A short-circuit semiconductor component comprises a semiconductor body, in which a rear-side base region of a first conduction type, an inner region of a second complementary conduction type, and a front-side base region of the first conduction type are disposed. The rear-side base region is electrically connected to a rear-side electrode, and the front-side base region is electrically connected to a front-side electrode. A turn-on structure, which is an emitter structure of the second conduction type, is embedded into the front-side base region and/or rear-side base region and is covered by the respective electrode and is electrically contacted with the electrode placed on the base region respectively embedding it. It can be turned on by a trigger structure which can be activated by an electrical turn-on signal. In the activated state, the trigger structure injects an electrical current surge into the semiconductor body, which irreversibly destroys a semiconductor junction.

A semiconductor device which reduces a concentration of the hole current on the upper-surface side. The semiconductor device includes a buffer layer of the first conductivity type, an upper-surface region on the upper-surface side from the buffer layer, and a lower-surface region on the lower-surface side from the buffer layer. A collector layer of the second conductivity type formed in the lower-surface region includes a first collector layer and a second collector layer with impurity concentration lower than that of the first collector layer, these two layers being formed alternately. The upper-surface region includes a first upper-surface region over the first collector layer and a second upper-surface region over the second collector layer. In the first upper-surface region, a hole discharge promoting structure is formed, which promotes hole discharge from the top of the first collector layer.

Provided is a semiconductor device provided with an IGBT, comprising: a semiconductor substrate having upper and lower surfaces, throughout which bulk donors are distributed; a hydrogen peak including a local maximum arranged 25 μm or more away from the lower surface of the semiconductor substrate in a depth direction, at which a hydrogen chemical concentration shows a local maximum value; an upper tail where the hydrogen chemical concentration decreases in a direction from the local maximum toward the upper surface; and a lower tail where the hydrogen chemical concentration decreases in a direction from the local maximum toward the lower surface more gradually than the upper tail; and a first high concentration region having a donor concentration higher than a bulk donor concentration and including a region extending for 4 μm or more in a direction from the local maximum of the hydrogen peak toward the upper surface.

A semiconductor device including: a semiconductor substrate having a first and a second side, and including a donor layer with a doping concentration profile in a depth direction from the first to the second side. The donor layer includes: a first peak, situated at a first distance from the first side of said substrate; a first region adjacent to the first peak and extending in the depth direction from the first peak toward the first side, a second peak in said doping concentration profile, situated at a second distance from the first side of said substrate. Said second distance is less than said first distance and greater than zero; and a second region adjacent to the second peak and extending in the depth direction from the second peak toward the first side of the substrate, which has a doping concentration which is substantially uniform.

A semiconductor device includes a semiconductor substrate in which a first region having a freewheeling diode arranged therein, second regions having an IGBT arranged therein, and a withstand-voltage retention region surrounding the first region and the second regions in plan view are defined. The semiconductor substrate has a first main surface and a second main surface. The semiconductor substrate includes an anode layer having a first conductivity type, which is arranged in the first main surface of the first region, and a diffusion layer having the first conductivity type, which is arranged in the first main surface of the withstand-voltage retention region adjacently to the anode layer. A first trench is arranged in the first main surface on a side of the anode layer with respect to a boundary between the anode layer and the diffusion layer.

We herein describe a semiconductor device comprising a first element portion formed on a substrate, the first element portion being an operating region of an insulated gate bipolar transistor (IGBT) and a second element portion formed on the substrate, the second element portion being an operating region of a diode. The first element portion comprises a first collector region of a second conductivity type, a drift region of a first conductivity type located over the first collector region, and formed by the semiconductor substrate, a first body region of a first conductivity type located over the drift region, a second body region of a second conductivity type located over the drift region, at least one first contact region of a first conductivity type located above the second body region and having a higher doping concentration compared to the first body region, at least one second contact region of a second conductivity type located laterally adjacent to the at least one first contact region, the at least one second contact region having a higher doping concentration than the second body region, a first plurality of trenches extending from a surface through the second body region of a second conductivity type into the drift region wherein the at least one first contact region adjoins at least one of the plurality of trenches so that, in use, a channel region is formed along said at least one trench of the first plurality of trenches and within the body region of a second conductivity type. A first trench of the first plurality of trenches is laterally spaced from a second trench of the first plurality of trenches by a first distance. The second element portion comprises a second collector region of a second conductivity type, the drift region of a first conductivity type located over the second collector region, a third body region of a second conductivity type located over the drift region, a second plurality of trenches extending from a surface through the third body region into the drift region. A first trench of the second plurality of trenches is laterally spaced from a second trench of the second plurality of trenches by a second distance, and the first distance is larger than the second distance. The semiconductor device further comprises a first terminal contact, wherein the first terminal contact is electrically connected to the at least one first contact region of a first conductivity type and the body region of a second conductivity type and a second terminal contact, wherein the second terminal contact is electrically connected to the first collector region and the second collector region.

Provided is a semiconductor device, wherein the buffer region of the semiconductor substrate has a plurality of hydrogen chemical concentration peaks arranged in different positions in the depth direction of the semiconductor substrate, a plurality of doping concentration peaks; and a high concentration region provided between the deepest hydrogen chemical concentration peak and the drift region, wherein the doping concentration distribution of the depth direction of the high concentration region has a slope where the doping concentration gradually decreases toward the drift region, wherein the slope includes a convex portion on top, wherein in an approximate concentration line that approximates a gradient of the slope with a straight line, when the concentration in a depth position of the shallowest doping concentration peak is referred to as the shallowest reference concentration, the doping concentration of the shallowest doping concentration peak is from 5% to 50% of the shallowest reference concentration.

A semiconductor device, including, a drift region of a first conductivity type provided on a semiconductor substrate; a field stop region of a first conductivity type provided below the drift region and having one or more peaks; and a collector region of a second conductivity type provided below the field stop region, wherein when an integral concentration of the collector region is set to be x [cm.sup.−2], a depth of a first peak that is a shallowest from the back surface of the semiconductor substrate out of the one or more peaks is set to be y1 [μm], line A1: y1=(−7.4699E−01)ln(x)+(2.7810E+01), and line B1: y1=(−4.7772E−01)ln(x)+(1.7960E+01), a depth of the first peak and the integral concentration are within a range between a line A1 and a line B1, is provided.

The present invention discloses an ultra-thin super junction IGBT and a manufacturing method thereof, comprising: a metalized collector; a P-type collector region located on the metalized collector; an N-type FS layer located above the P-type collector region; an N-type FS isolating layer located above the N-type FS layer; a first N-type epitaxial layer located above the N-type FS isolating layer and a second N-type epitaxial layer located above the first N-type epitaxial layer; and a MOS structure located in the second N-type epitaxial layer. According to the present invention, thinning the chip thickness reduces forward conduction voltage drop and switching losses, while reducing thermal resistance and improving current conducting capability.

An IGBT and a manufacturing method therefor, wherein a target region in the IGBT is doped with first ions; the target region comprises at least one of a P-type substrate (11), a P-type well region (13), and a P-type source region (14); and the diffusion coefficient of the first ions is greater than the diffusion coefficients of boron ions. A PN junction formed by means of the present invention is a gradual junction, thereby improving breakdown voltage, shortening turn-off time, and improving anti-latch capability.