Humidity sensors may exhibit a relatively small amount of hysteresis and/or a faster response time. In some cases, a humidity sensor may include a polymeric humidity sensing layer disposed over an electrode layer. The polymeric humidity sensing layer may include a halogenated layer disposed over the polymeric humidity sensing layer. The polymeric humidity sensing layer may, for example, include a polyimide and the halogenated layer may include a monolayer or less than a monolayer of a halogenated material such as a fluorinated material.

A sensor module has a first sensor element and a second sensor element. The first sensor element and the second sensor element are accommodated in a common housing of the sensor module. The sensor module includes a conductor structure that comprises an electrode structure and a separate connection structure. The connection structure is connected in an electrically conductive manner to the first sensor element and the electrode structure is allocated to the second sensor element.

A sensor includes a substrate, a reference electrode provided above the substrate, a lower electrode provided above the reference electrode via an insulating film, and an upper electrode provided above the lower electrode via a physical quantity detecting film. The upper electrode and the lower electrode form a parallel-plate-type detection capacitor, and the lower electrode and the reference electrode form a parallel-plate-type reference capacitor.

A detecting device includes a semiconductor substrate and a detecting unit disposed over the semiconductor substrate, the detecting unit being configured to output a signal in response to a physical property. The detecting device includes a noise suppressing layer disposed below the detecting unit and in the semiconductor substrate, or, disposed between the detecting unit and the semiconductor substrate.

A gas sensing device comprising a substrate comprising an etched cavity portion and a substrate portion, a dielectric layer disposed on the substrate, wherein the dielectric layer comprises a dielectric membrane, wherein the dielectric membrane is adjacent to the etched cavity portion of the substrate, a heater located within the dielectric layer; a material for sensing a gas; and one or more polysilicon electrodes coupled with the material for sensing a gas.

A micromechanical moisture-sensor device and a corresponding manufacturing method. The micromechanical moisture-sensor device is equipped with a first electrode device situated on the substrate; a second electrode device situated on the substrate; an electrical insulation device situated between the first electrode device and the second electrode device which includes a first area, which is in contact with the first electrode device and the second electrode device, and which includes a second area, which is exposed by the first electrode device and the second electrode device; a moisture-sensitive functional layer, which is applied across the first electrode device and the second electrode device and the second area of the insulation device lying between them in such a way that it forms a moisture-sensitive resistive electrical shunt at least in some areas between the first electrode device and the second electrode device.

A capacitive relative humidity sensor includes a first electrode and a second electrode, where at least the one of the electrodes is a water-permeable electrode. The electrodes act in conjunction with a water-sensitive hygroscopic dielectric material. The design enables low-cost and simple fabrication of fast-responding and stable relative humidity sensors using digital fabrication techniques.

A relative humidity sensor is disclosed. The relative humidity sensor includes a first electrode and a second electrode disposed above a dielectric substrate. A humidity sensitive layer is disposed above at least one of the first electrode and the second electrode, where the humidity sensitive layer comprises a curable composition comprising cellulose acetate butyrate and a hydrophobic filler. In some embodiments, a dust protection layer is disposed above the humidity sensitive layer.

A sensor body has a body recess portion, in which a sensor element is housed and the body recess portion opens at a body opening portion. A sensor cover has a cover window which communicates between the intake passage and the body opening portion, and the sensor cover covers the sensor body. A sensor filter is provided with a sensor peripheral portion which extends along a virtual surface. In a projection view with respect to the virtual plane the body opening portion and the cover window are positioned within a filtering area which is defined as an inner side of a contour of the filter peripheral portion, such that the filter peripheral portion contacts the sensor body and the sensor cover.

A sensor for detecting a medium, including a capacitive measuring device having at least two electrodes and at least one dielectric, and including an electronic device, which is configured to ascertain a variable regarding and/or dependent on capacitance and to determine an information item regarding the presence of the medium and/or its concentration in view of the ascertained variable; the electronic device being additionally configured to vary a voltage applied between the electrodes, using at least two frequencies, the variable being ascertainable for each of the frequencies, with the aid of the electronic device, a deviation variable regarding a deviation of the variables ascertained for the different frequencies from one another being able to be determined, and the information item being able to be determined in additional view of the deviation variable. In addition, the present invention relates to a method for operating a capacitive measuring device.