Apparatus for generating a line-beam from a diode-laser array
09851571 · 2017-12-26
Assignee
Inventors
Cpc classification
G02B27/0927
PHYSICS
H01S5/4012
ELECTRICITY
G02B19/0057
PHYSICS
H01S5/4025
ELECTRICITY
International classification
H01S3/08
ELECTRICITY
G02B27/09
PHYSICS
Abstract
Apparatus for generating a line-beam includes a diode-laser bar, a linear micro-lens array, and a plurality of lenses spaced apart and arranged along an optical axis. The linear micro-lens array and the lenses shape laser-radiation emitted by the diode-laser bar to form a uniform line-beam in an illumination plane. The lenses project a far-field image of the diode-laser bar onto an image plane proximate to the illumination plane. The diode-laser bar is rotated from parallel alignment with the linear micro-lens array for providing uniform line-beam illumination over a range of locations along the optical axis.
Claims
1. An apparatus for generating a line-beam, comprising: a diode-laser bar emitting laser-radiation in an emission direction, the diode-laser bar having perpendicular slow-axis and fast-axis directions; a collimating lens arranged to intercept the laser-radiation and collimate the laser-radiation in the fast-axis direction; a focusing lens; a linear micro-lens array having a plurality of cylindrical micro-lenses arranged in an elongated array thereof, the linear micro-lens array having a first direction parallel with the elongated array of cylindrical micro-lenses and a second direction perpendicular to the elongated array of cylindrical micro-lenses; a first cylindrical lens and a second cylindrical lens; wherein the collimating lens, the focusing lens, the linear micro-lens array, the first cylindrical lens, and the second cylindrical lens located in recited order along an optical axis in the emission direction, and arranged to form the line-beam from the laser-radiation emitted by the diode-laser bar; and wherein, the slow-axis and fast-axis directions are rotated from parallel alignment with the first and second directions by a fixed angle of at least 2°.
2. The apparatus of claim 1, where in the fixed angle is between about 2° and 20°.
3. The apparatus of claim 1, wherein the first cylindrical lens has positive optical power in the first direction and the second cylindrical lens has positive optical power in the second direction.
4. The apparatus of claim 1, wherein the collimating lens, the focusing lens, and the second cylindrical lens are selected and arranged to illuminate an image plane in the second direction with a far-field image of the diode-laser bar.
5. The apparatus of claim 1, wherein the collimating lens has a first focal length, the collimating lens and the diode-laser bar being separated by about the first focal length.
6. The apparatus of claim 1, wherein the focusing lens has positive optical powers in the fast-axis and slow-axis directions.
7. The apparatus of claim 6, wherein the optical powers of the focusing lens are about the same in the slow-axis and fast-axis directions.
8. The apparatus of claim 1, wherein the focusing lens has a second focal length in the slow-axis direction, the focusing lens and the diode-laser bar being separated by about the second focal length.
9. The apparatus of claim 8, wherein the focusing lens and the linear micro-lens array are separated by about the second focal length.
10. The apparatus of claim 1, wherein the diode-laser bar includes a plurality of diode-laser emitters, the focusing lens and the linear micro-lens array arranged to spread the laser-radiation in the slow-axis direction and illuminate every one of the cylindrical micro-lenses with laser-radiation from every one of the diode-laser emitters.
11. The apparatus of claim 10, wherein each cylindrical micro-lens is a source of mixed laser-radiation, the first cylindrical lens arranged to overlap mixed laser-radiation from every one of the cylindrical micro-lenses in a first illumination plane, the overlapping mixed-beams of laser-radiation forming the line-beam in the first illumination plane, the line-beam being parallel with the first direction.
12. The apparatus of claim 11, wherein the first cylindrical lens has a third focal length, the first cylindrical lens and the first illumination plane being separated by about the third focal length.
13. An apparatus for generating a line-beam, comprising: a diode-laser bar emitting laser-radiation in an emission direction, the diode-laser bar having perpendicular slow-axis and fast-axis directions; a fast-axis collimating lens arranged to intercept the laser-radiation and collimate the laser-radiation in the fast-axis direction; a first linear micro-lens array having a plurality of first cylindrical micro-lenses arranged in an elongated array thereof, the first linear micro-lens array having a first direction parallel with the elongated array of first cylindrical micro-lenses and a second direction perpendicular to the elongated array of first cylindrical micro-lenses; a focusing lens; a second linear micro-lens array having a plurality of second cylindrical micro-lenses arranged in an elongated array thereof, the second linear micro-lens array having a third direction parallel with the elongated array of second cylindrical micro-lenses and a fourth direction perpendicular to the elongated array of second cylindrical micro-lenses; a cylindrical lens; wherein the fast-axis collimating lens, the first linear micro-lens array, the focusing lens, the second linear micro-lens array, and the cylindrical lens located in recited order along an optical axis in the emission direction, and arranged to form the line-beam from the laser-radiation emitted by the diode-laser bar; and wherein, the first and second directions are rotated from parallel alignment with the third and fourth directions by a fixed angle of at least 2°.
14. The apparatus of claim 13, wherein the fixed angle is between about 2° and 20°.
15. The apparatus of claim 13, wherein the slow-axis direction is parallel to the third direction and the fast-axis direction is parallel to the fourth direction.
16. The apparatus of claim 13, wherein the focusing lens has positive optical powers in the first and second directions, and the cylindrical lens has positive optical power in the third direction.
17. The apparatus of claim 13, further including a slow-axis collimating-lens array located on the optical axis between the fast-axis collimating lens and the first linear micro-lens array, the slow-axis collimating-lens array arranged to intercept the laser-radiation and collimate the laser-radiation in the slow-axis direction.
18. An apparatus for generating a line-beam, comprising: a diode-laser bar emitting laser-radiation in an emission direction, the diode-laser bar having perpendicular slow-axis and fast-axis directions; a collimating lens arranged to intercept the laser-radiation and collimate the laser-radiation in the fast-axis direction; a focusing lens; a linear micro-lens array having a plurality of cylindrical micro-lenses arranged in an elongated array thereof, the linear micro-lens array having a first direction parallel with the elongated array of cylindrical micro-lenses and a second direction perpendicular to the elongated array of cylindrical micro-lenses, the slow-axis and fast-axis directions rotated from parallel alignment with the first and second directions by a fixed angle of at least 2°, the focusing lens and the linear micro-lens array arranged for uniform illumination of the linear micro-lens array by the laser-radiation; a cylindrical lens, the collimating lens, the focusing lens, the linear micro-lens array and the cylindrical lens located in recited order along an optical axis in the emission direction, and arranged to form the line-beam in a first illumination plane from the laser-radiation emitted by the diode-laser bar; an aperture located in a second illumination plane, the aperture arranged to partially block the line-beam in the first direction; and a spherical lens, the spherical lens located on the optical axis and arranged to project an image of the partially-blocked line-beam in the second illumination plane to a third illumination plane.
19. The apparatus of claim 18, where in the fixed angle is between about 2° and 20°.
20. The apparatus of claim 18, wherein the cylindrical lens has positive optical power in the first direction.
21. The apparatus of claim 18, wherein the cylindrical lens has a focal length, the cylindrical lens and the first illumination plane being separated by about the focal length.
22. The apparatus of claim 18, wherein each cylindrical micro-lens is a source of laser-radiation, the cylindrical lens arranged to overlap laser-radiation from every one of the cylindrical micro-lenses in the first illumination plane, the overlapping laser-radiation forming the line-beam in the first illumination plane, the line-beam being parallel with the first direction.
23. An apparatus for generating a line-beam, comprising: a diode-laser bar emitting laser-radiation in an emission direction, the diode-laser bar having perpendicular slow-axis and fast-axis directions; a fast-axis collimating lens arranged to intercept the laser-radiation and collimate the laser-radiation in the fast-axis direction; a first linear micro-lens array having a plurality of first cylindrical micro-lenses arranged in an elongated array thereof, the first linear micro-lens array having a first direction parallel with the elongated array of first cylindrical micro-lenses and a second direction perpendicular to the elongated array of first cylindrical micro-lenses; a focusing lens; a second linear micro-lens array having a plurality of second cylindrical micro-lenses arranged in an elongated array thereof, the second linear micro-lens array having a third direction parallel with the elongated array of second cylindrical micro-lenses and a fourth direction perpendicular to the elongated array of second cylindrical micro-lenses, the first and second directions rotated from parallel alignment with the third and fourth directions by a fixed angle of at least 2°, the focusing lens and the second linear micro-lens array arranged for uniform illumination of the second linear micro-lens array by the laser-radiation; a cylindrical lens, the fast-axis collimating lens, the first linear micro-lens array, the focusing lens, the second linear micro-lens array, and the cylindrical lens located in recited order along an optical axis in the emission direction, and arranged to form the line-beam in a first illumination plane from the laser-radiation emitted by the diode-laser bar; an aperture located in a second illumination plane, the aperture arranged to partially block the line-beam in the third direction; and a spherical lens, the spherical lens located on the optical axis and arranged to project an image of the partially-blocked line-beam in the second illumination plane to a third illumination plane.
24. The apparatus of claim 23, wherein the fixed angle is between about 2° and 20°.
25. The apparatus of claim 23, wherein the slow-axis direction is parallel to the third direction and the fast-axis direction is parallel to the fourth direction.
26. The apparatus of claim 23, wherein the focusing lens has positive optical powers in the first and second directions, and the cylindrical lens has positive optical power in the third direction.
27. The apparatus of claim 23, further including a slow-axis collimating-lens array located on the optical axis between the fast-axis collimating lens and the first linear micro-lens array, the slow-axis collimating-lens array arranged to intercept the laser-radiation and collimate the laser-radiation in the slow-axis direction.
28. The apparatus of claim 23, wherein the cylindrical lens has a focal length, the cylindrical lens and the first illumination plane being separated by about the focal length.
29. The apparatus of claim 23, wherein each second cylindrical micro-lens is a source of laser-radiation, the cylindrical lens arranged to overlap laser-radiation from every one of the second cylindrical micro-lenses in the first illumination plane, the overlapping laser-radiation forming the line-beam in the first illumination plane, the line-beam being parallel with the third direction.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The accompanying drawings, which are incorporated in and constitute a part of the specification, schematically illustrate a preferred embodiment of the present invention, and together with the general description given above and the detailed description of the preferred embodiment given below, serve to explain principles of the present invention.
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DETAILED DESCRIPTION OF THE INVENTION
(15) Turning now to the drawings, wherein like features are designated by like reference numerals,
(16) The optical components are, in order along the emission direction from diode-laser bar 20: a fast-axis collimating lens 30, a focusing lens 32, a linear micro-lens array 34, a cylindrical lens 36, and a cylindrical lens 38. Fast-axis collimating lens 30 has positive optical power in the fast-axis direction and zero optical power in the slow-axis direction. Focusing lens 32 has positive optical powers in the fast-axis and slow-axis directions.
(17) Linear micro-lens array 34 includes a plurality of cylindrical micro-lenses 40 arranged in a linear array thereof along a transverse direction “X”. Each cylindrical micro-lens 40 has positive optical power in the X direction and zero optical power in a direction “Y” perpendicular to the X direction. Cylindrical lens 36 has positive optical power in the X direction and zero optical power in the Y direction. Cylindrical lens 38 has zero optical power in the X direction and positive optical power in the Y direction.
(18) The emission direction of the diode-laser bar is also the propagation direction “Z” of laser-radiation through all the optical components. Elongated line-beam 26 has dimensions width “W” and height “H”, which are aligned with the X and Y directions, respectively. The slow-axis and fast-axis directions of the diode-laser bar are rotated from parallel alignment with the X and Y directions of the linear micro-lens array by a fixed angle “θ”, which is between about 2° and 20°. Angle θ is 7° in the drawing.
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(20) Rays of laser-radiation 42 emitted through a front facet 46 of diode-laser bar 20 are highly divergent in the fast-axis direction, diverging at a full-width half maximum (FWHM) angle between about 30° and 50°. Fast-axis collimating lens 30 has an input principal plane 48, an output principal plane 49, and a focal length “F.sub.1” in the fast-axis direction. Input principal plane 48 is located a distance F.sub.1 from front-facet 46. Fast-axis collimating lens 30 is arranged to intercept all rays of laser-radiation 42. Fast-axis collimating lens 30 collimates rays of laser-radiation 42 in the fast-axis direction and is benign in the slow-axis direction. Rays of laser-radiation 42 emitted by diode-laser bar 20 also diverge in the slow-axis direction, diverging at a FWHM angle between about 8° and 15°.
(21) The optical powers of focusing lens 32 in the fast-axis and slow-axis directions are preferably about the same, as depicted in the drawings. Focusing lens 32 is located in plane 50 and has a focal length F.sub.2 in the slow-axis direction. Focal length F.sub.2 is generally much longer than focal length F.sub.1. Focusing lens 32 is arranged to intercept all rays of laser-radiation 42 and direct the rays of laser-radiation onto linear micro-lens array 34. Plane 50 is located a distance “d.sub.1” from front-facet 46 and a distance “d.sub.2” from a front side 52 of linear micro-lens array 34. Distance d.sub.1 is preferably equal to focal length F.sub.2, to minimize incidence angles of rays of laser-radiation 42 on front side 52 and thereby maximize transmission of the laser-radiation through linear micro-lens array 34.
(22) In the slow-axis direction, laser-radiation 42 emitted from each diode-laser emitter 22 is spread across front side 52 of linear micro-lens array 34 by focusing lens 32, illuminating every cylindrical micro-lens 40. Linear micro-lens array 34 is located and arranged for uniform illumination of front side 52. Preferably, distance d.sub.2 is equal to focal length F.sub.2, otherwise the uniform illumination of linear micro-lens array 34 becomes sensitive to distance d.sub.1. In the fast-axis direction, rays of laser-radiation 42 are focused by focusing lens 32 in a plane 54, which includes or is proximate to linear micro-lens array 34.
(23) Linear micro-lens array 34 has a back side 56, opposite front side 52. Rays of laser-radiation 44 emanating from each cylindrical micro-lens 40 on back side 56 are divergent in both the X and Y directions. Cylindrical lens 36 is arranged to intercept all rays of laser-radiation 44. Cylindrical lens 36 is located in plane 58 and has a focal length “F.sub.3” in the X-direction. Cylindrical lens 36 is selected to illuminate a width of about W in the X-direction in another illumination plane 60. Illumination plane 60 is located at a distance F.sub.3 from plane 58. Laser-radiation 44 emanating from each cylindrical micro-lens 40 overlaps with the laser-radiation from all the other cylindrical micro-lenses in illumination plane 60.
(24) Although each diode-laser emitter 22 in diode-laser bar 20 is a discrete source of laser-radiation and the individual emitters may vary in brightness, illumination plane 60 is uniformly illuminated because each cylindrical micro-lens 40 is partially illuminated by every diode-laser emitter. Linear micro-lens array 34 thereby mixes laser-radiation from the individual diode-laser emitters, such that each micro-lens is a source of a mixed-beam of laser-radiation. Similarly, any angular bias in the emission from diode-laser bar 20 in the slow-axis direction is eliminated by linear micro-lens array 34 and cylindrical lens 36 cooperatively spreading and overlapping the mixed-beams of laser-radiation from all cylindrical micro-lenses 40 in illumination plane 60.
(25) Cylindrical lens 38 is arranged to intercept all rays of laser-radiation 44 and form images of front facet 46 in an image plane 62 located a distance “d.sub.3” from illumination plane 60. Cylindrical lens 38 focuses rays of laser-radiation 44 in the Y direction and is benign in the X direction. Cylindrical lens 38 has a focal length F.sub.4 in the Y-direction. Distance d.sub.3 is generally much shorter than focal lengths F.sub.3 and F.sub.4.
(26) Fast-axis collimating lens 30, focusing lens 32, and cylindrical lens 38 cooperatively illuminate image plane 62 in the Y direction with images of diode-laser emitters 22. Two types of image are formed and superimposed in image plane 62, due to the rotation of diode-laser bar 20 with respect to linear micro-lens array 34. For a fast-axis component projected onto the Y direction, a far-field image of the diode-laser emitters is formed in image plane 62. Equivalently, an image is formed in another image plane 64 located a distance F.sub.1 from output principal plane 49 that is a spatial Fourier transform of front facet 46. The Fourier transform image of front facet 46 is projected from image plane 64 to image plane 62. For a slow-axis component projected onto the Y-direction, a magnified image of diode-laser emitters 22 is formed in image plane 62.
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(29) Smile is defined here as the displacement between the highest and lowest diode-laser emitters in the fast-axis direction. Rays of laser-radiation 66 (solid line) depict illumination when diode-laser emitters have no smile. Rays of laser-radiation 68 (dotted line) depict illumination when the diode-laser emitters have a smile of 2.5 μm. Rays of laser-radiation 66 and 68 form line-beams in image plane 62 having the same height “h.sub.1”. The imaging properties of apparatus 10 create a line-beam in image plane 62 that is insensitive to smile.
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(33) Returning to
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(39) Linear micro-lens array 34 is a single element in apparatus 10. However, the beam homogenizer could include two discrete micro-lens arrays spaced apart along optical axis 24, without departing from the spirit and scope of the present invention. In some applications a unitary homogenizer or compact two-element homogenizer would be preferable.
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(41) The optical components are arranged along optical axis 24 in order from diode-laser bar 20: fast-axis collimating lens 30, optional slow-axis collimating-lens array 82, linear micro-lens array 84, focusing lens 32, and linear micro-lens array 34. Linear micro-lens array 84 includes a plurality of cylindrical micro-lenses 40 arranged in a linear array thereof along a transverse direction “X”. Each cylindrical micro-lens 40 has positive optical power in the X′ direction and zero optical power in a direction “Y′” perpendicular to the X′ direction.
(42) The X′ and Y′ directions of linear micro-lens array 84 are rotated from parallel alignment with the X and Y directions of linear micro-lens array 34 by a fixed angle, which is between about 2° and 20°. This fixed rotation in apparatus 80 has the same effect as the fixed rotation of the diode-laser bar with respect to the linear micro-lens array in apparatus 10. In apparatus 80, the slow-axis and fast-axis directions of diode-laser bar 20 are preferably aligned parallel to the X and Y directions of linear micro-lens array 34, thereby aligning the polarization of rays of laser-radiation 44 with the geometric axes of elongated line-beam 26.
(43) Optional slow-axis collimating-lens array 82 includes a plurality of lenses 86 arranged in a linear array thereof along the slow-axis direction. Each lens 86 has positive optical power in the slow-axis direction and zero optical power in the fast-axis direction. In a typical arrangement, each lens 86 collimates emission from one of the diode-laser emitters 22 of diode-laser bar 20 in the slow-axis direction. Optional slow-axis collimating-lens array 82 collimates rays of laser-radiation 88 emitted by diode-laser bar 20, such that all angles-of-incidence of rays of laser-radiation 88 are within the angle-of-acceptance of linear micro-lens array 84. Optional slow-axis collimating array 82 also enables diode-laser bar 20 to be separated from linear micro-lens array 84, creating space to accommodate other optical elements, such as filters and Bragg gratings.
(44) Linear micro-lens array 84 in apparatus 80 is located in an equivalent location to diode-laser bar 20 in apparatus 10. Linear micro-lens array 84 is effectively the source of laser-radiation 42. Linear micro-lens array 84 may be selected to angularly distribute rays of laser-radiation 42 as required for uniform illumination of the linear micro-lens array 34.
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(47) Linear micro-lens array 34 is uniformly illuminated by laser-radiation from diode-laser bar 20. Diode-laser bar 20 or linear micro-lens array 84 is rotated by angle θ with respect to linear micro-lens array 34 to form an elongated line-beam insensitive to smile over a range of distances. Therefore, another illumination plane 96 located distance d.sub.6 away from illumination plane 60 may be selected. Distance d.sub.6 is sufficient to mitigate structure caused by interference in the elongated line-beam.
(48) Considering the propagation and diffraction of coherent beams of laser-radiation 44 from illumination plane 60, to mitigate structure in illumination plane 96, distance d.sub.6 must be greater than
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“λ” is the wavelength of the laser-radiation, N is the total number of micro-lenses, and “Λ” is the pitch of the linear micro-lens array. For the exemplary dimensions above, λ=660 nanometers (nm), N=40, and Λ=250 μm, d.sub.6 must be greater than about 8.3 mm.
(50) The elongated line-beam formed on illumination plane 60 has sharp edges in the X direction. Increasing distance d.sub.6 degrades the sharpness of the edges of the elongated line-beam in illumination plane 96. Such degradation is apparent in the elongated line-beam of
(51) It is preferable to select and arrange cylindrical lens 38 to locate image plane 62 in illumination plane 96 (to make d.sub.3 equal to d.sub.6). Locating the image plane in the illumination plane produces highly symmetric and uniform illumination in the Y direction, as discussed above.
(52) The present invention is described above in terms of a preferred embodiment and other embodiments. The invention is not limited, however, to the embodiments described and depicted herein. Rather, the invention is limited only by the claims appended hereto.