According to one embodiment, a semiconductor device includes: a semiconductor substrate; a first well of a first conductivity type in a surface region that comprises a surface of the semiconductor substrate; a first impurity region of a second conductivity type in a region of a surface of the first well; a second impurity region of the second conductivity type, a portion of the first well being located between the second impurity region and the first impurity region in the surface region of the semiconductor substrate; a first insulating body on the surface of the semiconductor substrate; a gate electrode extending over part of the first well and part of the second impurity region on the first insulating body; a second insulating body extending on an upper surface of the gate electrode and over a region above the second impurity region; and a first conductive body on the second insulating body.

A semiconductor device includes a semiconductor substrate in which a first region having a freewheeling diode arranged therein, second regions having an IGBT arranged therein, and a withstand-voltage retention region surrounding the first region and the second regions in plan view are defined. The semiconductor substrate has a first main surface and a second main surface. The semiconductor substrate includes an anode layer having a first conductivity type, which is arranged in the first main surface of the first region, and a diffusion layer having the first conductivity type, which is arranged in the first main surface of the withstand-voltage retention region adjacently to the anode layer. A first trench is arranged in the first main surface on a side of the anode layer with respect to a boundary between the anode layer and the diffusion layer.

A semiconductor device includes: a substrate; a source region and a drain region located in the substrate; a gate structure located in the substrate between the source region and the drain region; an insulating layer located between the gate structure and the drain region; a plurality of field plates located on the insulating layer, wherein the field plate closest to the gate structure is electrically connected to the source region; a first well region located in the substrate; a body contact region located in the first well region, wherein the body contact region is electrically connected to the source region and the field plate closest to the gate structure; and a first doped drift region located in the substrate, wherein the gate structure is located between the first well region and the first doped drift region, and the drain region is located in the first doped drift region.

A device is described herein. The device comprises a unit cell of a silicon carbide (SiC) substrate. The unit cell comprises: a trench in a well region having a second conduction type. The well region is in contact with a region having a first conduction type to form a p-n junction. A width of the trench is less than 1.0 micrometers (μm). A width of the unit cell is one of less than and equal to 5.0 micrometers (μm). The device comprises a source region comprising the first conduction type. The device further comprises a metal oxide semiconductor field effect transistor component. The device described herein comprises a reduced unit cell pitch and reduced channel resistance without any compromise in channel length. The device comprises an ILD opening greater than or equal to width of the trench.

A semiconductor structure, including a substrate, a first well, a second well, a first doped region, a second doped region, a first gate structure, a first insulating layer, and a first field plate structure. The first and second wells are disposed in the substrate. The first doped region is disposed in the first well. The second doped region is disposed in the second well. The first gate structure is disposed between the first and second doped regions. The first insulating layer covers a portion of the first well and a portion of the first gate structure. The first field plate structure is disposed on the first insulating layer, and it partially overlaps the first gate structure. Wherein the first field plate structure is segmented into a first partial field plate and a second partial field plate separated from each other along a first direction.

According to one aspect provision is made of a method for ion implantation in a semiconductor wafer placed in an implantation chamber under vacuum, the semiconductor wafer having an integrated circuit area and a peripheral area around this integrated circuit area, the ion implantation allowing to apply a doping in regions, called implantation regions, of the integrated circuit area, the method comprising: forming a photosensitive resin coating serving as a mask on the semiconductor wafer, then forming openings in the photosensitive resin coating at said implantation regions of the integrated circuit area and at least at one region of the peripheral area, then implanting ions in the semiconductor wafer.

A method of fabricating a heterostructure includes providing a substrate, and implementing a non-sputtered, epitaxial growth procedure at a growth temperature to form a wurtzite structure supported by the substrate. The wurtzite structure includes an alloy of gallium nitride. The non-sputtered, epitaxial growth procedure is configured to incorporate a group IIIB element into the alloy. The wurtzite structure exhibits a breakdown field strength greater than a ferroelectric coercive field strength of the wurtzite structure.

The embodiments herein describe a vertical field effect transistor (FET) with a gate that includes different work function metals (WFMs). Each WFM can be made up of one material (or one layer) or multiple materials forming multiple layers. In any case, the gate includes at least two different WFMs. For example, a first WFM may have a different material or layer than a second WFM in the gate, or one layer of the first WFM may have a different thickness than a corresponding layer in the second WFM. Having different WFMs in the gate can reduce the gate induced drain leakage (GIDL) in the FET.

A high electron mobility transistor (HEMT) device including a substrate, a channel layer, a barrier layer, a p-type gallium nitride (GaN) spacer, a gate electrode, a source electrode, and a drain electrode is provided. The channel layer is disposed on the substrate. The barrier layer is disposed on the channel layer and has a protruding portion. The P-type GaN spacer is disposed on a side wall of the protruding portion. The gate electrode is disposed on the protruding portion and the P-type GaN spacer. The source electrode and the drain electrode are disposed on two sides of the gate electrode.

A device includes a substrate; a buffer layer on the substrate; a barrier layer on the buffer layer, a source electrically coupled to the barrier layer; a gate electrically coupled to the barrier layer; and a drain electrically coupled to the barrier layer. The device further includes an electron concentration reduction structure arranged with at least one of the following: in the barrier layer and on the barrier layer. The electron concentration reduction structure is configured to at least one of the following: reduce electron concentration around the gate, reduce electron concentration around an edge of the gate, reduce electron concentration, increase power gain, increase efficiency, decouple the gate from the drain, decouple the gate from the source, and reduce capacitance.