THIN FILM TRANSISTOR, GOA CIRCUIT, DISPLAY SUBSTRATE AND DISPLAY DEVICE
20190006477 ยท 2019-01-03
Inventors
Cpc classification
G02F1/1368
PHYSICS
H01L29/66765
ELECTRICITY
H01L29/786
ELECTRICITY
H01L29/42384
ELECTRICITY
H01L27/124
ELECTRICITY
G02F2201/506
PHYSICS
H01L21/76894
ELECTRICITY
H01L29/78696
ELECTRICITY
International classification
H01L29/417
ELECTRICITY
H01L21/768
ELECTRICITY
H01L29/786
ELECTRICITY
H01L27/12
ELECTRICITY
Abstract
A thin film transistor is disclosed, comprising a first, second and third electrode. The first and second electrodes are arranged in a same layer and insulated from each other. The third electrode is arranged below and insulated from the first and second electrodes. The first electrode comprises at least one first conducting part. The second electrode comprises second conducting parts, each of which is arranged adjacent with each first conducting part. The third electrode is provided with an opening part at least partially overlapping with the first or second conducting part. If the first or second conducting part is subject to a channel defect due to short circuit, the first or second conducting part is cut off at an overlapping position with the opening part, to repair the channel defect without affecting the third electrode. A GOA circuit, a display substrate and a display device are further disclosed.
Claims
1. A thin film transistor, comprising a first electrode, a second electrode, and a third electrode, wherein the first and second electrodes are arranged in a same layer and are insulated from each other, the third electrode is arranged below and insulated from the first and second electrodes, wherein the first electrode comprises at least one first conducting part; the second electrode comprises a plurality of second conducting parts, and each of the second conducting parts is arranged adjacent with each of the first conducting parts; and the third electrode is provided with an opening part, and the opening part at least partially overlaps with the first conducting part or the second conducting parts.
2. The thin film transistor of claim 1, wherein the opening part is arranged on an end region of the third electrode in an extending direction of the first conducting part or the second conducting parts.
3. The thin film transistor of claim 1, wherein the opening part has a strip shape; and the opening part extends in a direction perpendicular with the extending direction of the first conducting part or the second conducting parts.
4. The thin film transistor of claim 3, wherein the opening part is rectangular or elliptic.
5. The thin film transistor of claim 1, wherein the first electrode comprises one first conducting part; the second electrode comprises two second conducting parts; and the opening part at least partially overlaps with each second conducting part of the second electrode.
6. The thin film transistor of claim 1, wherein the first electrode comprises N first conducting parts, N being an integer larger than 1; the second electrode comprises at least N second conducting parts; and the first conducting part and the second conducting parts are arranged alternately.
7. The thin film transistor of claim 1, wherein the first electrode comprises N first conducting parts, N being an integer larger than 1; the second electrode comprises 2N second conducting parts; and each of the first conducting parts is surrounded by two second conducting parts.
8. The thin film transistor of claim 5, wherein the first conducting part and the second conducting parts have a linear shape.
9. The thin film transistor of claim 5, wherein the first conducting part and the second conducting parts have a non-linear shape; and the second conducting parts are arranged to surround the first conducting part.
10. The thin film transistor of claim 1, wherein the second electrode further comprises a second electrode line for electrically connecting the second conducting parts.
11. The thin film transistor of claim 10, wherein the second electrode further comprises a second connection part for electrically connecting the second conducting parts to the second electrode line; and an orthographic projection of the second electrode line and the second connection part falls within an orthographic projection of the third electrode.
12. The thin film transistor of claim 10, wherein an orthographic projection of the second electrode line falls within an orthographic projection of the third electrode.
13. The thin film transistor of claim 10, wherein the first electrode further comprises a first electrode line for electrically connecting the first conducting part.
14. The thin film transistor of claim 13, wherein the first and second electrodes have a comb shape.
15. The thin film transistor of claim 1, wherein the thin film transistor further comprises a semiconductor layer, which is arranged between the first and second electrodes and the third electrode; and an orthographic projection of the semiconductor layer coincides with an orthographic projection of the third electrode.
16. The thin film transistor of claim 1, wherein the third electrode is a gate electrode; and one of the first and second electrodes is a source electrode, and the other is a drain electrode.
17. A GOA circuit, comprising the thin film transistor of claim 1.
18. A display substrate, comprising the thin film transistor of claim 1, wherein the first electrode is electrically connected to a pixel electrode of each pixel, the second electrode is electrically connected to a data line, and the third electrode is a gate line.
19. A display device, comprising the display substrate of claim 18.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0044] In order to explain the technical solutions in the embodiments of the present disclosure or the prior art more clearly, the drawings to be used in the description of the embodiments or the prior art will be introduced briefly in the following. Apparently, the drawings described below are only some embodiments of the present disclosure.
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[0059] These drawings and verbal description do not intend to limit the scope of the present inventive concept, but to convey the present inventive concept to the person with ordinary skill in the art with reference to specific embodiments.
DETAILED DESCRIPTION OF EMBODIMENTS
[0060] To make the objects, the technical solutions and the advantages of embodiments of the present disclosure more apparent, the technical solutions of the embodiments of the present disclosure will be described in detail hereinafter in conjunction with the drawings of the embodiments of the present disclosure.
REFERENCE NUMERALS
[0061] 110, 310, 410, 510, 610, 710 first electrode; [0062] 200 display substrate; [0063] 202 display area; [0064] 204 peripheral area; [0065] 208 pixel; [0066] 311, 411, 511, 611, 711 first conducting part; [0067] 312, 412, 612 first connection part; [0068] 413, 613, 713 first electrode line; [0069] 120, 320, 420, 520, 620, 720 second electrode; [0070] 321, 421, 521, 621, 721 second conducting part; [0071] 322, 522 second connection part; [0072] 323, 423, 523, 623, 723 second electrode line [0073] 130, 330, 430, 530, 630, 730 third electrode; [0074] 332, 432, 532, 632, 732 opening part; [0075] 140, 340, 440, 540, 640, 740 data line; [0076] 150, 350, 450, 550, 650, 750 foreign materials or residuals; [0077] 160, 360, 460, 560, 660, 760 via; and [0078] 170, 370, 470, 570, 670, 770 cutting area.
[0079] The same reference numerals or reference numerals differing by a multiple of 100 refer to same or similar component.
[0080]
[0081] During fabricating the thin film transistor, for example, foreign materials or residuals 150 possibly fall onto the drain electrode 110, the source electrode 120 or the gate electrode 130, so that some electrodes are subject to short circuit which leads to channel defect. When the thin film transistor is subject to channel defect due to short circuit, laser or the like is generally used for repair.
[0082] Currently, foreign materials or residuals are primarily detected by a final array test. As shown in
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[0084] Embodiments of a thin film transistor, a GOA circuit, a display substrate, and a display device will be described hereinafter with reference to the drawings.
[0085]
[0086] An embodiment of the present disclosure provides a thin film transistor. The thin film transistor comprises a first electrode, a second electrode, and a third electrode. The first and second electrodes are arranged in a same layer and are insulated from each other. The third electrode is arranged below and insulated from the first and second electrodes. The first electrode comprises at least one first conducting part. The second electrode comprises a plurality of second conducting parts, each of which is arranged adjacent with each first conducting part. The third electrode is provided with an opening part which at least partially overlaps with the first or second conducting part. When the first or second conducting part is subject to a channel defect due to short circuit, the first or second conducting part is cut off at an overlapping position with the opening part, to repair the channel defect without affecting the third electrode.
[0087]
[0088] When foreign materials or residuals 350 fall between the first conducting part 311 of the first electrode 310 and the second conducting parts 321 of the second electrode 320 and cause short circuit, the thin film transistor is subject to channel defect between the first conducting part 311 and the second conducting parts 321. In this case, at the overlapping region between the second conducting parts 321 and the opening part 332, i.e., a cutting area 370, one or more of the second conducting parts 321 is cut off by laser or the like, thereby repairing the channel defect. As shown, the cutting area 370 corresponds to the opening part 332 of the third electrode 330, i.e., the third electrode 330 is absent in this area. Therefore, the above repair does not affect the third electrode of thin film transistor 330, and does not affect the stability of scan voltage which is applied to the third electrode 330, i.e., the gate line.
[0089] In an exemplary embodiment, the first electrode 310, the second electrode 320 and the third electrode 330 are the drain electrode, the source electrode and the gate electrode of the thin film transistor, respectively. In a liquid crystal display substrate, the third electrode 330 generally is formed by the gate line, the second electrode 320 is connected to a data line 340, and the first electrode 310 is connected to a pixel electrode (not shown) through a via 360.
[0090] In an exemplary embodiment, as shown in
[0091] In an exemplary embodiment, the opening part 332 has a strip shape, and the extending direction of the opening part 332 is perpendicular with that of the first conducting part 311 or the second conducting parts 321. The opening part 332 overlaps with all first conducting parts 311 or second conducting parts 321, thus providing the cutting area 370 for repair by cutting in case of channel defect.
[0092] In an exemplary embodiment, the opening part 332 has a regular shape, such as a rectangular or elliptic shape. In other embodiments, the opening part 332 has other elongated shapes, for example a rounded-corner rectangle. The opening part 332 has a length which is defined as a size in its extending direction. The length is generally enough to span all first conducting parts 311 or all second conducting parts 321. The opening part 332 has a width which is defined as a size in a direction perpendicular with its extending direction. The width is only required to provide suitable space for laser or other cutting off manner. In principle, the width of opening part 332 is as small as possible. This facilitates a relatively large width to length ratio for the channel.
[0093] In an exemplary embodiment, the thin film transistor further comprises a semiconductor layer (not shown). The semiconductor layer is arranged between the first and second electrode 310, 320 and the third electrode 330. An orthographic projection of the semiconductor layer coincides with an orthographic projection of the third electrode 330. In this way, the semiconductor layer is also absent at the opening part 332 of the third electrode 330. Thus the repair by cutting would not damage the semiconductor layer of the thin film transistor. This facilitates improving yield and reducing cost.
[0094] In an exemplary embodiment, as shown in
[0095] In the above embodiments, the first conducting part 311 and the second conducting parts 321 refers to portions of the first electrode 310 and the second electrode 320 which forms a channel during operation of the thin film transistor. The second conducting parts 321, the second connection part 322, and the second electrode line 323 only refers to portions of the second electrode 320 which are different in term of structure or function.
[0096] It is noted that the opening part is defined as a portion of the third electrode where the electrode material is absent. The opening part can completely fall within the third electrode, i.e., the opening part is closed. Alternatively, the opening part can overlap with an edge of the third electrode, i.e., the opening part is open, as shown in
[0097]
[0098] As shown in
[0099] As shown in
[0100]
[0101] When foreign materials or residuals 450 fall between the first conducting parts 411 and the second conducting part 421 and cause short circuit, at the overlapping region between the first conducting parts 411 and the opening part 432, i.e., a cutting area 470, one or more of the first conducting parts 411 is cut off by laser or the like, thereby repairing the channel defect. As shown, the cutting area 470 corresponds to the opening part 432 of the third electrode 430. Namely, the third electrode 430 is absent at the opening part 432. Therefore, the above repair does not affect the third electrode of thin film transistor 430, and does not affect the stability of scan voltage which is applied to the third electrode 430, i.e., the gate line.
[0102] As shown in
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[0104] In the embodiment shown in
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[0106] Similar with the embodiment shown in
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[0108] In the embodiment shown in
[0109] In the embodiments shown in
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[0111] As shown in
[0112] In contrast with the embodiment shown in
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[0115] On basis of the dual-channel design of
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[0117] An embodiment of the present disclosure further provides a GOA circuit, comprising the thin film transistor as described above.
[0118] An embodiment of the present disclosure further provides a display substrate, comprising the thin film transistor as described above. As discussed, the first electrode is electrically connected to the pixel electrode of each pixel, the second electrode is connected to the data line, and the third electrode is the gate line.
[0119] The present disclosure embodiment further provides a display device, which comprises the display substrate as described above. The display device can be any product or component with a display function like a liquid crystal panel, electronic paper, a mobile phone, tablet computer, TV, monitor, notebook computer, digital photo frame, navigator, or the like.
[0120] Embodiments of the present disclosure disclose a thin film transistor, a GOA circuit, a display substrate, and a display device. The thin film transistor comprises a first electrode, a second electrode, and a third electrode. The first and second electrodes are arranged in a same layer and are insulated from each other. The third electrode is arranged below and insulated from the first and second electrodes. The first electrode comprises at least one first conducting part. The second electrode comprises a plurality of second conducting parts, each of which is arranged adjacent with each first conducting part. The third electrode is provided with an opening part which at least partially overlaps with the first or second conducting part. When the first or second conducting part is subject to a channel defect due to short circuit, the first or second conducting part is cut off at an overlapping position with the opening part, to repair the channel defect without affecting the third electrode.
[0121] In the above embodiments of the present disclosure, reference is made to a bottom-gate thin film transistor in which the gate electrode is arranged below the source electrode and the drain electrode. However, embodiments of the present disclosure do not intend to limit the structure of the thin film transistor. For example, the thin film transistor can be a top-gate type, in which the gate electrode is arranged above the source electrode and the drain electrode.
[0122] In the above embodiments of the present disclosure, reference is made to channel defect due to short circuit between the source electrode and the drain electrode which is caused by foreign materials or residuals. However, the present disclosure embodiment is also applicable to channel defect due to short circuit between the source electrode and the gate electrode, or between the drain electrode and the gate electrode, which is caused by foreign materials or residuals. Moreover, embodiments of the present disclosure are applicable to channel defect due to short circuit which is caused by ESD (Electro Static Discharge) or the like.
[0123] It is further noted that when embodiments of the present disclosure are described with reference to drawings, emphasis is placed on difference among drawings or embodiments, merely for the sake of simplifying the description.
[0124] Apparently, the person with ordinary skill in the art can make various modifications and variations to the present disclosure without departing from the spirit and the scope of the present disclosure. In this way, provided that these modifications and variations of the present disclosure belong to the scopes of the claims of the present disclosure and the equivalent technologies thereof, the present disclosure also intends to encompass these modifications and variations.