Methods and apparatus to provide efficient and scalable RF inductive plasma processing are disclosed. In some aspects, the coupling between an inductive RF energy applicator and plasma and/or the spatial definition of power transfer from the applicator are greatly enhanced. The disclosed methods and apparatus thereby achieve high electrical efficiency, reduce parasitic capacitive coupling, and/or enhance processing uniformity. Various embodiments comprise a plasma processing apparatus having a processing chamber bounded by walls, a substrate holder disposed in the processing chamber, and an inductive RF energy applicator external to a wall of the chamber. The inductive RF energy applicator comprises one or more radiofrequency inductive coupling elements (ICEs). Each inductive coupling element has a magnetic concentrator in close proximity to a thin dielectric window on the applicator wall.

Sterilisation systems suitable for clinical use, e.g. on the human body, medical apparatuses, or hospital bed spaces. The sterilisation apparatus comprises: a microwave source arranged to generate microwave energy; a mist generator arranged to generate a flow of water mist; a gas supply; a manifold connected to receive the flow of water mist from the mist generator; and a plurality of plasma applicators connected to the manifold, wherein each plasma applicator is connected to receive microwave energy from the microwave source and a flow of gas from the gas supply, wherein each plasma applicator is configured to strike a plasma at a distal end thereof, wherein the distal ends of the plurality of plasma applicators are disposed in a plasma generating region defined by the manifold, and wherein the manifold is configured to direct the flow of water mist through the plasma generating region to an outlet thereof.

Provided is a pipe holding connection structure configured so that the width of the entire structure is reduced and so that the number of parts and the number of assembly work processes are reduced. This pipe holding connection structure is provided with: a housing affixed so as to air-tightly close the opening of a vacuum container; a first pipe having a portion near an end portion thereof extending through both the opening and the housing; and a second pipe having a female thread part engaging with a male thread part located at the end portion. The pipe has a locking part. Fluid is caused to flow through both the pipes. Pieces of packing are provided between the pipe and the housing and between the pipe and an end portion of the pipe, respectively. This pipe holding connection structure can be used for a high-frequency antenna device.

A cathode unit includes first and second magnet units that are driven to rotate around an axis on a side opposed to a sputtering surface of a target. The first magnet unit is configured to cause a first leakage magnetic field to act on a space in front of the sputtering surface including a target center inward. The second magnet unit is configured to cause a second leakage magnetic field to act locally in the space in front of the sputtered surface located between the target center and the outer edge of the target and to enable self-holding discharge under low pressure of plasma confined by the second leakage magnetic field.

A hybrid plasma source and an operation method thereof, the hybrid plasma source is formed by combining the mechanisms of microwave plasma and transformer coupled plasma for gas dissociation and chemical activation. A reaction chamber of the hybrid plasma source is composed of two microwave resonant chambers and sets of hollow metal tubes, after a high-intensity electric field is generated by the microwave resonant chambers to generate a plasma, a high power and high density plasma generated by the highly-efficient coupling mechanism of the transformer coupled plasma is capable of greatly improving a gas conductance, each set of the hollow metal tubes is driven by each set of ferrite transformer magnetic cores to disperse power, which reduces an energy density of each of the hollow metal tubes and reduces occurrence of plasma entering a contraction mode from a diffusion mode, thereby further improving an operable gas flow rate.

A hybrid plasma source and an operation method thereof, the hybrid plasma source is formed by combining the mechanisms of microwave plasma and transformer coupled plasma for gas dissociation and chemical activation. A reaction chamber of the hybrid plasma source is composed of two microwave resonant chambers and sets of hollow metal tubes, after a high-intensity electric field is generated by the microwave resonant chambers to generate a plasma, a high power and high density plasma generated by the highly-efficient coupling mechanism of the transformer coupled plasma is capable of greatly improving a gas conductance, each set of the hollow metal tubes is driven by each set of ferrite transformer magnetic cores to disperse power, which reduces an energy density of each of the hollow metal tubes and reduces occurrence of plasma entering a contraction mode from a diffusion mode, thereby further improving an operable gas flow rate.

An apparatus (14) for supplying a medical instrument (15) for the treatment of biological tissue (11) due to the action of a plasma (28) is disposed, in accordance with the invention, in a special manner for the ignition and the stable development of a plasma (28) on the electrode (27) of the instrument (15). To accomplish this, the apparatus (14) comprises a control device (23) that, during an ignition test, limits—preferably in an instrument-specific manner—the current deliverable to the instrument (15) and/or limits the electrical power to be output to the instrument (15), and/or, in doing so, works with a reduced operating voltage. With this measure, a rapid, stable plasma development with minimal spark play is achieved with a large variety of connectable instruments (15a-15e).

An apparatus (14) for supplying a medical instrument (15) for the treatment of biological tissue (11) due to the action of a plasma (28) is disposed, in accordance with the invention, in a special manner for the ignition and the stable development of a plasma (28) on the electrode (27) of the instrument (15). To accomplish this, the apparatus (14) comprises a control device (23) that, during an ignition test, limits—preferably in an instrument-specific manner—the current deliverable to the instrument (15) and/or limits the electrical power to be output to the instrument (15), and/or, in doing so, works with a reduced operating voltage. With this measure, a rapid, stable plasma development with minimal spark play is achieved with a large variety of connectable instruments (15a-15e).

A hollow cathode apparatus includes an outer tubular dielectric barrier circumferentially surrounding an outer tubular surface of the cathode tube, the outer tubular dielectric barrier being composed of a barrier material which is electrically non-conductive. Also disclosed is a system comprising the hollow cathode apparatus, an anode which is spaced from the output end of the tubular cathode, and electrical circuitry connected between the cathode tube and the anode for connection to a source of electrical power for providing an electrical potential between the cathode and anode to cause an electric current to pass from the emitter into the input gas to form a plasma which is then output through the output end of the cathode tube to form a plasma plume. The electrical circuitry comprises: a first power supply for connecting the cathode and the cathode electrode to a first source of DC power in an ignition power mode, wherein the first power supply comprises a current control device which is adapted to control the current between the cathode and the cathode electrode, wherein the current control device is arranged to function as an anti-surge current stabiliser; and a second power supply for connecting the anode and the cathode to a second source of DC power in a steady state power mode.

A hollow cathode apparatus includes an outer tubular dielectric barrier circumferentially surrounding an outer tubular surface of the cathode tube, the outer tubular dielectric barrier being composed of a barrier material which is electrically non-conductive. Also disclosed is a system comprising the hollow cathode apparatus, an anode which is spaced from the output end of the tubular cathode, and electrical circuitry connected between the cathode tube and the anode for connection to a source of electrical power for providing an electrical potential between the cathode and anode to cause an electric current to pass from the emitter into the input gas to form a plasma which is then output through the output end of the cathode tube to form a plasma plume. The electrical circuitry comprises: a first power supply for connecting the cathode and the cathode electrode to a first source of DC power in an ignition power mode, wherein the first power supply comprises a current control device which is adapted to control the current between the cathode and the cathode electrode, wherein the current control device is arranged to function as an anti-surge current stabiliser; and a second power supply for connecting the anode and the cathode to a second source of DC power in a steady state power mode.