Patent classifications
H01L29/0607
METHOD FOR FORMING TRANSISTOR STRUCTURE
A method for forming a transistor structure includes steps as follows: A substrate with an original surface is prepared. Next a gate conductive region is formed, wherein at least a portion of the gate conductive region is disposed below the original surface, and a bottom wall and sidewalls of the gate conductive region is surrounded by a gate dielectric layer. Then, a first conductive region is formed, wherein a bottom wall of the first conductive region is aligned or substantially aligned with a top wall of the gate conductive region.
SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF
Embodiments provide a semiconductor structure and a fabrication method. The method includes: providing a substrate provided with first trenches and including an active pillar positioned between adjacent two of the first trenches; forming, in the active pillar, a second trench whose bottom is greater than or equal to a bottom of the first trench in height; forming a first dielectric layer and a protective layer in the first trench, the first dielectric layer being positioned between the protective layer and the active pillar, and an upper surface of the first dielectric layer being lower than an upper surface of the active pillar; forming second dielectric layers on an exposed side wall of the first trench and a side wall of the second trench, a third trench being formed between each of the second dielectric layers and the protective layer, and a fourth trench being formed between the second dielectric layers.
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
The present disclosure relates to a semiconductor device including an n-type gallium oxide semiconductor layer that has a center region and a peripheral region having a lower donor density than the center region, an electrode layer that is laminated on the n-type gallium oxide semiconductor layer, and forms Schottky junction with the n-type gallium oxide semiconductor layer in the center region as viewed from a lamination direction, and a first p-type nickel oxide semiconductor layer that is laminated on the n-type gallium oxide semiconductor layer such that the first p-type nickel oxide semiconductor layer is partially positioned between the n-type gallium oxide semiconductor layer and the electrode layer, and has an outer peripheral end portion on a peripheral region side in the peripheral region as viewed from the lamination direction.
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE
A semiconductor structure and a method for manufacturing a semiconductor structure are provided. The semiconductor structure includes: a substrate, first gate structures, second gate structures, and a covering layer. The substrate includes semiconductor channels spaced apart from each other and arranged at a top portion of the substrate and extending in a vertical direction. Each first gate structure is arranged in a first area of a respective semiconductor channel and is arranged around the respective semiconductor channel. Each second gate structure is arranged in a second area of a respective semiconductor channel and includes a ring structure and at least one bridge structure. The covering layer is arranged in a spaced area between any two adjacent semiconductor channels. The covering layer includes first interconnecting holes extending in the vertical direction.
LAYOUT STRUCTURE OF ANTI-FUSE ARRAY
A layout structure of an anti-fuse array at least includes an array circuit area and a functional circuit area. The array circuit area is electrically connected with the functional circuit area. The functional circuit area is located on at least one side of the array circuit area, and at least one side of the array circuit area is located on an edge of the layout structure. The array circuit area includes an anti-fuse array composed of anti-fuse cells, and the array circuit area is configured to provide the anti-fuse cells under different column addresses to the functional circuit area. The functional circuit area is configured to fuse the anti-fuse cells under the different column addresses.
SEMICONDUCTOR DEVICE
A semiconductor device includes: a semiconductor layer; a gate trench formed in the semiconductor layer; an insulating layer formed on the semiconductor layer; a gate electrode buried in the gate trench via the insulating layer; a gate wiring formed on the insulating layer and electrically connected to the gate electrode; and a protection trench formed in the semiconductor layer, wherein the semiconductor layer includes an outer peripheral region including outer edges of the semiconductor layer in a plan view and an inner region surrounded by the outer peripheral region, wherein the gate trench includes an outer peripheral gate trench portion arranged in the outer peripheral region and surrounded by the protection trench in a plan view, and wherein the outer peripheral gate trench portion and the protection trench are formed in a closed annular shape along the outer edges of the semiconductor layer in the outer peripheral region.
SEMICONDUCTOR TRANSISTOR STRUCTURE AND MANUFACTURING METHOD
The present application discloses a semiconductor transistor structure, which includes: a substrate formed with a well region of a first conductive type, a gate structure being disposed on the substrate; a source/drain region of a second conductive type disposed in the well region of the first conductive type, the source region and the drain region being located on two sides of the gate structure respectively; a contact hole formed at a position corresponding to the source/drain region; and a conductive metal filled in the contact hole, the bottom of the contact hole being implanted with impurity ions for decreasing the contact resistance of the contact hole, and the impurity ion concentration at a peripheral region where the bottom of the contact hole comes into contact with the source/drain region being lower than the impurity ion concentration at a middle region.
BURIED POWER RAIL WITH A SILICIDE LAYER FOR WELL BIASING
Embodiments described herein may be related to apparatuses, processes, and techniques related to well biasing using a buried power rail (BPR) within a circuit structure. Embodiments include using a silicide material between the BPR and a well, where the silicide material provides ohmic contact between the BPR and the well. Other embodiments may be described and/or claimed.
Method and Device for Producing an Edge Structure of a Semiconductor Component
A method for producing an edge structure of a semiconductor component includes: providing a semiconductor body having at least two mutually spaced-apart main faces respectively having an edge, between which edges an edge face extends; and etching a predetermined edge contour by purposely applying a chemical etchant onto the edge face by an etchant jet with simultaneous rotation of the semiconductor body about a rotation axis. The etchant jet is guided with a predetermined jet cross section, while being directed tangentially with respect to the edge face, such that the etchant jet impinges on the edge face only with a part of the jet cross section. A corresponding device for producing an edge structure of a semiconductor component is also described.
SEMICONDUCTOR DEVICE
A semiconductor device includes a first semiconductor layer of a first conductivity type; a second semiconductor layer of the first conductivity type; a first semiconductor region of a second conductivity type; a second semiconductor region of the first conductivity type; a trench; a gate insulating film; a gate electrode; a third semiconductor region of the second conductivity type; a fourth semiconductor region of the second conductivity type; a fifth semiconductor region of the first conductivity type, selectively provided in the second semiconductor layer and having an impurity concentration lower than an impurity concentration of the second semiconductor layer; a first electrode; and a second electrode. The fifth semiconductor region has one surface in contact with the first semiconductor region, another surface in contact with the third semiconductor region, and a side surface in contact with the gate insulating film.