SEMICONDUCTOR DEVICES WITH ENHANCED DETERMINISTIC DOPING AND RELATED METHODS

Abstract

A method for making a semiconductor device may include forming a plurality of stacked groups of layers on a semiconductor substrate, with each group of layers including a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The method may further include implanting a dopant in the semiconductor substrate beneath the plurality of stacked groups of layers in at least one localized region, and performing an anneal of the plurality of stacked groups of layers and semiconductor substrate and with the plurality of stacked groups of layers vertically and horizontally constraining the dopant in the at least one localized region.

Claims

1-13. (canceled).

14. A semiconductor device comprising: a semiconductor substrate; a plurality of stacked groups of layers on the semiconductor substrate, each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions; and a dopant in the semiconductor substrate beneath the plurality of stacked groups of layers in at least one localized region with the plurality of stacked groups of layers vertically and horizontally constraining the dopant in the at least one localized region, the dopant having a fall-off steeper than 3.3 nm/decade.

15. The semiconductor device of claim 14 wherein the at least one localized region comprises a plurality thereof.

16. The semiconductor device of claim 14 wherein the dopant has a fall-off steeper than 3.0 nm/decade.

17. The semiconductor device of claim 14 wherein the plurality of stacked groups of layers comprises laterally-spaced apart stacked groups of layers on the semiconductor substrate; and wherein the dopant is localized in respective localized regions beneath each of the laterally-spaced apart stacked groups of layers.

18. The semiconductor device of claim 14 wherein the dopant comprises at least one of boron and arsenic.

19. The semiconductor device of claim 14 wherein each base semiconductor portion comprises silicon.

20. The semiconductor device of claim 14 wherein each base semiconductor portion comprises germanium.

21. The semiconductor device of claim 14 wherein the at least one non-semiconductor layer comprises oxygen.

22. The semiconductor device of claim 14 wherein the at least one non-semiconductor monolayer comprises a non-semiconductor selected from the group consisting of oxygen, nitrogen, fluorine, and carbon-oxygen.

23. The semiconductor device of claim 14 wherein at least some semiconductor atoms from opposing base semiconductor portions are chemically bound together through the at least one non-semiconductor monolayer therebetween.

24. A semiconductor device comprising: a semiconductor substrate; a plurality of stacked groups of layers on the semiconductor substrate, each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions; and a dopant in the semiconductor substrate beneath the plurality of stacked groups of layers in at least one localized region with the plurality of stacked groups of layers vertically and horizontally constraining the dopant in the at least one localized region, the dopant having a fall-off steeper than 3.3 nm/decade; each base semiconductor portion comprising silicon, and the at least one non-semiconductor layer comprising oxygen.

25. The semiconductor device of claim 24 wherein the at least one localized region comprises a plurality thereof.

26. The semiconductor device of claim 24 wherein the dopant has a fall-off steeper than 3.0 nm/decade.

27. The semiconductor device of claim 24 wherein the plurality of stacked groups of layers comprises laterally-spaced apart stacked groups of layers on the semiconductor substrate; and wherein the dopant is localized in respective localized regions beneath each of the laterally-spaced apart stacked groups of layers.

28. The semiconductor device of claim 24 wherein the dopant comprises at least one of boron and arsenic.

29. The semiconductor device of claim 24 wherein at least some semiconductor atoms from opposing base semiconductor portions are chemically bound together through the at least one non-semiconductor monolayer therebetween.

30. A semiconductor device comprising: a semiconductor substrate; a plurality of stacked groups of layers on the semiconductor substrate, each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions; and a dopant in the semiconductor substrate beneath the plurality of stacked groups of layers in at least one localized region with the plurality of stacked groups of layers vertically and horizontally constraining the dopant in the at least one localized region; the plurality of stacked groups of layers comprising laterally-spaced apart stacked groups of layers on the semiconductor substrate, and the dopant being localized in respective localized regions being coextensively aligned beneath each of the laterally-spaced apart stacked groups of layers.

31. The semiconductor device of claim 30 wherein the dopant has a fall-off steeper than 3.0 nm/decade.

32. The semiconductor device of claim 30 wherein the dopant comprises at least one of boron and arsenic.

33. The semiconductor device of claim 30 wherein each base semiconductor portion comprises silicon.

34. The semiconductor device of claim 30 wherein the at least one non-semiconductor layer comprises oxygen.

35. The semiconductor device of claim 30 wherein at least some semiconductor atoms from opposing base semiconductor portions are chemically bound together through the at least one non-semiconductor monolayer therebetween.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0016] FIG. 1 is a greatly enlarged schematic cross-sectional view of a superlattice for use in a semiconductor device in accordance with the present invention.

[0017] FIG. 2 is a perspective schematic atomic diagram of a portion of the superlattice shown in FIG. 1.

[0018] FIG. 3 is a greatly enlarged schematic cross-sectional view of another embodiment of a superlattice in accordance with the invention.

[0019] FIG. 4A is a graph of the calculated band structure from the gamma point (G) for both bulk silicon as in the prior art, and for the 4/1 Si/O superlattice as shown in FIGS. 1-2.

[0020] FIG. 4B is a graph of the calculated band structure from the Z point for both bulk silicon as in the prior art, and for the 4/1 Si/O superlattice as shown in FIGS. 1-2.

[0021] FIG. 4C is a graph of the calculated band structure from both the gamma and Z points for both bulk silicon as in the prior art, and for the 5/1/3/1 Si/O superlattice as shown in FIG. 3.

[0022] FIG. 5 is a depth profile graph for boron as a dopant with the superlattice illustrated in FIG. 1.

[0023] FIG. 6 is a schematic top plan view illustrating a deterministic doping method for making the doped superlattice structure shown in FIG. 5.

[0024] FIG. 7 is a schematic cross-sectional view corresponding to the plan view of FIG. 6.

[0025] FIGS. 8 and 9 are a series of schematic cross-sectional views illustrating another example approach for making the doped superlattice structure shown in FIG. 5.

[0026] FIG. 10 is a flow diagram illustrating a method for making a semiconductor device in accordance with an example embodiment.

DETAILED DESCRIPTION

[0027] The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Like numbers refer to like elements throughout, and prime notation is used to indicate similar elements in different embodiments.

[0028] Generally speaking, the present disclosure relates to enhanced deterministic doping techniques for semiconductor devices, particularly those incorporating advanced semiconductor materials such as the superlattice 25 described further below. Applicant has established by atomistic simulation and experimental verification (SIMS) that electrical dopants such as boron and arsenic have an energetic minimum close to (e.g., typically one silicon bond removed from) an oxygen (or CO or N, etc.) atomic layer(s) in the superlattice 25, and preferentially accumulate in this position under thermal diffusion. Following the description of example superlattice structures below, techniques for enhanced deterministic doping of the superlattice 25 are also provided. However, it should be noted that the techniques set forth herein may also be used for other semiconductor layers and structures as well in addition to the noted superlattices, as will be appreciated by those skilled in the art.

[0029] Applicants theorize, without wishing to be bound thereto, that certain superlattices as described herein reduce the effective mass of charge carriers and that this thereby leads to higher charge carrier mobility. Effective mass is described with various definitions in the literature. As a measure of the improvement in effective mass Applicants use a conductivity reciprocal effective mass tensor, M.sub.e.sup.1 and M.sub.h.sup.1 for electrons and holes respectively, defined as:

[00001]$M_{e,\mathrm{ij}}^{-1}\left(E_F,T\right)=\frac{\underset{E>E_F}{.Math.}.Math..Math.{}_{B.Z.}.Math.{\left({}_k.Math.E\left(k,n\right)\right)}_i.Math.{\left({}_k.Math.E\left(k,n\right)\right)}_j.Math.\frac{f\left(E\left(k,n\right),E_F,T\right)}{E}.Math.d^3.Math.k}{\underset{E>E_F}{.Math.}.Math..Math.{}_{B.Z.}.Math.f\left(E\left(k,n\right),E_F,T\right).Math.d^3.Math.k}$

for electrons and:

[00002]$M_{h,\mathrm{ij}}^{-1}\left(E_F,T\right)=\frac{-\underset{E<E_F}{.Math.}.Math..Math.{}_{B.Z.}.Math.{\left({}_k.Math.E\left(k,n\right)\right)}_i.Math.{\left({}_k.Math.E\left(k,n\right)\right)}_j.Math.\frac{f\left(E\left(k,n\right),E_F,T\right)}{E}.Math.d^3.Math.k}{\underset{E<E_F}{.Math.}.Math..Math.{}_{B.Z.}.Math.\left(1-f\left(E\left(k,n\right),E_F,T\right)\right).Math.d^3.Math.k}$

for holes, where f is the Fermi-Dirac distribution, E.sub.F is the Fermi energy, T is the temperature, E(k,n) is the energy of an electron in the state corresponding to wave vector k and the n.sup.th energy band, the indices i and j refer to Cartesian coordinates x, y and z, the integrals are taken over the Brillouin zone (B.Z.), and the summations are taken over bands with energies above and below the Fermi energy for electrons and holes respectively.

[0030] Applicants' definition of the conductivity reciprocal effective mass tensor is such that a tensorial component of the conductivity of the material is greater for greater values of the corresponding component of the conductivity reciprocal effective mass tensor. Again Applicants theorize without wishing to be bound thereto that the superlattices described herein set the values of the conductivity reciprocal effective mass tensor so as to enhance the conductive properties of the material, such as typically for a preferred direction of charge carrier transport. The inverse of the appropriate tensor element is referred to as the conductivity effective mass. In other words, to characterize semiconductor material structures, the conductivity effective mass for electrons/holes as described above and calculated in the direction of intended carrier transport is used to distinguish improved materials.

[0031] Applicants have identified improved materials or structures for use in semiconductor devices. More specifically, the Applicants have identified materials or structures having energy band structures for which the appropriate conductivity effective masses for electrons and/or holes are substantially less than the corresponding values for silicon. In addition to the enhanced mobility characteristics of these structures, they may also be formed or used in such a manner that they provide piezoelectric, pyroelectric, and/or ferroelectric properties that are advantageous for use in a variety of different types of devices, as will be discussed further below.

[0032] Referring now to FIGS. 1 and 2, the materials or structures are in the form of a superlattice 25 whose structure is controlled at the atomic or molecular level and may be formed using known techniques of atomic or molecular layer deposition. The superlattice 25 includes a plurality of layer groups 45a-45n arranged in stacked relation, as perhaps best understood with specific reference to the schematic cross-sectional view of FIG. 1.

[0033] Each group of layers 45a-45n of the superlattice 25 illustratively includes a plurality of stacked base semiconductor monolayers 46 defining a respective base semiconductor portion 46a-46n and an energy band-modifying layer 50 thereon. The energy band-modifying layers 50 are indicated by stippling in FIG. 1 for clarity of illustration.

[0034] The energy band-modifying layer 50 illustratively includes one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. By constrained within a crystal lattice of adjacent base semiconductor portions it is meant that at least some semiconductor atoms from opposing base semiconductor portions 46a-46n are chemically bound together through the non-semiconductor monolayer 50 therebetween, as seen in FIG. 2. Generally speaking, this configuration is made possible by controlling the amount of non-semiconductor material that is deposited on semiconductor portions 46a-46n through atomic layer deposition techniques so that not all (i.e., less than full or 100% coverage) of the available semiconductor bonding sites are populated with bonds to non-semiconductor atoms, as will be discussed further below. Thus, as further monolayers 46 of semiconductor material are deposited on or over a non-semiconductor monolayer 50, the newly deposited semiconductor atoms will populate the remaining vacant bonding sites of the semiconductor atoms below the non-semiconductor monolayer.

[0035] In other embodiments, more than one such non-semiconductor monolayer may be possible. It should be noted that reference herein to a non-semiconductor or semiconductor monolayer means that the material used for the monolayer would be a non-semiconductor or semiconductor if formed in bulk. That is, a single monolayer of a material, such as silicon, may not necessarily exhibit the same properties that it would if formed in bulk or in a relatively thick layer, as will be appreciated by those skilled in the art.

[0036] Applicants theorize without wishing to be bound thereto that energy band-modifying layers 50 and adjacent base semiconductor portions 46a-46n cause the superlattice 25 to have a lower appropriate conductivity effective mass for the charge carriers in the parallel layer direction than would otherwise be present. Considered another way, this parallel direction is orthogonal to the stacking direction. The band modifying layers 50 may also cause the superlattice 25 to have a common energy band structure, while also advantageously functioning as an insulator between layers or regions vertically above and below the superlattice.

[0037] Moreover, this superlattice structure may also advantageously act as a barrier to dopant and/or material diffusion between layers vertically above and below the superlattice 25. These properties may thus advantageously allow the superlattice 25 to provide an interface for high-K dielectrics which not only reduces diffusion of the high-K material into the channel region, but which may also advantageously reduce unwanted scattering effects and improve device mobility, as will be appreciated by those skilled in the art.

[0038] It is also theorized that semiconductor devices including the superlattice 25 may enjoy a higher charge carrier mobility based upon the lower conductivity effective mass than would otherwise be present. In some embodiments, and as a result of the band engineering achieved by the present invention, the superlattice 25 may further have a substantially direct energy bandgap that may be particularly advantageous for opto-electronic devices, for example.

[0039] The superlattice 25 also illustratively includes a cap layer 52 on an upper layer group 45n. The cap layer 52 may comprise a plurality of base semiconductor monolayers 46. The cap layer 52 may have between 2 to 100 monolayers of the base semiconductor, and, more preferably between 10 to 50 monolayers.

[0040] Each base semiconductor portion 46a-46n may comprise a base semiconductor selected from the group consisting of Group IV semiconductors, Group III-V semiconductors, and Group II-VI semiconductors. Of course, the term Group IV semiconductors also includes Group IV-IV semiconductors, as will be appreciated by those skilled in the art. More particularly, the base semiconductor may comprise at least one of silicon and germanium, for example.

[0041] Each energy band-modifying layer 50 may comprise a non-semiconductor selected from the group consisting of oxygen, nitrogen, fluorine, carbon and carbon-oxygen, for example. The non-semiconductor is also desirably thermally stable through deposition of a next layer to thereby facilitate manufacturing. In other embodiments, the non-semiconductor may be another inorganic or organic element or compound that is compatible with the given semiconductor processing as will be appreciated by those skilled in the art. More particularly, the base semiconductor may comprise at least one of silicon and germanium, for example

[0042] It should be noted that the term monolayer is meant to include a single atomic layer and also a single molecular layer. It is also noted that the energy band-modifying layer 50 provided by a single monolayer is also meant to include a monolayer wherein not all of the possible sites are occupied (i.e., there is less than full or 100% coverage). For example, with particular reference to the atomic diagram of FIG. 2, a 4/1 repeating structure is illustrated for silicon as the base semiconductor material, and oxygen as the energy band-modifying material. Only half of the possible sites for oxygen are occupied in the illustrated example.

[0043] In other embodiments and/or with different materials this one-half occupation would not necessarily be the case as will be appreciated by those skilled in the art. Indeed it can be seen even in this schematic diagram, that individual atoms of oxygen in a given monolayer are not precisely aligned along a flat plane as will also be appreciated by those of skill in the art of atomic deposition. By way of example, a preferred occupation range is from about one-eighth to one-half of the possible oxygen sites being full, although other numbers may be used in certain embodiments.

[0044] Silicon and oxygen are currently widely used in conventional semiconductor processing, and, hence, manufacturers will be readily able to use these materials as described herein. Atomic or monolayer deposition is also now widely used. Accordingly, semiconductor devices incorporating the superlattice 25 in accordance with the invention may be readily adopted and implemented, as will be appreciated by those skilled in the art.

[0045] It is theorized without Applicants wishing to be bound thereto that for a superlattice, such as the Si/O superlattice, for example, that the number of silicon monolayers should desirably be seven or less so that the energy band of the superlattice is common or relatively uniform throughout to achieve the desired advantages. The 4/1 repeating structure shown in FIGS. 1 and 2, for Si/O has been modeled to indicate an enhanced mobility for electrons and holes in the X direction. For example, the calculated conductivity effective mass for electrons (isotropic for bulk silicon) is 0.26 and for the 4/1 SiO superlattice in the X direction it is 0.12 resulting in a ratio of 0.46. Similarly, the calculation for holes yields values of 0.36 for bulk silicon and 0.16 for the 4/1 Si/O superlattice resulting in a ratio of 0.44.

[0046] While such a directionally preferential feature may be desired in certain semiconductor devices, other devices may benefit from a more uniform increase in mobility in any direction parallel to the groups of layers. It may also be beneficial to have an increased mobility for both electrons and holes, or just one of these types of charge carriers as will be appreciated by those skilled in the art.

[0047] The lower conductivity effective mass for the 4/1 Si/O embodiment of the superlattice 25 may be less than two-thirds the conductivity effective mass than would otherwise occur, and this applies for both electrons and holes. Of course, the superlattice 25 may further comprise at least one type of conductivity dopant therein, as will also be appreciated by those skilled in the art.

[0048] Indeed, referring now additionally to FIG. 3, another embodiment of a superlattice 25 in accordance with the invention having different properties is now described. In this embodiment, a repeating pattern of 3/1/5/1 is illustrated. More particularly, the lowest base semiconductor portion 46a has three monolayers, and the second lowest base semiconductor portion 46b has five monolayers. This pattern repeats throughout the superlattice 25. The energy band-modifying layers 50 may each include a single monolayer. For such a superlattice 25 including Si/O, the enhancement of charge carrier mobility is independent of orientation in the plane of the layers. Those other elements of FIG. 3 not specifically mentioned are similar to those discussed above with reference to FIG. 1 and need no further discussion herein.

[0049] In some device embodiments, all of the base semiconductor portions of a superlattice may be a same number of monolayers thick. In other embodiments, at least some of the base semiconductor portions may be a different number of monolayers thick. In still other embodiments, all of the base semiconductor portions may be a different number of monolayers thick.

[0050] In FIGS. 4A-4C, band structures calculated using Density Functional Theory (DFT) are presented. It is well known in the art that DFT underestimates the absolute value of the bandgap. Hence all bands above the gap may be shifted by an appropriate scissors correction. However the shape of the band is known to be much more reliable. The vertical energy axes should be interpreted in this light.

[0051] FIG. 4A shows the calculated band structure from the gamma point (G) for both bulk silicon (represented by continuous lines) and for the 4/1 Si/O superlattice 25 shown in FIG. 1 (represented by dotted lines). The directions refer to the unit cell of the 4/1 Si/O structure and not to the conventional unit cell of Si, although the (001) direction in the figure does correspond to the (001) direction of the conventional unit cell of Si, and, hence, shows the expected location of the Si conduction band minimum. The (100) and (010) directions in the figure correspond to the (110) and (110) directions of the conventional Si unit cell. Those skilled in the art will appreciate that the bands of Si on the figure are folded to represent them on the appropriate reciprocal lattice directions for the 4/1 Si/O structure.

[0052] It can be seen that the conduction band minimum for the 4/1 Si/O structure is located at the gamma point in contrast to bulk silicon (Si), whereas the valence band minimum occurs at the edge of the Brillouin zone in the (001) direction which we refer to as the Z point. One may also note the greater curvature of the conduction band minimum for the 4/1 Si/O structure compared to the curvature of the conduction band minimum for Si owing to the band splitting due to the perturbation introduced by the additional oxygen layer.

[0053] FIG. 4B shows the calculated band structure from the Z point for both bulk silicon (continuous lines) and for the 4/1 Si/O superlattice 25 (dotted lines). This figure illustrates the enhanced curvature of the valence band in the (100) direction.

[0054] FIG, 4C shows the calculated band structure from both the gamma and Z point for both bulk silicon (continuous lines) and for the 5/1/3/1 Si/O structure of the superlattice 25 of FIG. 3 (dotted lines). Due to the symmetry of the 5/1/3/1 Si/O structure, the calculated band structures in the (100) and (010) directions are equivalent. Thus the conductivity effective mass and mobility are expected to be isotropic in the plane parallel to the layers, i.e. perpendicular to the (001) stacking direction. Note that in the 5/1/3/1 Si/O example the conduction band minimum and the valence band maximum are both at or close to the Z point.

[0055] Although increased curvature is an indication of reduced effective mass, the appropriate comparison and discrimination may be made via the conductivity reciprocal effective mass tensor calculation. This leads Applicants to further theorize that the 5/1/3/1 superlattice 25 should be substantially direct bandgap. As will be understood by those skilled in the art, the appropriate matrix element for optical transition is another indicator of the distinction between direct and indirect bandgap behavior.

[0056] Turning now to FIG. 5, an example approach for performing deterministic doping in a superlattice structure 225 (such as those described above) is first described. As seen in FIG. 5, electrical dopants 230 (e.g., boron, arsenic, etc.) preferentially are substitutionally one silicon bond removed from the SiOSi bond. With this approach, an ultra-steep fall-off of doping over multiple orders of magnitude (e.g., as steep as 3.3 nm/dec from enhanced peak) has been measured after rapid thermal annealing (e.g., 1050 C.), as seen in the depth profile graph. In the illustrated example, the dopant is boron, although other dopants may also be used, as noted above. This dopant pile-up is also seen in other interface layers between different semiconductor materials, and accordingly may be used with other materials or layers in addition to the superlattice films and structures described herein, as will be appreciated by those skilled in the art.

[0057] Referring additionally to FIGS. 6 and 7, deterministic doping is typically performed with a chopped focused ion beam, which in the illustrated example is represented by circles/ovals 235 that represent deterministic electrical doping patterns. Here, the spatially defined electrical dopant layer is fixed by the superlattice layer 225. In accordance with a first example embodiment, ion beam energy may be selected close to the depth of superlattice layer 225 so that after implantation the electrical dopant is then fixed to that layer spatially, both in a vertical and horizontal sense. Applicant speculates, without wishing to be bound thereto, that this will provide a relatively high localization of the dopant, and impart improved thermal stability under subsequent anneal.

[0058] In accordance with an example process flow, the superlattice film 225 may be formed as described above, with a given structure for the preferred depth of dopant, as will be appreciated by those skilled in the art. A chopped focused ion beam may be used to form a (horizontal) spatial pattern of doping with energy to position the dopant close to the superlattice 225 (or other layer in different embodiments). An anneal may then be performed. By choosing the appropriate superlattice film 225 design (e.g., depth of O or other non-semiconductor material atomic layer(s)) and implant energy, a relatively precise location of dopants may be achievable for room temperature operation and above, as will also be appreciated by those skilled in the art. This approach may accordingly be beneficial for reducing variation from random dopant fluctuations in conventional devices, and may facilitate new device architectures, such as for quantum computing devices, for example.

[0059] In accordance with another example approach now described with reference to FIGS. 8 and 9, a spatial pattern (i.e., laterally spaced-apart superlattice regions) may be created directly in the superlattice film 225, such as through the selection and implantation of another material (e.g., of an inverse pattern to the desired electrical doping pattern), followed by an anneal to destroy the film integrity in the superlattice layer in the implanted regions (FIG. 10). Applicant speculates, without wishing to be bound thereto, that this spatial pattern, in conjunction with either a regular implant pattern 235 of the electrical dopant (or a spatial pattern as described above) may be sufficient to result in desired spatially localized and thermally robust electrical doped regions.

[0060] A method for making a semiconductor device using the above-described techniques is now described with reference to the flow diagram 300 of FIG. 10. Beginning at Block 301, the method may include forming a plurality of stacked groups of layers 45a-45n on a semiconductor substrate 21, at Block 302, with each group of layers including a plurality of stacked base semiconductor monolayers 46 defining a base semiconductor portion 46a-46n and at least one non-semiconductor monolayer 50 constrained within a crystal lattice of adjacent base semiconductor portions, as discussed further above. The method may further include implanting a dopant 235, 235 in the semiconductor substrate 21 beneath the plurality of stacked groups of layers 45a-45n in at least one localized region, at Block 303, and performing an anneal of the plurality of stacked groups of layers and semiconductor substrate and with the plurality of stacked groups of layers vertically and horizontally constraining the dopant in the at least one localized region, at Block 304, as discussed further above, which concludes the illustrated method (Block 305).

[0061] Many modifications and other embodiments of the invention will come to the mind of one skilled in the art having the benefit of the teachings presented herein. Therefore, it is understood that the invention is not to be limited to the specific exemplary embodiments disclosed herein.