Chip carrier with electrically conductive layer extending beyond thermally conductive dielectric sheet
20180102302 ยท 2018-04-12
Inventors
- Andreas Grassmann (Regensburg, DE)
- Wolfram Hable (Neumarkt, DE)
- Juergen Hoegerl (Regensburg, DE)
- Angela Kessler (Sinzing, DE)
- Ivan Nikitin (Regensburg, DE)
- Achim Strass (Muenchen, DE)
Cpc classification
H01L2924/00012
ELECTRICITY
H01L2224/45014
ELECTRICITY
H01L2224/291
ELECTRICITY
H01L2224/92246
ELECTRICITY
H01L2924/13091
ELECTRICITY
H01L2224/92165
ELECTRICITY
H01L2224/0603
ELECTRICITY
H01L2224/2919
ELECTRICITY
H01L2224/40137
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2224/8385
ELECTRICITY
H01L2224/2919
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2224/92155
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/92246
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/92247
ELECTRICITY
H01L2924/15153
ELECTRICITY
H01L2224/92247
ELECTRICITY
H01L2224/2612
ELECTRICITY
H01L2224/8485
ELECTRICITY
H01L2224/45014
ELECTRICITY
H01L2224/8385
ELECTRICITY
H01L2224/291
ELECTRICITY
H01L24/73
ELECTRICITY
H01L23/3735
ELECTRICITY
International classification
H01L23/373
ELECTRICITY
Abstract
A chip carrier which comprises a thermally conductive and electrically insulating sheet, a first electrically conductive structure on a first main surface of the sheet, and a second electrically conductive structure on a second main surface of the sheet, wherein the first electrically conductive structure and the second electrically conductive structure extend beyond a lateral edge of the sheet.
Claims
1. A chip carrier, comprising: a thermally conductive and electrically insulating sheet; a first electrically conductive structure on a first main surface of the sheet; a second electrically conductive structure on a second main surface of the sheet; wherein the first electrically conductive structure and the second electrically conductive structure extend beyond a lateral edge of the sheet such that a recess or an undercut is formed at a lateral edge of a stack composed of the sheet, the first electrically conductive structure and the second electrically conductive structure.
2. The chip carrier according to claim 1, wherein at least one of the first electrically conductive structure and the second electrically conductive structure has a larger surface area than the sheet.
3. The chip carrier according to claim 1, wherein at least one of the first electrically conductive structure and the second electrically conductive structure has a larger thickness than the sheet.
4. The chip carrier according to claim 1, wherein the first electrically conductive structure comprises at least one mounting area configured for mounting at least one electronic chip.
5. The chip carrier according to claim 4, wherein the first electrically conductive structure additionally comprises at least one further functional element.
6. The chip carrier according to claim 5, wherein the at least one further functional element comprises at least one lead for electrically connecting the at least one electronic chip.
7. The chip carrier according to claim 1, wherein the second electrically conductive structure is configured as a continuous layer.
8. The chip carrier according to claim 1, wherein the recess or the undercut extends around a perimeter of the chip carrier.
9. The chip carrier according to claim 1, comprising a guide frame integrally formed with the first electrically conductive structure and carrying the first electrically conductive structure.
10. A package, comprising: a chip carrier according to claim 1; at least one electronic chip mounted on the first electrically conductive structure of the chip carrier; an encapsulant encapsulating at least part of the at least one electronic chip and at least part of the chip carrier.
11. The package according to claim 10, comprising a further chip carrier mounted on or above the at least one electronic chip on a side opposing the chip carrier.
12. The package according to claim 11, wherein the further chip carrier is a chip carrier according to claim 1.
13. The package according to claim 11, comprising at least one spacer body between the at least one electronic chip and the further chip carrier.
14. The package according to claim 10, wherein the second electrically conductive structure of at least one of the chip carrier and the further chip carrier forms part of an exterior surface of the package.
15. The package according to claim 10, configured for double-sided cooling.
16. The package according to claim 10, wherein at least one lead of the first electrically conductive structure of the chip carrier extends beyond the encapsulant.
17. The package according to claim 10, wherein the encapsulant extends into the undercut or the recess.
18. The package according to claim 10, wherein at least one lead of the first electrically conductive structure of the chip carrier is electrically connected with the at least one electronic chip.
19. A method of manufacturing a chip carrier, wherein the method comprises: interconnecting a thermally conductive and electrically insulating sheet, a first electrically conductive structure on a first main surface of the sheet, and a second electrically conductive structure on a second main surface of the sheet; configuring the first electrically conductive structure and the second electrically conductive structure to extend beyond a lateral edge of the sheet, such that a recess or an undercut is formed at a lateral edge of a stack composed of the sheet, the first electrically conductive structure and the second electrically conductive structure.
20. The method according to claim 19, wherein the method comprises providing a connecting medium between the sheet and at least one of the first electrically conductive structure and the second electrically conductive structure.
21. The method according to claim 20, wherein the connecting medium comprises a solder material.
22. The method according to claim 19, wherein the interconnecting comprises heating.
23. The method according to claim 19, wherein the method comprises providing a guide frame integrally formed with the first electrically conductive structure and carrying the first electrically conductive structure before the interconnecting and removing the guide frame from the manufactured chip carrier after formation of a package using the chip carrier.
24. The method according to claim 19, wherein the method comprises roughening at least one of the first electrically conductive structure and the second electrically conductive structure.
25. A method of manufacturing a package, wherein the method comprises: providing a chip carrier according to claim 1; mounting at least one electronic chip on the first electrically conductive structure of the chip carrier; encapsulating at least part of the at least one electronic chip and at least part of the chip carrier by an encapsulant.
26. A vehicle, comprising a chip carrier according to claim 1.
27. A method of using a package according to claim 10 for an automotive application.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0044] The accompanying drawings, which are included to provide a further understanding of exemplary embodiments and constitute a part of the specification, illustrate exemplary embodiments.
[0045] In the drawings:
[0046]
[0047]
[0048]
[0049]
[0050]
[0051]
[0052]
[0053]
[0054]
[0055]
[0056]
DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS
[0057] The illustration in the drawing is schematically.
[0058] Before describing further exemplary embodiments in further detail, some basic considerations of the present inventors will be summarized based on which exemplary embodiments have been developed which provide for an efficient cooling of a simply manufacturable package.
[0059] According to an exemplary embodiment of the invention, a minimal substrate for double-sided cooling packages is provided.
[0060] Conventional chip carriers are, among others, Direct Copper Bonding substrates (DCB), Insulated Metal Substrates (IMS), etc. However, with all these concepts, heat removal in a package with an encapsulated chip is accomplished only via one side. For power semiconductor applications, this may not be sufficient. Furthermore, the cost for such conventional chip carriers is high due to the high cost of a required large area of a thermally conductive structure of the mentioned and other substrates.
[0061] According to an exemplary embodiment of the invention, a package is provided which may be preferably configured in a double-sided cooling architecture. Highly preferable, such a package may be manufactured based on a chip carrier which has one or two electrically conductive structures on opposing main surfaces of a thermally conductive and electrically insulating sheet which extend beyond the lateral limits of the sheet. Such a chip carrier allows to decouple the size of the thermally conductive and electrically insulating sheet from the dimension of the metallic carrier foils, i.e. the electrically conductive structures. Thus, an increase of the usable electrically conductive surface of such a chip carrier is achievable without an increase of the required amount of thermally conductive and electrically insulating material. This saves costs and allows to manufacture compact packages. Furthermore, it is possible with such an architecture to reduce the number of required individual parts of a package, since the functionality of at least two conventionally separate elements can be combined or integrated in one of the electrically conductive structures with extended area. For instance, such an electrically conductive structure may simultaneously serve as a mounting base for the electronic chip(s) and to provide one or more leads extending beyond an encapsulant of a package using such a chip carrier. Furthermore, the chip carrier architecture according to an exemplary embodiment of the invention allows for a full decoupling of the individual sheets or layers of the chip carrier.
[0062] According to an exemplary embodiment, a chip carrier is provided which is composed of three layer type structures of different functionality. One of the electrically conductive structures may be configured as a carrier of an electric potential, the other electrically conductive structure may be configured as an exterior layer of the package contributing to an efficient heat removal, and the core sheet of the thermally conductive and electrically insulating material may provide electrical isolation and may also contribute to the removal of heat generated by the one or more electronic chips integrated within the package during operation.
[0063] Advantageously, the dielectric high performance thermal sheet is spatially smaller than the electrically conductive layers above and below. By correspondingly getting rid of constraints or limitations in terms of a possible size of one or both of the electrically conductive structures, it is possible to integrate at least one further function in such a spatially expanded electrically conductive structure. For instance, such an additional function may be a replacement of a leadframe. Therefore, such an electrically conductive structure may form at least part of the encapsulant external contacts or leads of the readily manufactured package. Such leads may be power pins and/or signal pins.
[0064] Hollow spaces or recesses formed by such an architecture with a spatially excessive chip carrier may be filled by an encapsulant such as a resin type encapsulant, for example a mold compound. By taking this measure, protection of the interior of the package with regard to an environment may be achieved. Such an encapsulant filling gaps, spaces, voids or recesses may also provide a reliable electric isolation in the filled volume in order to provide a dielectric decoupling between copper areas which can be used for redistribution and/or heat spreading.
[0065] With the chip carrier architecture according to exemplary embodiments of the invention, it is possible to manufacture three-dimensional chip carriers at reasonable effort, wherein dimension and/or thickness of the electrically conductive structures (in particular copper layers) are substantially independent of the size of the sandwiched thermally highly conductive insulating material.
[0066] According to an exemplary embodiment of the invention, a package (in particular implementing double-sided cooling, wherein single-sided cooling is possible in other embodiments as well) may be provided, in which the thermally highly conductive sheet(s) above the at least one chip and/or below the at least one chip is or are configured so that they have a smaller area than its inner and outer electrically conductive cover structures or layers. These electrically conductive structures may be used for electrical redistribution tasks and/or for heat spreading.
[0067] A volume between the electrically conductive structures can be advantageously filled partially or entirely with an appropriate encapsulant such as a mold component (for instance based on an epoxy resin). The encapsulant may at least partially define the outline of the package.
[0068] In contrast to conventional approaches (in which a separate leadframe is used to electrically contact one or more electronic chips with an exterior of the encapsulated package and which may provide signal pins as well as power pins), a separate leadframe may be omitted, and its functions may be realized by part of the chip carrier, more precisely by at least one of its electrically conductive structures. In other words, the leadframe functionality may be integrated within the chip carrier or substrate, in particular by a package interior electrically conductive structure of the chip carrier. This allows to manufacture a compact package with low tendency of undesired delamination.
[0069] For example, the thermally conductive and electrically insulating sheet may be made of a ceramic material (such as aluminum oxide, silicon nitride or aluminum nitride). For instance, the thermally conductive and electrically insulating sheet may have a thermal conductivity of at least 10 W/mK, in particular of at least 50 W/mK, more particularly of at least 100 W/mK.
[0070] The material of the electrically conductive structures may be for instance copper or aluminium having both a high thermal conductivity and a high electrical conductivity.
[0071]
[0072] As can be taken from
[0073] Referring to
[0074] As can be taken from
[0075] Care should be taken that the material of the connection medium 128 does not cover undesired surface portions of the thermally conductive and electrically insulating sheet 102, so that a reliable galvanic separation between the two opposing electrically conductive structures 104, 106 can be ensured. Any remaining exposed material of the connection medium 128 may be removed after mounting the electrically conductive structures 104, 106 on the two opposing main surfaces of the thermally conductive and electrically insulating sheet 102.
[0076] After this printing procedure, the structure shown in
[0077]
[0078] Referring to
[0079] The guide frame 116 temporarily, i.e. only during a part of the manufacturing procedure, carries the first electrically conductive structure 104, with which the guide frame 116 can be integrally formed. Alternatively, the guide frame 116 and the first electrically conductive structure 104 may be formed as separate structures. For the purpose of temporarily carrying the first electrically conductive structure 104, the guide frame 116 has a central hole 118 delimited by an annular structure, wherein the first electrically conductive structure 104 is exposed to the sheet 102 in the region of the central hole 118.
[0080] As can be taken from
[0081] The connection of the electrically conductive structures 104, 106 made of copper with the thermally conductive and electrically insulating sheet 102 can be carried out in a vacuum oven, preferable in a protection gas atmosphere or in a reducing atmosphere in order to prevent or suppress oxidation of the mounting parts and connection materials. Thermally resistant guiding tools may be implemented which may apply a pressure on the layer stack in order to prevent undesired misalignment or the like, which may improve the result of the manufacturing process (in particular which may suppress the formation of undesired voids in an interior). Moreover, it is possible to make the chip carrier 100 under manufacture subject of a chemical treatment. Such a chemical treatment may remove excessive connection medium 128 which can accumulate on the side edges of the ceramic material of the thermally conductive and electrically insulating sheet 102. On the other hand, such a chemical treatment may render sidewalls of the ceramic structure free of metallic contaminations. Moreover, it is possible to clean, roughen and deoxidize copper surfaces. As a result of this chemical treatment, the copper surfaces of the electrically conductive structures 104, 106 are properly prepared for promoting adhesion with material of an encapsulant to be formed, for instance a mold component.
[0082] As mentioned above, the first electrically conductive structure 104 comprises central mounting area 108 (compare the four mounting bases 111) configured for mounting four electronic chips 110. As a further functional element, a periphery portion of the first electrically conductive structure 104 additionally comprises multiple leads 112 for electrically connecting the electronic chips 110. These leads 112 include signal pins 113 carrying electric signals during operation of a package 120 manufactured based on the chip carrier 100. Moreover, the leads 112 include the power pins 115 including a power pin 115 carrying a plus potential, a further power pin 115 carrying a minus potential, and yet another power pin 115 (or several such power pins 115) corresponding to one or more phase connections.
[0083] In contrast to this, the second electrically conductive structure 106 is configured as a continuous layer which forms part of an exterior surface of the readily manufactured package 120, i.e. may be exposed to an environment rather than being fully covered by encapsulation material.
[0084]
[0085] In the following, it will be described how a package 120 can be formed based on a chip carrier 100 as manufactured in accordance with
[0086]
[0087] As can be taken from
[0088] After that, wire bond pads relating to the electronic chips 110 may be connected with leads 112 (in particular signal pins 113) by wire bonding, see bond wires 170 connecting the signal pins 113 (the power pins 115 may be connected correspondingly by bond wires or bond ribbons, not shown). At this point of time, the signal pins 113 are still connected with the guide frame 116.
[0089]
[0090] After the wire bonding, the spacer bodies 126 are mounted on the electronic chips 110. The spacer bodies 126 serve as thermally conductive spacer elements between the electronic chips 110 and an upper chip carrier 124. In addition, two further (smaller) via spacers as further spacer bodies 126 are applied as well in order to provide for a connection between the high side and the low side. More specifically, the via spacer facing the power pins 115 serves for a connection to the low side, whereas the via spacer facing the signal pins 113 serves for a connection between the high side and the low side.
[0091]
[0092] On top of the spacer bodies 126, the upper chip carrier 124 (for instance embodied correspondingly to chip carrier 100, or embodied as Direct Copper Bonding substrate) is mounted, as shown in
[0093]
[0094]
[0095] The package 120 is composed of the chip carrier 100 on a bottom side, the further chip carrier 124 on a top side and electronic chips 110 sandwiched between the chip carrier 100 and the further chip carrier 124. More specifically, the electronic chips 110 are mounted on the first electrically conductive structure 104 of the chip carrier 100. The further chip carrier 124, which may be embodied correspondingly to the chip carrier 100 described above referring to
[0096] An encapsulant 122, which is here embodied as a mold compound, encapsulates the electronic chips 110, the spacer bodies 126, part of the chip carrier 100, and part of the further chip carrier 124. As can be taken from
[0097] In view of the described configuration with the chip carrier 100 and the further chip carrier 124, the package 120 shown in
[0098] As can be taken best from
[0099]
[0100] Although not shown in the figures, the package 120 shown in
[0101] As can be seen in
[0102] In the shown embodiment, both chip carriers 100, 124 used for one and the same package 120 having a double-sided cooling performance can be manufactured identically. Alternatively, two different chip carriers 100 may be used for such a package 120. It is also possible that only single-sided cooling is accomplished, in such an embodiment only one chip carrier 100 is used. The use of two chip carriers 100, 124 of the type shown in
[0103] As can be taken from
[0104] As can be taken from the above description, the provided manufacturing architecture for forming chip carrier 100 and package 120 is an integrated solution in which the electrically conductive structures 104, 106 are applied on the thermally conductive and electrically insulating sheet 102 during the manufacturing process. Moreover, the electrically conductive structures 104, 106 may be configured to provide one or more additional functions, such as pins extending beyond the encapsulant 122, a guide frame function (see reference numeral 116), etc. It is also possible to integrate a transport frame function and/or a sealing frame function during the manufacturing procedure.
[0105] The package 120 shown in
[0106]
[0107] It should be noted that the term comprising does not exclude other elements or features and the a or an does not exclude a plurality. Also elements described in association with different embodiments may be combined. It should also be noted that reference signs shall not be construed as limiting the scope of the claims. Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps.