A system for resonantly enhanced frequency conversion includes a nonlinear crystal for frequency converting a pump laser beam, and mirrors forming a ring resonator for the pump laser beam such that a closed propagation path of the pump laser beam, inside the ring resonator, passes through the nonlinear crystal. The mirrors include an adaptive mirror, a curved-mirror pair positioned in a first segment of the propagation path spanning between the adaptive mirror and the nonlinear crystal, and an input coupler for coupling the pump laser beam into the ring resonator. The curved-mirror pair forms an imaging system having conjugate planes at the adaptive mirror and the nonlinear crystal. The input coupler is positioned in a second segment of the propagation path that spans between the adaptive mirror and the nonlinear crystal and does not include deflection by the curved-mirror pair.

An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a heater attached to or embedded in the EUV collector mirror body and a drain structure to drain melted metal from the reflective surface of the EUV collector mirror body to a back side of the EUV collector mirror body.

An inspection system is described. The inspection system includes a camera and a housing. The housing contains a reflective dome. The reflective dome includes an apex and a viewport. The viewport is offset from the apex. The camera is mounted to capture light exiting the reflective dome through the viewport. And, a plurality of light sources are arranged about the reflective dome such that light output from the plurality of light sources enters the dome.

A projection exposure apparatus for semiconductor lithography includes a mirror and a temperature-regulating device for regulating temperature on the basis of radiation. The mirror includes at least one cutout. The temperature-regulating device includes a temperature-regulating body arranged without contact in the cutout of the mirror. The temperature-regulating body has a cavity. A fluid for temperature regulation of the temperature-regulating body is present in the cavity.

A micromirror array comprises a substrate, a plurality of minors for reflecting incident light and, for each mirror (20) of the plurality of minors, at least one piezoelectric actuator (21) for displacing the minor, wherein the at least one piezoelectric actuator is connected to the substrate. The micromirror array further comprises one or more pillars (24) connecting the minor to the at least one piezoelectric actuator. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection apparatus.

An optical element reflects radiation, such as EUV radiation. The optical element includes a substrate with a surface to which a reflective coating is applied. The substrate has at least one channel through which a coolant can flow. The substrate is formed from fused silica, such as titanium-doped fused silica, or a glass ceramic. The channel has a length of at least 10 cm below the surface to which the reflective coating is applied. The cross-sectional area of the channel varies by no more than +/−20% over the length of the channel.

An optical system includes at least one optical element which has an optically effective surface and which is designed for an operating wavelength of less than 30 nm. The optical system also includes a heating arrangement for heating this optical element and comprising a plurality of IR emitters for irradiating the optically effective surface with IR radiation. The IR emitters are activatable and deactivatable independently of each other to variably set different heating profiles in the optical element. The optical system further includes at least one beam shaping unit for shaping the beam of the IR radiation steered onto the optically effective surface by the IR emitters. The optical system also includes a multi-fiber head comprising a multi-fiber connector for connecting optical fibers. IR radiation from a respective one of the IR emitters is suppliable by way of each of these optical fibers.

There is provided an optical scanner including: a mirror having a reflection surface for reflecting light, and a first back surface positioned at a side opposite to the reflection surface; a permanent magnet disposed at the first back surface of the mirror; a support portion that supports the mirror and has a second back surface positioned at the same side as the first back surface; a shaft portion that couples the mirror and the support portion to each other and enables the mirror to swing around a swing axis; a first member disposed at the second back surface of the support portion; a second member that supports the first member in a cantilever manner in a direction orthogonal to the swing axis and along the second back surface; a third member disposed to face the first member via the second member and coupled to the second member; and an electromagnetic coil disposed between the first member and the third member.

An optical component mount includes a fixed portion and a movable portion, the mount being configured to support at least one optical component, the fixed portion and the movable portion being mechanically connected to each other by a flexible articulation which is capable of allowing the movable portion to move relative to the fixed portion. The mount includes a cooling circuit which is integrated into the fixed portion, the movable portion and the articulation and which is capable of allowing a fluid to flow inside the mount, the cooling circuit including a fluid inlet hole and a fluid outlet hole, the fluid inlet hole and the fluid outlet hole being arranged on the fixed portion.

The disclosure provides an integral control system for a galvanometer laser lamp. The system includes an integral control and drive device, a power source, and a plurality of component parts. The integral control and drive device includes a drive board, a galvanometer control module, and a laser control module. The component parts include a galvanometer motor and a laser that are respectively connected to the galvanometer control module and the laser control module. This optimizes the volume of the integral control and drive device and improves wiring between the modules, effectively reduces the volume of the entire system, and lowers the transportation and mounting costs.