A beam irradiation device that irradiates a plurality of electron beams includes a multibeam optical system that emits the plurality of beams to be irradiated on a target; and a controller that controls an irradiation state of each of the plurality of beams in accordance with change in a relative position between the target and the multibeam optical system, and based on the irradiation state of a first beam of the plurality of beams, controls the irradiation state of a second beam of the plurality of beams.

Techniques for eye-tracking in a near-eye display system are disclosed. One example of a near-eye display system includes a waveguide-based display substrate that is transparent to visible light and configured to be placed in front of a user's eye. The waveguide-based display substrate includes a first surface area configured to specularly reflect a first portion of invisible light reflected by the user's eye to a camera to form a first image of the user's eye in a first area of an image frame, and a light deflector embedded in the waveguide-based display substrate or formed on a second surface area of the waveguide-based display substrate. The light deflector is configured to direct a second portion of the invisible light reflected by the user's eye to the camera to form a second image of the user's eye in a second area of the image frame.

A device for producing an output light emission having a light source for emitting light and a first polarizing beam splitter element positioned so at least one portion of the emitted light is incident thereupon, wherein a first reflected light beam of a first polarization state and a second transmitted light beam of a second polarization state are produced. The device also includes a first liquid crystal element having at least two states which are actuated using a control unit. The first liquid crystal element at least partially reflects the first light beam, wherein the polarization state of the first light beam is altered based on the state of the first liquid crystal element. The first polarizing beam splitter element is positioned so the first light beam is incident thereupon after reflection at the first liquid crystal element.

An exposure apparatus scans a substrate in a Y-axis direction and also adjusts irradiation position of a plurality of beams, based on correction information obtained from the same number of distortion tables as the beams, the distortion tables including information concerning change of irradiation position of the plurality of beams of a multibeam optical system. Especially, the irradiation position of the plurality of beams in the Y-axis direction is adjusted by individually controlling irradiation timing of the plurality of beams irradiated on the substrate from the multibeam optical system.

A vortex beam-excited precision grating displacement measurement apparatus, which performs displacement measurement by taking a vortex beam carrying topological charges as an excitation light source of a grating and by using the interference of a m-order diffracted vortex beam. In the vortex beam-excited precision grating displacement measurement method and apparatus, the displacement p/m of the measured displacement corresponds to the rotation of a circle 2 rad of an interference petal pattern, and then the rotation of 1 of the interference petal pattern corresponds to the measured displacement amount of p/360m. Compared with a conventional grating measurement method, the present disclosure provides a grating interference sensing signal that realizes a higher optical subdivision rate itself.

Embodiments of the present disclosure provide a holographic display device. The holographic display device includes a spatial light modulator and a light source unit. The light source unit is provided on the light entry side of the spatial light modulator and configured to providing read-out light to the spatial light modulator. The spatial light modulator includes at least one loading portion for receiving a write-in signal, which comprises a plurality of pixel units arranged in a matrix form, and the light exit surface of at least a part of which is a first cambered surface protruding in a direction away from the light source unit.

A polarized image acquisition apparatus includes a division type half-wave plate, located opposite to the mask substrate with respect to an objective lens and near an objective lens pupil position, to arrange P and S polarized waves of the transmitted light having passed through the objective lens to be mutually orthogonal, a Rochon prism to separate trajectories of P and S polarized waves, an imaging lens to form images of P and S polarized waves having passed through the Rochon prism at image formation positions different from each other, a mirror, in a case where one of P and S polarized waves is focused/formed at one of the different image formation positions, to reflect the other wave at the other position, a first sensor to capture an image of one of P and S polarized waves, and a second sensor to capture an image of the other wave.

A delivery system for use within a lithographic system. The beam delivery system comprises optical elements arranged to receive a radiation beam from a radiation source and to reflect portions of radiation along one or more directions to form a one or more branch radiation beams for provision to one or more tools.

A backlight unit for a binocular-holographic display device and a holographic display device including the same are provided. The backlight unit includes a light source unit which outputs light, a first beam expansion unit which expands, in a first direction, the light output from the light source unit, a second beam expansion unit which expands, in a second direction perpendicular to the first direction, the light output from the first beam expansion unit, and a beam deflection unit which diffracts light incident on the first beam expansion unit. The holographic display device includes the backlight unit, a field lens, and a spatial light modulator.

An illumination system including an excitation light source, a transparent substrate, a dichroic film, a first color wheel element and a light uniforming element are provided. The excitation light source emits a first color light. The first color wheel element includes a wavelength conversion material. The first color wheel element has a first side and a second side. The first color light passes through a solid structure of the transparent substrate and the dichroic film, and is transmitted to the first color wheel element and converted into a second color light by the wavelength conversion material. A first part of the second color light is transmitted towards the dichroic film, and is reflected back to the first color wheel element by the dichroic film to enter the light uniforming element. A second part of the second color light passes through the first color wheel element to enter the light uniforming element.