An example laser apparatus of the disclosure may include an oscillator capable of outputting a laser beam, a slab optical amplifier capable of amplifying the laser beam outputted by the oscillator by passing the laser beam through an optical amplification region shaped like a slab and outputting the amplified laser beam, and a mirror disposed on an optical path of the laser beam to enter the slab optical amplifier or the amplified laser beam outputted from the slab optical amplifier, the mirror being movable in a direction parallel to a plane where the laser beam travels in the slab optical amplifier.

Devices and methods for generating EUV light are disclosed. The device comprises an oscillator having an oscillator cavity length, L.sub.o, and defining an oscillator path and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, L.sub.combined, where L.sub.combined=(N+x)*L.sub.o, where “N” is an integer and “x” is a number between 0.4 and 0.6. The amplifier comprises a polarization discriminating optic inputting light traveling along a first beam path from the oscillator and having substantially a first linear polarization into the amplifier and outputting light having substantially a linear polarization orthogonal to the first polarization out of the amplifier along a second beam path.

There is provided a laser system having a cylindrically-shaped annular minor with at least one opening in its surface; a pair of planar metallic electrodes disposed proximate opposite edges of the annular mirror, normal to the axis of the annular minor, the electrodes configured to have an RF field applied between them; a pair of end minors disposed at said at least one opening; and a ceramic material in the form of a disc, disposed in the internal volume of the annular minor, the ceramic material having a series of channels formed therein such that they generate a zig-zag pathway in the ceramic material, wherein (i) the zig-zag path, when filled with a gain medium, (ii) the annular minor and (iii) the pair of end minors, together constitute a laser cavity.

Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.

A dielectric electrode assembly, and a method of manufacture thereof, including: a dielectric tube having a cylindrical cross-section and a relative dielectric constant, ε.sub.2, the dielectric tube filled with a gas having a relative dielectric constant, ε.sub.1; a structural dielectric having a relative dielectric constant, ε.sub.3 surrounding the dielectric tube; metal electrodes on opposite sides of the structural dielectric, the metal electrodes having a flat cross-sectional geometry; and the structural dielectric made from a material selected such that the relative dielectric constants of the structural dielectric, the dielectric tube, and the gas are interrelated and a uniform electric field is generated within the dielectric tube when power is applied to the metal electrodes.

A laser resonator comprising a specially designed front mirror 32. The front mirror 32 together with a rear mirror form a resonator cavity. As well as having a resonator cavity reflective surface 42, the front mirror 32 also has an output coupling reflective surface 44 which forms a continuation of the resonator cavity reflective surface 42 and extends at an angle thereto so as to direct a beam laterally out of the cavity. The output coupling reflective surface 44 and the resonator cavity reflective surface 44 are joined by a “soft” rounded edge 40 of arcuate cross-section, this rounded transition suppressing diffraction ripples that would otherwise be generated if the edge were “hard”, i.e. sharp.

An example of the disclosure is a laser apparatus including a master oscillator capable of outputting a pulse laser beam, a plurality of optical amplifiers disposed on an optical path of the pulse laser beam outputted from the master oscillator and configured to sequentially amplify the pulse laser beam, an optical reflector capable of passing the pulse laser beam therethrough and reflecting a self-oscillation beam generated in one of the plurality of optical amplifiers, and an optical absorber capable of receiving and absorbing the self-oscillation beam reflected by the optical reflector.

A laser device includes: a first mirror and a second mirror that cause resonance of a plurality of beams having different wavelengths from one another; a diffraction grating that causes the beams that are incident from the first mirror with directions of beam central axes being different from one another to travel to the second mirror while aligning the beam central axes with one another, and causes the beams that are incident from the second mirror with the beam central axes being aligned with one another to travel to the first mirror while causing the directions of the beam central axes to be different from one another; and a housing unit housing a laser medium that is a medium through which the beams traveling between the first mirror and the diffraction grating pass, and has a discrete gain spectrum in which a peak occurs at each wavelength of the beams.

A gas laser device includes a shielding plate that is a first shielding member, and a shielding plate that is a second shielding member. The first shielding member includes a first opening, and a second opening. A laser beam that is to be propagated to discharge regions passes through the first opening. The laser beam that has taken a round trip through the discharge regions after passing through the first opening passes through the second opening. The second shielding plate faces the first shielding member the discharge regions located therebetween. The shielding plate includes an opening that is a third opening. The laser beam that has been propagated through the first opening and the discharge regions, and the laser beam that is to be propagated to the second opening through the discharge regions pass through the third opening. A plane shape of the third opening includes a rectilinear segment.

A device and a method for producing a patterned functional coating on a first curved glass layer, the device including a support for holding the first curved glass layer, at least one laser, and a guidance unit, provided for guiding the beam of the laser over the functional coating, such that parts of the functional coating are removed in order to pattern the functional coating.