DEVICE FOR MACHINING MATERIAL BY MEANS OF LASER RADIATION

Abstract

A device for machining material by means of laser radiation, including a focusing optics for focusing a laser beam onto a workpiece and an adjusting optics for adjusting the intensity distribution comprising at least two plate-shaped optical elements which are arranged one behind the other in the beam path of the laser beam, which are rotatable relative to one another in the circumferential direction, and which each have a surface with a circular pattern of sector-shaped facets which, in the circumferential direction, are alternately inclined with respect to the respective plate plane.

Claims

1. A device for machining material by means of laser radiation, comprising a focusing optics for focusing a laser beam onto a workpiece and an adjusting optics for adjusting the intensity distribution including at least one plate-shaped optical element having a circular pattern of sector-shaped facets which, in the circumferential direction, are alternately inclined with respect to the respective plate plane.

2. The device according to claim 1, wherein said plate-shaped optical element of said adjusting optics can be moved into and out of the beam path of said laser beam.

3. The device according to claim 1, wherein said adjusting optics includes at least two plate-shaped optical elements, each having a circular pattern of sector-shaped facets which, in the circumferential direction, are alternately inclined with respect to the respective plate plane, wherein said at least two plate-shaped optical elements are arranged one behind the other in the beam path of said laser beam and are rotatable relative to one another in the circumferential direction.

4. The device according to claim 1, wherein all sector-shaped facets of a plate-shaped optical element have the same azimuthal width.

5. The device according to claim 1, wherein the surfaces of the sector-shaped facets of said plate-shaped optical elements are planar or curved or have two or more differently inclined portions.

6. The device according to claim 3, wherein said two plate-shaped optical elements of said adjusting optics face each other with their sector-shaped facet patterns.

7. The device according to claim 3, wherein said two plate-shaped optical elements of said adjusting optics are rotatable about an axis which is coaxial with a central axis of a laser beam bundle.

8. The device according to claim 3, wherein the sector-shaped facet patterns of said two plate-shaped optical elements of

9. The device according to claim 3, wherein said adjusting optics comprises a further plate-shaped optical element having a sector-shaped facet pattern.

10. The device according to claim 9, wherein said further plate-shaped optical element has a sector-shaped facet pattern on both sides and is arranged between the two first plate-shaped optical elements.

11. The device according to claim 9, wherein said further plate-shaped optical element has a sector-shaped facet pattern which is different from the sector-shaped facet pattern of said two first plate-shaped optical elements.

12. The device according to claim 11, wherein the facet surfaces of said further plate-shaped optical element are inclined by an angle with respect to the plate plane which differs from the inclination angle of said two first plate-shaped optical elements and, in particular, is as large as the sum of the inclination angles of said two first plate-shaped optical elements.

13. The device according to claim 11, wherein the facets of said further plate-shaped optical element have an azimuthal width which is different from the azimuthal width of the facets of said two first plate-shaped optical elements.

14. The device according to claim 1, wherein the inclination angle of the facet surfaces with respect to the plate plane is between ±0.1° and ±0.6°.

15. The device according to claim 1, wherein the number of facets is 18 to 72, preferably 24 to 40, in particular 36.

16. The device according to claim 1, wherein a collimator optics is provided for widening said laser beam, and that said adjusting optics is arranged between said collimator optics and said focusing optics.

17. The device according to claim 1, wherein a rotary drive is assigned to at least one of said plate-shaped optical elements so that the plate-shaped optical element can be driven during a laser machining process so as to rotate at a constant or variable speed.

18. The device according to claim 16, wherein a rotary drive is assigned to each of said plate-shaped optical elements.

19. The device according to claim 17, wherein said rotary drives can be driven independently of one another, so that the rotational speed and the direction of rotation of each of said plate-shaped optical elements can be selected.

20. A method for machining material by means of laser radiation using a focusing optics for focusing a laser beam onto a workpiece and an adjusting optics for adjusting the intensity distribution, comprising at least two plate-shaped optical elements, each having a circular pattern of sector-shaped facets which, in the circumferential direction, are alternately inclined with respect to the respective plate plane, wherein said at least two plate-shaped optical elements are disposed one behind the other in the beam path of said laser beam and are rotatable in the circumferential direction, wherein, during laser machining, at least one of said plate-shaped optical elements is rotated at a constant or variable speed in order to vary a power density distribution at a desired modulation frequency.

21. The method according to claim 20, wherein both of said at least two plate-shaped optical elements are rotated in opposite directions at the same or different speeds.

22. The method according to claim 20, wherein the output power of the laser is modulated during laser machining while one or more of said plate-shaped optical elements are rotated, wherein a modulation frequency of the laser is coupled to the modulation frequency of the power density distribution.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Hereinafter, the invention is explained in more detail by way of example with reference to the drawing. In the figures:

[0039] FIG. 1 shows a perspective view of a plate-shaped optical element with a Siemens star geometry in which the inclination angle of the facet surfaces is shown in an exaggerated manner,

[0040] FIG. 2 is a schematic diagram of a focusing optics for focusing a parallel bundle of rays, wherein a single plate-shaped optical element of an adjusting optics is arranged in the bundle of rays,

[0041] FIG. 3a shows a schematic plan view of a simplified plate-shaped optical element of an adjusting optics with eight facets,

[0042] FIG. 3b is a side view (developed view) of a plate-shaped optical element for an adjusting optics according to the invention,

[0043] FIG. 4 shows schematic diagrams of the beam characteristics before the focal plane, in the focal plane, and after the focal plane,

[0044] FIG. 5 shows an arrangement of two plate-shaped optical elements for forming an adjusting optics according to the invention,

[0045] FIG. 6 shows a beam guiding and focusing system as used for laser machining in a laser machining head, in the laser beam path of which an adjusting optics with two plate-shaped optical elements is arranged, and

[0046] FIG. 7 shows an arrangement of three plate-shaped optical elements according to the invention for forming an adjusting optics, wherein the central one is patterned on both sides.

[0047] In the figures, corresponding components are provided with the same reference signs.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0048] FIG. 1 shows a plate-shaped optical element 10 which consists of a transparent disc, in particular of a plane glass made of quartz glass or zinc sulphide, which has, on one side, Siemens star-like facets which are inclined in the azimuthal or circumferential direction. Thus, the facets are narrow sectors or circular sectors, which, similar to the circular test pattern known as Siemens star, which alternately has white and black sectors, also have an alternating inclination in the circumferential direction. Two adjacent facets thus form a roof shape or a V-shaped valley shape, wherein two facets, which together form a roof shape, each form a V shape with their other adjacent facets. The plate-shaped optical element with the facets arranged in the shape of a Siemens star will hereinafter be referred to as Siemens star optics in accordance with the known Siemens star for testing imaging qualities.

[0049] Together with the plane counterface, the facet surface of each sector forms a wedge plate with a uniform beam deflection of the assigned circular sector of the collimated beam. In the drawing, the inclination angles of the facets are shown in an exaggerated manner, i.e. at ±15°. The facets, i.e., the sectors, each cover an angular range of 10° in the azimuthal or circumferential direction. This results in a total of 36 facets, i.e., 18 facets per inclination angle in the full circle.

[0050] If a Siemens star optics is arranged in the widened parallel beam path 14 of a laser beam source (not shown) in front of a focusing optics 15, as shown in FIG. 2, an annular focus image composed of individual light points (so-called spots) is produced in the focal plane F of the focusing optics 15. The individual spots, which stem from the individual facets, are shown in a more or less blurred manner in the planes I before the focal plane and II after the focal plane.

[0051] In the following, a highly simplified Siemens star geometry with eight sector-shaped facets is described. According to FIG. 3a, the Siemens star optics 10 includes eight facets 1 to 8, which are inclined in such a way that a roof line is located between the facets 1 and 2, 3 and 4, 5 and 6, 7 and 8, while a valley line is located between the facets 2 and 3, 4 and 5, 6 and 7, 1 and 8. The respective inclination angles β1, β2 are thus alternately positive and negative, as shown in FIG. 3. The inclination is thereby determined with respect to the plane of the plate, that is, with respect to the plane of the planar side of the plate-shaped Siemens star optics 10.

[0052] The collimated laser beam 14 falls onto the Siemens star optics 10 in FIG. 2 and is then focused into the focusing plane F by the focusing lens 15. The faceting shown in FIG. 3a results in a segment-wise deflection of the beam in different directions. FIG. 4 shows the beam profiles before (plane I), in (focal plane F) and after (plane II) the focal plane F. In the beam profiles before and after the focal plane F, the triangular shape of the facets is apparent due to defocusing, while the beam profile in the focus itself is composed of individual points or spots.

[0053] The deflection angle θ caused by the refraction of the preferably collimated laser beam 14 at an inclined facet is calculated from the inclination angle β and the refractive index n of the material used. The deflection angle θ is thus θ=β(n−1). This formula applies under the assumption that the small angle approximation (sin φ≈tan φ≈φ) is sufficiently valid, which is provided up to an angle of about 5°. The annular diameter in the focus is calculated from the deflection angle θ and the focal focus f:

[0054] Annular Ø=2.Math.f.Math.tan θ. Here are some examples:

TABLE-US-00001 Facet inclination angle β 0.1° 0.2° 0.4° Annular  in focus at f = 100 mm 157 μm 314 μm 628 μm

[0055] Simulations were carried out to illustrate the advantages of the beamforming according to the invention using Siemens-star-shaped facet structures.

[0056] The basic structure of the beam guiding and focusing optics is shown in FIG. 6 and technical data are given in the following table:

TABLE-US-00002 Beam source Step-index fibre, core- = 100 μm, emitted NA = 0.12 Beam source Step-index fibre with annular core, .sub.Outside = 600 μm, .sub.Inside = (alternatively) 150 μm, NA = 0.12 Collimation Perfect converging lens, f = 100 mm Focusing Perfect converging lens, f = 100 mm

[0057] Here, Ø=diameter and NA=numerical aperture.

[0058] As shown in FIG. 6, a divergent laser light bundle 14′ emerging from a an optical fibre 16 is transformed by a collimator optics 17 into a parallel laser light bundle 14, which is focused onto a workpiece 18 by the focusing lens 15. According to FIG. 6, an adjusting optics 20, i.e., a refractive optics for adjusting the intensity distribution, is inserted into the parallel laser light bundle 14. For the following simulation, a single Siemens star optics with facet structure was used, as shown in FIG. 2.

[0059] With this basic structure, the following four configurations were examined:

TABLE-US-00003 # Beam source Beamforming optics 1 Core- = 100 μm None 2 Core- = 100 μm Siemens star optics between the lenses, 36 facets à 10° angular range with ±0.4° Inclination 3 Core- = 100 μm Axicon between the lenses, inclination angle 0.1° 4 Annular core, .sub.Outside = 600 μm, None .sub.Inside = 150 μm

[0060] In the simulation, the energy distribution or the beam profile was determined 3 mm before the focal point, at the focal point, and 3 mm behind the focal point. In the first case, the beam guiding and focusing optics according to FIG. 6 is used without adjusting optics. In the second example, a Siemens star optics according to the invention was placed between the two lenses. In a third simulation, an axicon, that is, a cone with an inclination angle of 0.1°, was arranged in the beam path. As an alternative possibility of beamforming by means of fibres, a step-index fibre with a ring core was used, wherein again no further beamforming elements were introduced into the beam path. The simulation results are shown in the following table:

[0061] Thus, the simulations show that the Siemens-star-shaped facet structure of a plate-shaped optical element according to the invention, i.e., the Siemens star optics, is best suited to produce an annular profile over as wide a range as possible before and after the focal plane.

[0062] When a single Siemens star optics 10 is inserted into the beam path of the laser beam 14, as shown in FIG. 2, the annular power density distribution corresponding to the above configuration #2 (annulus) is obtained. In order to obtain the point-shaped power density distribution according to the above configuration #1 (spot), the Siemens star optics 10 needs only be taken out of the beam path of the laser beam 14. In order to switch between the spot and annulus modes and back to the spot mode, the single Siemens star optics 10 needs only be inserted into the beam path of the laser beam 14 and then removed again, as indicated by the double arrow D in FIG. 2.

[0063] If the single Siemens star optics 10 inserted into the beam path is rotated by a suitable rotary drive, as explained in more detail below in conjunction with a further embodiment of the invention, it is possible to determine the power density distribution in the annular profile, in particular in the focal plane in the circumferential direction, because the annular profile itself rotates in the focal plane, i.e., because the individual light points or spots of the annular profile substantially revolve around the optical axis. Herein, the temporal distribution of the power density at one point of the ring profile corresponds to the spatial distribution of the power density in the circumferential direction. This not only allows compensating for differences in power density caused by the point structure but also the differences based on manufacturing tolerances.

[0064] In order to achieve a continuous mixing ratio between point-shaped and annular profiles of the laser focus, two Siemens star optics of the type described with reference to FIGS. 1 to 4 are used according to the invention.

[0065] The series connection of two Siemens star optics 10 to form an adjusting optics 20 according to the invention for adjusting the intensity distribution (see FIG. 5) results in an addition of the beam deflections of the individual Siemens star optics 10. Depending on the relative angular position of the two Siemens star optics 10, three different cases arise. When the Siemens star optics 10 face each other without twist or twisted by a multiple of the facet period angle, so that oppositely inclined facets are facing each other, the beam deflections are added constructively and an annular profile is produced the diameter of which is twice as large as that of a single Siemens star optics 10. When the Siemens star optics are twisted with respect to one another by half the facet period angle so that similarly inclined facets face each other, i.e., when the roofs of the one Siemens star optics 10 are facing the valleys of the other Siemens star optics 10 and vice versa, the beam deflections of the first Siemens star optics 10 are almost exactly cancelled by the second Siemens star optics 10. In this position, the two Siemens star optics 10 act like a plane-parallel plate. As a result, a point-like focus is produced in the focal plane, as if there were no adjusting optics 20. In addition, all other angular positions which are twisted with respect to one another are also possible, so that each facet opposes both similarly and oppositely inclined facets. Therefore, a mixed profile consisting of an annulus and a point is produced. The power distribution over the beam profile depends on the respective overlap regions.

[0066] Corresponding simulations have also been carried out for suchlike adjusting optics 20 according to the invention. For this, the adjusting optics 20, as shown in FIG. 6, was inserted between the collimator lens 17 and the focusing lens 15. As shown, the simulations were only carried out for an arrangement of the adjusting optics 20 in the collimated beam area. As indicated by dashed lines in FIG. 6, however, the deflection principle according to the invention should also function in the converging beam region or in the diverging beam region (not shown).

[0067] In the simulation with an adjusting system 20 having two elements, plate-shaped Siemens star optics 10 were used, the Siemens-stern-shaped facet structure of which has facets with an angular range of 10° and an inclination angle of the facets of ±0.2°. Although the elements may basically be arranged in such a way that any surfaces can face each other, the optical elements are arranged herein in such a way that they face one another at a distance of 1 mm with their faceted surfaces, similar to FIG. 5. This has the advantage that the deflection effects complement each other or cancel out, as shown by the last two rows in the table below.

[0068] In order to be able to determine the suitability for use in laser processing as accurately as possible, manufacturing tolerances were taken into account during the simulation. For this purpose, the radially extending tips of the roofs and the troughs of the valleys were flattened with an azimuthal width of 10 μm. This results in a beam portion which is not subject to beamforming and is thus always imaged as a point in the centre of focus. According to the simulation, this portion is of 2% at maximum, which is quite negligible in the use in material machining.

[0069] In the simulation, it became apparent that the individual image of the facets can no longer be recognized even at a small axial distance from the focal plane (0.35 μm) and, causing a nearly homogeneous annular profile to arise. For illustrative purposes, the beam profiles in two planes were calculated in the following table. The following table shows the corresponding results for various relative angles between the two elements.

[0070] The adjusting optics 20 according to the invention may, however, also be constructed with more than two elements, as is shown, for example, in FIG. 7. In order to obtain a complete compensation of the beam deflections of the individual elements in this case and in order to be able to optimally combine the different beam profiles, it is advantageous when the inclination angle of the facets of an element is twice as large as the inclination angle of the facets of the two other optical elements in which the angle of inclination is equal. If an adjusting optics is to be constructed with four elements, the inclination angle of the facets for the fourth element must be as large as the sum of the inclination angles of the facets of the three other elements. When, for example, the inclination angle is ±0.1° for the first two elements and the angle for the third element is ±0.2° , the inclination angle of the facets for the fourth element should be chosen to be ±0.4°.

[0071] In a simulation, an adjusting optics including three optical elements having Siemens-star-shaped facets, i.e., including three Siemens star optics 10, was used, wherein the facets of one of the elements were twice as steep (±0.2°) as the facets of the other two elements, which were only inclined by ±0.1°. These two were individually rotatable. As a result, a point-shaped focus as well as two annuli with different diameters (600 μm and 300 μm) as well as any desired mixed shapes may be produced. As described above, a possible manufacturing tolerance was also taken into account here by flattening the tips and troughs.

[0072] The results of the simulation are shown in the following table:

[0073] In the table above, the first row shows the relative position of the elements, in which the beam deflections are optimally added, which leads to the largest diameter achievable with the device.

[0074] Rows 2 and 3 show the results at angular positions in which the effects of the two elements cancel out optimally at the same inclination angles so that the annular diameter is determined only by the inclination angle of the facets of the element with a large inclination angle. The fourth row shows what the intensity distribution is like in the focus when the elements are twisted relative to each other in such a way that their beam deflections cancel optimally. This result corresponds to the comparative example shown in the last row of the table without adjusting optics.

[0075] The remaining rows of the table show arbitrary mixed shapes.

[0076] When an adjusting optics according to the invention is used, for example, in a laser cutting head with a collimator lens and a focusing lens with a respective focal length of 100 mm which is supplied with laser radiation via a 100 μm fibre with a numerical aperture of 0.12, rapid switching between the states annulus and spot (point) is possible with the adjusting optics including two elements according to the invention. This makes it possible to switch between the “thick plate” operating mode, which requires a large-diameter focus, and the “thin plate” operating mode, which only requires a point-shaped laser focus. As has been shown by the simulations, it is also possible, by rotating by less than one facet, i.e., by an angle which is smaller than the angle of a facet, to produce mixed states of annular and point-shaped beam characteristics so that the optimum energy distribution in the beam profile may be selected during laser cutting as required.

[0077] When, in a practical embodiment of the invention, an adjusting optics is used the plate-like optical elements (Siemens star optics) of which have a diameter of 30 mm and include 18 double facets, i.e., 36 facets with a sector angle of 10°, the edge is displaced by 2.6 mm when twisting the two Siemens star optics by one facet with respect to one another. Such a displacement can be realized at a high speed when, for example, the movable optics is mounted in a hollow shaft which is not shown in detail and which is driven by a stepping motor which can move the edge of the rotatable Siemens star optics at a speed of v=250 mm/s. Then, a switching time of approximately 10 ms is obtained, so that switching from annulus to spot or vice versa can be performed virtually without interruption.

[0078] However, with an adjusting optics 20 which is constructed from two or more Siemens star optics 10, it is not only possible to switch from annulus to spot or vice versa, but also to modulate the spatial intensity distribution of a laser beam focused on a workpiece at high frequency in order to increase the quality during laser cutting and laser welding. For this purpose, an adjusting system 20 with two or more successive Siemens star optics 10 is required, at least one of which is rotatably mounted about the optical axis and can be caused to rotate. As stated above, the adjusting optics 20 may be arranged in the collimated, divergent or convergent part of the beam path.

[0079] In order to switch the produced intensity distribution in the focal plane from spot to annulus, a relative rotation of the Siemens star optics 10 with N double segments (double facets) of 360°/2N is sufficient. At a relative rotation of 360°/N, a change from spot to annulus and back to spot takes place. This corresponds to a period of oscillation.

[0080] It follows that the modulation frequency of the intensity distribution corresponds to N times the relative rotational frequency of the Siemens star optics 10. Thus, a pair of Siemens star optics 10 provides an optical transmission which provides, even at small rotational frequencies of one or all of the Siemens star optics 10, a high modulation frequency for the intensity distribution of the laser beam 14 in the focal plane.

[0081] When, for example, an adjusting optics 20 with two Siemens star optics 10, the Siemens star surfaces of which each have N=20 double facets or segments, and a drive for at least one of the Siemens star optics 10 with a rotational frequency of 100 Hz are used, the intensity distribution is modulated between the modes spot and annulus at a frequency of 2 kHz.

[0082] In particular, the following operating modes are conceivable: [0083] Only one of the Siemens star optics 10 is rotated at the frequency f The modulation frequency then corresponds to N*f. [0084] Both Siemens star optics 10 are rotated with respect to one another at the rotational frequencies f1 and f2. The modulation frequency corresponds to N*(f1+f2).

[0085] If more than two systems are used, [0086] annular intensity distributions with different diameters can be produced, as already explained above; also [0087] the modulation frequency can be further increased.

[0088] For this purpose, every Siemens star optics must always rotate in the opposite direction to its adjacent Siemens star optics. The modulation frequency with the rotational frequencies f.sub.i is obtained as N*(Σ.sub.m f.sub.i). When, for example, three Siemens star optics, each with N=20 double facets and a rotation frequency of 100 Hz, are used, the intensity distribution is modulated between the modes spot and annulus at a frequency of 6 kHz.

[0089] As an example, a configuration as shown in FIG. 7 is to be used. As shown in FIG. 7, an adjusting optics 30 includes three screen star optics 10.1, 10′.2 and 10.3, the central Siemens star optics 10′.2 being patterned on both sides. A total of four Siemens star surfaces O1, O2a, O2b, O3 are thus provided with N double-facets each. The two oppositely disposed Siemens star surfaces O1 and O2a have the same facet pitch or inclination angle β.sub.1. The two other mutually opposing screening surfaces O2b and O3 have the same facet pitch or inclination angle β.sub.2, wherein the inclination angle β.sub.1 is different from the inclination angle β.sub.2 in a manner not specified in detail. By rotating the Siemens star optics 10.1 relative to the Siemens star optics 10′.2, the common annular shape of the Siemens star surfaces O1 and O2a can be switched. The same applies to the Siemens star optics 10′.2 and 10.3 and the Siemens star surfaces O2b and O3.

[0090] As indicated in FIG. 7, a rotary drive 31, 32 or 33 is assigned to each of the three Siemens star optics 10.1, 10′.2 and 10.3, so that all three Siemens star optics 10.1, 10′.2 and 10.3 are rotatable at the frequency f. The direction of rotation of the central Siemens star optics 10′.2 is, in this case, opposite to the direction of rotation of the other two, as indicated by the direction of rotation arrows P. If different rotational frequencies of the three Siemens star optics 10.1, 10′.2 and 10.3 are allowed, in particular the number of intensity distributions produced during a period is increased.

[0091] A selection of the various operating modes of the arrangement described with reference to FIG. 7 is given by the following table:

TABLE-US-00004 Intensity distributions during a Modulation Position 10.1 Position 10′.2 Position 10.3 period frequency rotating at f at rest, spot .sub.1 Sp N*f rotating at f at rest, annulus .sub.2 .sub.3 N*f at rest, spot rotating at f .sub.2 Sp N*f at rest, annulus rotating at f .sub.1 .sub.3 N*f at rest rotating at f at rest, in phase with .sub.3 Sp N*f 10.1 at rest rotating at f at rest, 180° PV relative to .sub.1 .sub.2 N*f 10.1 rotating at f at rest rotating at f, in phase with .sub.3 Sp 2*N*f 10.1 rotating at f at rest rotating at f, 180° PV .sub.1 .sub.2 2*N*f relative to 10.1 rotating at f rotating at f rotating at f, in phase with .sub.3 Sp 3*N*f 10.1 rotating at f rotating at f rotating at f, 180° PV .sub.1 .sub.2 3*N*f relative to 10.1

[0092] 5 Here, PV=phase shift, Sp=spot-shaped intensity distribution, and

[0093] Øi=diameter of the annular intensity distribution

[0094] As a result of the interplay of the continuous rotation of the Siemens star optics 10; 10.1, 10′.2, 10.3 with the optical transmission effect of one or more pairs of Siemens stars, the produced intensity distribution in the focus is modulated at N times the rotational frequency or at N times the sum of the rotational frequencies, where N is the number of double-facets per Siemens star optics 10; 10.1, 10′.2, 10.3.

[0095] Due to the optical transmission effect, the requirements for the rotational speed are low. In order to rotate one or more Siemens star optics with double-digit or triple-digit rotational frequency, electric drives with different drive mechanisms, which are available on the market, can be used as rotary drives.

[0096] As an alternative to an electric drive, it is also conceivable to implement a rotary drive by means of compressed air. The gas supply is generally provided, since compressed air (and/or cutting gas) is usually available in the area of the laser machining head.

[0097] In the market, there are also rotary drives which can rotate an optics such as a Siemens star optics at particularly high rotational frequencies of up to 6 kHz. If applied to the above example with two Siemens star optics with N=20 double facets, modulation frequencies of up to 120 kHz are achieved.

[0098] Starting at a modulation frequency in the 2-digit kHz range, the sheet to be machined only experiences the intensity distribution averaged over a modulation period, since, due to the relative inertia of the heat conduction, the input power cannot be redistributed quickly enough. The modulation of the intensity distribution thus acts as a continuous beam widening and can therefore replace or supplement complex zoom systems.

[0099] In all cases and configurations, the laser machining head according to the invention is also preferably suitable for thin-plate welding or cutting, since the annular shaping can be deactivated by means of a suitable fixed angle position of all the Siemens star optics used in order to operate the laser machining head in the spot mode.