Patent classifications
H01L23/5252
Method for fabricating semiconductor device with programmable element
The present application discloses a method for fabricating a semiconductor device The method includes providing a substrate; forming a channel region in the substrate; forming a gate dielectric layer on the channel region; forming a gate bottom conductive layer on the gate dielectric layer; forming first impurity regions on two ends of the channel region; forming first contacts on the first impurity regions; forming programmable insulating layers on the first contacts; forming a gate via on the gate bottom conductive layer; and forming a top conductive layer on the gate via and the programmable insulating layers.
Semiconductor device including anti-fuse cell
A structure includes anti-fuse cells. The anti-fuse cells include a first active area, a first gate, a second gate, at least one first gate via, and at least one second gate via. The first gate and the second gate are separate from each other. The first gate and the second gate extend to cross over the first active area. The at least one first gate via is coupled to the first gate and disposed directly above the first active area. The at least one second gate via is coupled to the second gate. The first gate is coupled through the at least one first gate via to a first word line for receiving a first programming voltage, and the second gate is coupled through the at least one second gate via to a second word line for receiving a first reading voltage.
SEMICONDUCTOR DEVICE INCLUDING ANTI-FUSE CELL STRUCTURE
A structure includes a word line, a bit line, and an anti-fuse cell. The anti-fuse cell includes a reading device, a programming device, and a dummy device. The reading device includes a first gate coupled to the first word line, a first source/drain region coupled to the bit line, and a second source/drain region. The first source/drain region and the second source/drain region are on opposite sides of the first gate. The programming device includes a second gate, a third source/drain region coupled to the second source/drain region, and a fourth source/drain region. The third source/drain region and the fourth source/drain region are on opposite sides of the second gate. The dummy device includes a third gate, a fifth source/drain region coupled to the fourth source/drain region, and a sixth source/drain region. The fifth source/drain region and the sixth source/drain region are on opposite sides of the third gate.
METHOD FOR MANUFACTURING HIGH-DENSITY THREE-DIMENSIONAL PROGRAMMABLE MEMORY
A method for manufacturing a high-density three-dimensional programmable memory, relating to the memory manufacturing technology, comprises the following steps: 1) forming a base structure; 2) grooving the base structure; 3) disposing, storage medium layers required by a preset memory structure layer by layer on an inner wall of the division groove; 4) filling a core medium in the division groove to form a core medium layer; 5) etching, through a mask etching process, to form deep holes along the separation division groove filled with the core where the deep holes truncate the core medium in the division groove; and 6) filling an insulation medium in the deep holes. The method has the beneficial effects of low costs and the highest storage density.
LAYOUT METHOD BY BURIED RAIL FOR CENTRALIZED ANTI-FUSE READ CURRENT
A memory device includes an anti-fuse cell array having a plurality of anti-fuse cells, each of the plurality of anti-fuse cells having a first transistor and a second transistor connected to the first transistor. A first terminal of the first transistor is connected to a bit line and the bit line is a buried rail formed in a substrate of the first transistor and the second transistor.
ONE-TIME-PROGRAMMABLE MEMORY DEVICE INCLUDING AN ANTIFUSE STRUCTURE AND METHODS OF FORMING THE SAME
A one time programmable memory device includes a field effect transistor and an antifuse structure. A first node of the antifuse structure includes, or is electrically connected to, the drain region of the field effect transistor. The antifuse structure includes an antifuse dielectric layer and a second node on, or over, the antifuse dielectric layer. One of the first node and the second node includes the drain region or a metal via structure formed within a via cavity extending through an interlayer dielectric material layer that overlies the field effect transistor.
MEMORY DEVICE AND METHOD FOR FORMING THE SAME
An OTP memory device includes a substrate, a first transistor, a second transistor, a first word line, second word line, and a bit line. The first transistor includes a first gate structure, and first and second source/drain regions on opposite sides of the first gate structure. The second transistor is operable in an inversion mode, and the second transistor includes a second gate structure having more work function metal layers than the first gate structure of the first transistor, and second and third source/drain regions on opposite sides of the second gate structure. The first word line is over and electrically connected to the first gate structure of the first transistor. The second word line is over and electrically connected to the second gate structure of the second transistor. The bit line is over and electrically connected to the first source/drain region of the first transistor.
SEMICONDUCTOR DEVICE WITH PROGRAMMABLE UNIT AND METHOD FOR FABRICATING THE SAME
The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a first dielectric layer on a substrate; first/second upper short axis portions extending along a first direction, separated from each other, and on the first dielectric layer; a common source region in the substrate and adjacent to the first/second upper short axis portions; a first branch drain region in the substrate, adjacent to the first upper short axis portion, and opposite to the common source region; a second branch drain region in the substrate, adjacent to the second upper short axis portion, and opposite to the common source region; and a top electrode on the first dielectric layer and topographically above the first branch drain region and the second branch drain region. The top electrode, the first dielectric layer, and the first/second branch drain regions together configure a programmable unit.
NOVEL METAL FUSE STRUCTURE BY VIA LANDING
In one aspect of the present disclosure, a semiconductor device is disclosed. In some embodiments, the semiconductor device includes a first conductive structure extending in a first direction, the first conductive structure coupled to a metal-oxide-semiconductor (MOS) device; a second conductive structure extending in the first direction and spaced from the first conductive structure in a second direction perpendicular to the first direction; a dielectric material extending in the second direction and disposed over, in a third direction perpendicular to the first direction and the second direction, the first conductive structure; and a via structure disposed over the second conductive structure and in contact with the dielectric material, wherein the dielectric material is configured to create a channel between the first conductive structure and the via structure when a voltage is applied to the second conductive structure.
OPERATION METHOD OF MULTI-BITS READ ONLY MEMORY
An operation method of a multi-bits read only memory includes a step of applying a gate voltage to a conductive gate, a first voltage to a first electrode, and a second voltage to a second electrode. The multi-bits read only memory of the present invention includes a substrate and a transistor structure with the conductive gate mounted between the first electrode and the second electrode, a first oxide located between the first electrode and the conductive gate, and a second oxide located between the second electrode and the conductive gate. The present invention creates an initial state wherein the transistor structure is not conducting, an intermediate state wherein the first oxide is punched through by the first voltage, and a fully opened state wherein both the first oxide and the second oxide are punched through. The aforementioned states allow storage of multiple bits on the read only memory.