The present invention is one which prevents the occurrence of cracks in piezo elements and reduces the thermal effects on the control board, and comprises a fluid control valve driven by a piezo actuator, a fluid sensor which measures the pressure or flow rate of the fluid, a control board which controls the fluid control valve based on the measured value measured by the fluid sensor, and a discharge resistor provided on a component different from the control board.

The disclosed embodiments are generally directed to optical systems. The optical systems may include a proximal lens that may transmit light toward an eye of a user. The optical systems may also include a distal lens that may, in combination with the proximal lens, correct for at least a portion of a refractive error of the eye of the user. The optical systems may further include a selective transmission interface. The selective transmission interface may couple the proximal lens to the distal lens, transmits light having a selected property, and does not transmit light that does not have the selected property. The optical system can also include an accommodative lens, such as a liquid lens. Various other methods, systems, and computer-readable media are also disclosed.

A method for forming a MEMS device is provided. The method includes forming a stack of layers on a base piezoelectric layer. The stack of layers includes a base metal film over the base piezoelectric layer; a first piezoelectric film over the base metal film; and a first metal film having an opening therein over the first piezoelectric film. The method also includes forming a trench in the stack of layers, wherein the trench passes through the opening in the first metal film but does not expose the base metal film; after forming the trench, forming a spacer structure under the first metal film but spaced apart from the base metal film; after forming the spacer structure, deepening the trench to expose the base metal film; and forming a contact in the trench.

A multilayer ceramic electronic component is provided in which wet spreading of a metal bump material can be suppressed and a position of the metal bump can be controlled with high accuracy. The multilayer ceramic electronic component includes a ceramic body having first and second main surfaces and first to fourth lateral surfaces between the main surfaces. Moreover, first and second opposing internal electrodes are provided inside the ceramic body and led out to one or more of the second lateral surfaces. A first electrode is provided on the first main surface and contains a ceramic material and a first external electrode that is connected to the first internal electrode, extends on the first electrode. In addition, a second external electrode is connected to the second internal electrode and extends onto the first main surface.

There are provided an excitation electrode, a quartz crystal vibrator element, a quartz crystal vibrator, a sensor, an oscillator, and a method of manufacturing a quartz crystal vibrator element which are not affected by heat in a process or a use environment to surely prevent a frequency fluctuation from occurring, reduction in size of which can be achieved, and which are low in cost and excellent in productivity. The excitation electrodes are disposed on an outer surface of a quartz crystal plate, apply an electrical field for exciting the quartz crystal plate to the quartz crystal plate, have a single layer structure formed of a two-dimensional layered substance, and are used when arranged as a pair so as to be opposed to each other via the quartz crystal plate.

An electrical component includes a main body, a metallic contact structure, which is in direct contact with the main body, and an electrically insulating passivation layer provided with an opening. The metallic contact structure is connected to an external contact-making element through the opening. Furthermore, the external contact-making element is covered and enclosed by a flexible metal composite layer. A method for producing an electrical component is also specified.

A surface acoustic wave filter includes first and second signal terminals and first and second IDT electrodes that are adjacent to or in a vicinity of each other in an x-axis direction and that each includes a pair of comb-shaped electrodes each including a busbar electrode extending in the x-axis direction and electrode fingers extending in a y-axis direction. One of the comb-shaped electrodes in each of the first and second IDT electrodes is electrically connected to the first and second signal terminals, respectively. The surface acoustic wave filter further includes a bridging capacitance including a pair of comb-shaped electrodes arranged in a region outside an overlap region of the electrode fingers. One of the comb-shaped electrodes of the bridging capacitance is electrically connected to the comb-shaped electrode in the first IDT electrode. The other of the comb-shaped electrodes of the bridging capacitance is electrically connected to the comb-shaped electrode in the second IDT electrode.

A surface acoustic wave sensor in which instrument drift resulting from accumulated surface contamination is minimized. The sensor includes a piezeoelectric substrate defined by an outer surface and a plurality of interdigitated electrodes mounted thereon. The electrodes are defined by one or more exposed portions and an unexposed portion abutting the outer surface of the piezoelectric substrate. An inert coating layer on the outer surface of the piezoelectric substrate and the exposed portions of the electrodes is provided, and can be a perfluoro-silane type compound, a perfluoro-trichloro-silane type compound, a perfluoro-acrylate type compound, polytetrafluoroethylene, or heptadecafluorodecyltrimethoxysilane.

A piezoelectric actuator of a multilayer design includes outer electrodes that are fastened by means of a bonding layer applied by thermal spraying. For example, the outer electrodes are formed as a woven wire fabric. Furthermore, a method for fastening an outer electrode in a piezoelectric actuator is specified.

An electronic component includes an inner electrode inside of a main body and exposed at a surface of the main body, and an outer electrode on a surface of the main body and electrically connected to the inner electrode, wherein a plurality of recesses are provided in a surface of the outer electrode, and each of the plurality of recesses includes a portion in which a diameter of an opening of the recess gradually decreases toward an opening side of the recess.