Die bonding to a board
10115716 ยท 2018-10-30
Assignee
Inventors
Cpc classification
H01L21/4853
ELECTRICITY
H01L2224/291
ELECTRICITY
H01L2224/29294
ELECTRICITY
H01L2224/293
ELECTRICITY
H01L24/97
ELECTRICITY
H01L23/498
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L25/065
ELECTRICITY
H01L2224/29294
ELECTRICITY
H01L2224/293
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/97
ELECTRICITY
H01L25/50
ELECTRICITY
H01L2224/83048
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L21/4825
ELECTRICITY
H01L2224/8381
ELECTRICITY
H01L2224/97
ELECTRICITY
H01L2224/291
ELECTRICITY
International classification
H01L25/00
ELECTRICITY
H01L21/48
ELECTRICITY
H01L23/482
ELECTRICITY
H01L25/065
ELECTRICITY
Abstract
A method of bonding a plurality of die having first and second metal layers on a die surface to a board, comprising placing a first die onto a board comprising one of a ceramic or substrate board or metal lead frame having a solderable surface and placing the first die and the board into a reflow oven. The method includes reflowing at a first reflow temperature for a first period until the first metal board layer and at least one of the first and second metal die layers of the first die form an alloy to adhere the first die to the board. The alloy has a melting temperature higher than the first reflow temperature. Accordingly, additional die may be added at a later time and reflowed to attach to the board without causing the bonding of the first die to the board to fail.
Claims
1. A method of bonding a plurality of die having a plurality of metal layers on a die surface to a board or metal lead frame, comprising: placing a first die onto a solderable surface of the board or the metal lead frame, the first die comprising at least three metal layers, the board comprising one of a ceramic board or substrate board, or a metal lead frame wherein a top metal die layer is disposed against the solderable surface of the first die; first reflowing at least one of first and second metal die layers of the first die at a first reflow temperature in a range of 220 degrees C. to 260 degrees C. for a first period to form a first alloy to create a bond between the first die and the board or metal lead frame; and maintaining heat at the first reflow temperature for a second period to reflow the board or metal lead frame and the first and second metal die layers to form a second alloy placing a second die onto the solderable surface of the board or the metal lead frame, the second die comprising at least three metal layers, wherein a top metal die layer is disposed against the solderable surface of the second die; second reflowing at least one of first and second metal die layers of the second die at the first reflow temperature in the range of 220 degrees C. to 260 degrees C. for the first period to form the first alloy to create a bond between the second die and the board or metal lead frame; and maintaining heat at the first reflow temperature for the second period to reflow the board or metal lead frame and the first and second metal die layers of the second die to form the second alloy, wherein the first and second alloys have melting temperature temperatures that are higher than 260 degrees C.
2. The method of claim 1 wherein the solderable surface comprises copper and the first and second metal die layers of each of the first die and the second die comprise silver and tin, respectively.
3. The method of claim 1 wherein at least one layer of each of the first die and the second die comprises nickel and at least one layer comprises silver.
4. The method of claim 1 wherein the second period is long enough to cause the solderable surface and both the second metal layer and a third metal layer of each of the first die and the second die on the die to form a third alloy.
5. The method of claim 1 wherein each of the first reflowing and the second reflowing is for a period that causes an alloy to form comprising nickel, silver and tin.
6. The method of claim 1 wherein the board comprises a ceramic board with copper and silver layers and wherein each of the first die and the second die comprises nickel, silver and tin layers.
7. The method of claim 1 wherein the first alloy melting temperature of each of the first die and the second die is at least 10 degrees C. higher than the first reflow temperature.
8. A method of bonding a die to a board, comprising: placing a first die having a first solderable surface against a board without using a solder paste, the board having a second solderable surface, the board further comprising one of a ceramic or substrate board; wherein the first solderable surface of the first die comprises a first plurality of metal layers comprising at least three metal layers and wherein an outer layer of the first solderable surface comprises a silver and tin alloy having a silver composition that is less than 7 percent by weight and further wherein an inner layer next to the outer layer is either a metal layer or metal alloy layer that comprises one of titanium, nickel or silver; reflowing the first die at a first reflow temperature to form a first additional alloy having a first melting temperature that is higher than the first reflow temperature wherein the first additional alloy bonds the first die to the board; maintaining heat at the first reflow temperature for a second period to reflow the board and the outer and inner layers to form a second additional alloy having a second melting temperature that is higher than the first reflow temperature; subsequently placing a second die having a second solderable die surface onto the second solderable surface of the board and reflowing at the first reflow temperature without reflowing the first additional alloy of the first die to create a second additional alloy having a melting temperature that is higher than the first reflow temperature; and subsequently reflowing the second die for a second period to create a fourth additional alloy.
9. The method of claim 8 wherein the second solderable surface of the board comprises at least one of copper, silver and tin layers.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The present disclosure may be better understood, and its numerous features and advantages made apparent to those skilled in the art by referencing the accompanying drawings according to various embodiments in which:
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(10) The use of the same reference symbols in different drawings indicates similar or identical items. Unless otherwise noted, the word coupled and its associated verb forms include both direct connection and indirect electrical connection by means known in the art, and unless otherwise noted any description of direct connection implies alternate embodiments using suitable forms of indirect electrical connection as well.
DETAILED DESCRIPTION
(11)
(12) Metal layer 18 of board 16 comprises at least one of a solderable metal layer such tin, silver or copper. Metal layer 18 may also comprise a plurality of metal or metal alloy layers, for example, copper, nickel, tin or silver or an alloy formed of two or more metals. The metal layers on the die comprise a combination of silver, tin and nickel in one embodiment. The die may include three or more layers. While
(13) As is suggested in
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(15) Here, in
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(18) In one embodiment of the invention, a process includes reflowing a die until at least two metals melt and mix to create an alloy. As an additional process step, the reflow may be extended in time to a second period to cause at least a third metal, if not a fourth metal, of either a die layer or a board layer to mix to create additional alloys.
(19) It should be understood that distinct layers are shown here to represent alloys with differing combinations of metal. In actual practice, however, the ratios of metal may gradually change depending on original metal layer thicknesses and a total period of the reflow process to create the alloys. Accordingly, it should be understood that the term intermetallic alloy or intermetallics may be used in place of alloy more appropriately depending on the results of the reflow process. Reflow duration and relative layer thickness and construction affect how much the various metal layers melt and how well they mix to create a uniform distribution of metals within the resulting alloy. For example, if the metal compositions are different in different areas, the term intermetallic alloy may be more appropriate than the term alloy because alloy tends to refer to a homogenous or uniform distribution of metal content. References herein to alloy are intended to include intermetallic alloys.
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(21) Time t0 is the time at which the reflow temperature is reached while time t1 is an amount of time that is required to form an alloy and create a bond. Time t1 may coincident with time t0. Time t1 is a function of what metals are being melted and the relative thickness of the metal layers. Furthermore, as described in relation to previous figures, a plurality of metal layers may be used on at least one of the die or the board. If the reflow temperature is maintained beyond time t1 to time t2, additional alloys may be formed from the additional metal layers disposed either on the die or on the board because maintaining the reflow temperature causes additional melting. Accordingly, shortly after time t2, period 5 begins representing a cool down period. As described before, the alloys that are formed by the reflow temperature at times t1 and t2 have subsequent melting temperatures that are higher than the reflow temperature of period p4. The process represented by
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(24) The temperature profile may include a temperature ramp to a specified temperature with an immediate cool down following or a ramp to a temperature or temperature range that is maintained for a specified period or duration sufficient to allow the metal layers to reflow to create at least one alloy. Reference herein to temperature profiles include any combination of temperature and time that is used to melt the die and board metal layers to create the desired alloys and/or intermetallic alloys. The method optionally includes continuing the reflow according to a second temperature profile (e.g. at the first reflow temperature profile for a second period) to continue to reflow the first die and one or more of the metal layers of the die and the board to form a second alloy or intermetallic alloy (108).
(25) After a first reflow process is concluded and any formed alloys have cooled and hardened, the method includes placing a second die on the solderable board (110) board with the first and second die in the reflow furnace or oven (112) to essentially repeat the reflow process. Thereafter, second die and board metal layers are reflowed according to a third reflow temperature profile without completely re-flowing any alloy metals of the first die and board that were created during the first reflow process. The second die and board metal layers are re-flowed to form a third alloy for the second die and board (114). Finally, the method optionally includes continuing to reflow the metal layers of the second die and board according to a fourth temperature profile to form a fourth alloy for the second die (116). It should be understood that the first, second, third and fourth temperature profiles may be similar or may be varied in thickness or composition. Similarly, the first, second, third and fourth alloys and/or intermetallics that are created are based on the temperature profiles and metal layer compositions and may therefore be similar or different.
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(27) Optionally, the board and die are kept at the second temperature for a specified period. The method continues with continuing to maintain heat to continue to reflow the board metal with first and second die metal layers to form a second alloy (126). This step includes maintaining a specified temperature range (e.g., the second temperature reached in step 124) for a specified period. In the described embodiment, a solder or solder paste was not used. Alternatively, for the method of
(28) After the first and second alloys have cooled enough to bond the die to the board, the method includes placing a second die against the board without solderable paste (128). Thereafter, the method optionally includes heating the second die and the board with the attached first die to the first temperature to burn off flux and/or impurities (130). Thereafter, the reflow oven or furnace temperature is increased to heat the board according to a fourth temperature to reflow the board metal layer and the second die first metal layer to form a third alloy (132). As described in relation to step 124, the fourth temperature may be the same as the second temperature or it may be modified according to design requirements. Finally the method concludes with maintaining the heat at the fourth temperature or within a temperature range approximately equal to the fourth temperature to reflow the board metal layer with the second die first and second die metal layers to form a fourth alloy (134). As before, this step may comprise merely maintaining a specified temperature or temperature range for a specified period. It should be understood that the first and second die might have substantially similar metal layers thereby resulting in substantially similar alloys from the reflow processes. In other words, the third and fourth alloys may be very similar to the first and second alloys, respectively if the metals and temperature profiles or processes are similar.
(29) The above-disclosed subject matter is to be considered illustrative, and not restrictive, and the appended claims are intended to cover all such modifications, enhancements, and other embodiments that fall within the true scope of the claims
(30) Thus, to the maximum extent allowed by law, the scope of the present invention is to be determined by the broadest permissible interpretation of the following claims and their equivalents, and shall not be restricted or limited by the foregoing detailed description.