The disclosure discloses a thin film transistor and a manufacturing method thereof. The method includes depositing quantum dot ink containing carbon quantum dots in a groove region between a source electrode and a drain electrode, after the quantum dot ink is dry, cleaning and blow-drying the dried quantum dot ink to film the carbon quantum dots to be an active layer of the thin film transistor. Accordingly, the disclosure can simplify the manufacturing process of the thin film transistor and enhance the production efficiency, as well as reducing costs and improving control sensitivity.

A thin film transistor, a manufacturing method thereof, an array substrate and a display panel are provided. The thin film transistor includes: a base substrate; and a gate electrode, a gate insulating layer, an active layer and a source/drain electrode layer which are on the base substrate. The source/drain electrode layer includes a source electrode and a drain electrode. The thin film transistor further includes a light blocking layer surrounding the active layer.

A semiconductor device includes a first electrode, a second electrode, a semiconductor element, an insulating layer and a third electrode. The semiconductor element is electrically connected to the first electrode and the second electrode. The third electrode is insulated from the semiconductor structure, the first electrode and the second electrode through the insulating layer. The semiconductor element includes a semiconductor structure, a carbon nanotube and a conductive film. The semiconductor structure includes a P-type semiconductor layer and an N-type semiconductor layer and defines a first surface and a second surface. The carbon nanotube is located on the first surface of the semiconductor. The conductive film is located on the second surface of the semiconductor. The conductive film is formed on the second surface by a depositing method or a coating method.

A field-effect transistor and a manufacturing method thereof are provided. The method includes depositing a first insulating layer on a substrate; forming a source electrode and a drain electrode on the first insulating layer; forming a carbon quantum dots active layer covering the source electrode and the drain electrode; and forming a second insulating layer and a gate electrode on the carbon quantum dots active layer sequentially. According to the above method, the present disclosure making the field-effect transistor active layer with carbon quantum dots as materials, which enriches the material of the field-effect transistor, reduces the environmental pollution in current technology by using metal dots film, and reduces the dependence on metal elements.

Disclosed herein are a method of forming stacked elongated nanoshapes (NSs) (e.g., stacked nanowires (NWs)) of different semiconductor materials above a substrate, a method of forming different devices (e.g., stacked field effect transistors (FETs) having different type conductivities) using the stacked NSs and the resulting structures. In the methods, stacked elongated NSs made of the same first semiconductor material can be formed above a substrate. The stacked elongated NSs can include at least a first NS and a second NS above the first NS. The second NS can then be selectively processed in order to convert the second NS from the first semiconductor material to a second semiconductor material. The first and second NSs can subsequently be used to form first and second devices, respectively, wherein the second device is stacked above the first device. The first and second device can be, for example, first and second FETs, respectively.

A semiconductor device includes a gate electrode, an insulating layer, a first carbon nanotube, a second carbon nanotube, a P-type semiconductor layer, an N-type semiconductor layer, a conductive film, a first electrode, a second electrode and a third electrode. The insulating layer is located on a surface of the gate electrode. The first carbon nanotube and the second carbon nanotube are located on a surface of the insulating layer. The P-type semiconductor layer and the N-type semiconductor layer are located on the surface of the insulating layer and apart from each other. The conductive film is located on surfaces of the P-type semiconductor layer and the N-type semiconductor layer. The first electrode is electrically connected with the first carbon nanotube. The second electrode is electrically connected with the second carbon nanotube. The third electrode is electrically connected with the conductive film.

A semiconductor device includes a first electrode, a second electrode, a semiconductor element, an insulating layer and a third electrode. The semiconductor element is electrically connected to the first electrode and the second electrode. The third electrode is insulated from the semiconductor structure, the first electrode and the second electrode through the insulating layer. The semiconductor element includes a semiconductor structure, a carbon nanotube and a conductive film. The semiconductor structure includes a P-type semiconductor layer and an N-type semiconductor layer and defines a first surface and a second surface. The carbon nanotube is located on the first surface of the semiconductor. The conductive film is located on the second surface of the semiconductor. The conductive film is formed on the second surface by a depositing method or a coating method.

A field-effect transistor and a manufacturing method thereof are provided. The method includes depositing a first insulating layer on a substrate; forming a source electrode and a drain electrode on the first insulating layer; forming a carbon quantum dots active layer covering the source electrode and the drain electrode; and forming a second insulating layer and a gate electrode on the carbon quantum dots active layer sequentially. According to the above method, the present disclosure making the field-effect transistor active layer with carbon quantum dots as materials, which enriches the material of the field-effect transistor, reduces the environmental pollution in current technology by using metal dots film, and reduces the dependence on metal elements.

A method of making a thin film transistor, the method including: forming a gate insulating layer on a gate electrode; placing a semiconductor layer on the gate insulating layer; locating a first photoresist layer, a nanowire structure, a second photoresist layer on the semiconductor layer, the nanowire structure being sandwiched between the first photoresist layer and the second photoresist layer, wherein the nanowire structure comprises one nanowire; forming one opening in the first photoresist layer and the second photoresist layer to form an exposed surface, wherein a part of the nanowire is exposed in the opening; depositing a conductive film layer on the exposed surface of the semiconductor layer, wherein the conductive film layer defines a nano-scaled channel corresponding to the nanowire, the conductive film layer is divided into two regions, one region is used as a source electrode, the other region is used as a drain electrode.

A method for forming a self-aligned double pattern and semiconductor structures are provided. The method for forming a self-aligned double pattern includes the following steps: providing a substrate; sequentially forming a first mask layer, a second mask layer and a third mask layer on an upper surface of the substrate, and etching downwards from an upper surface of the third mask layer in a direction perpendicular to the upper surface of the substrate until a first trench exposing an upper surface of the first mask layer is formed; removing the third mask layer, and partially removing the first mask layer, so as to deepen the first trench; forming a spacer layer on an inner wall of the first trench, and filling the first trench with a fourth mask layer; and partially removing the spacer layer to form a second trench exposing the substrate.