 2,941 44 4.3*10.sup.12

(65) TABLE-US-00002 TABLE 2 Results of sintering property are shown when 90 wt % ceramic material (x indicates a ratio value of a weight of Ca.sub.2SiO.sub.4 relative to a sum weight of Ca.sub.2SiO.sub.4 and Mg.sub.2SiO.sub.4, x = 0.5; y indicates a ratio value of a weight of CaTiO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, y = 0.2; z indicates a ratio value of a weight of CaZrO.sub.3 relative to a sum weight of Mg.sub.2SiO.sub.4, Ca.sub.2SiO.sub.4, CaTiO.sub.3, and CaZrO.sub.3, z = 0.1) is mixed with 10 wt % glass material with different formulation at 900 C. Sintering Temperature- Li.sub.2O BaO SrO CaO B.sub.2O.sub.3 SiO.sub.2 Slurry temper- Co- Den- Dielec- Quality capacitance Insulation (wt (wt (wt (wt (wt (wt viscos- ature firing sity tric Factor coefficient resistance %) %) %) %) %) %) ity ( C.) metal (g/cm.sup.3) constant (Q) (ppm/ C.) () Test 5-1 10 10 11 14 5 50 350 970 Cu 3.45 11.8 3,846 45 4.9*10.sup.12 Test 5-2 9 1 10 5 29 46 400 935 Cu 3.4 12.3 3,923 40 5.9*10.sup.12 Test 5-3 8 10 8 19 20 35 430 960 Cu 3.35 12.6 4,005 35 6.2*10.sup.12 Test 5-4 5 14 10 23 28 20 450 930 Cu 3.38 11.8 4,265 37 7.9*10.sup.12 Test 5-5 0 15 1 17 30 37 400 920 Cu 3.33 12.5 4,201 40 3.9*10.sup.12

(66) TABLE-US-00003 TABLE 3 Results of equivalent series resistance values are shown when the 0201 capacitors of the present invention and the commercial 0201 capacitors work under 2 GHz. Capacitances Commercial (pF) capacitor Test 6 0.1 0.02 2.28 2.02 0.3 0.02 1.55 0.9 0.5 0.02 0.85 0.13 0.7 0.02 0.63 0.08 1.0 0.02 0.33 0.06