A method of fabricating an integrated circuit (IC) includes providing a substrate having a semiconductor surface layer thereon including a field dielectric in a portion of the semiconductor surface layer and a pair of matched devices in at least one of a CMOS area, BiCMOS area, bipolar transistor area, and a resistor area. Dopants are ion implanted into the at least one of the CMOS area, the BiCMOS area, the bipolar transistor area, and the resistor area. The substrate is annealed in a processing chamber of a rapid thermal processor (RTP). The annealing comprises an initial temperature stabilization step including first annealing at a lower temperature for a first time of at least 20 seconds, and then a second annealing comprising ramping from the lower temperature to a peak higher temperature that is at least 100° C. higher (>) than the lower temperature.

A semiconductor device structure includes a gate structure, first epitaxial structures, a power rail, and a second epitaxial structure. The gate structure is disposed on a substrate extending in a first direction. The first epitaxial structures are surrounded by a contact structure disposed on opposite sides of the gate structure extending in the first direction. The power rail is spaced apart from the gate structure and the first epitaxial structures. The power rail extends in the second direction, which is perpendicular to the first direction. The second epitaxial structure is surrounded by the contact structure disposed directly beneath the power rail. The second epitaxial structure is electrically connected to the power rail.

A semiconductor device including: a first S/D arrangement including a silicide-sandwiched portion of a corresponding active region having a silicide-sandwiched configuration, a first portion of a corresponding metal-to-drain/source (MD) contact structure, a first via-to-MD (VD) structure, and a first buried via-to-source/drain (BVD) structure; a gate structure over a channel portion of the corresponding active region; and a second S/D arrangement including a first doped portion of the corresponding active region; and at least one of the following: an upper contact arrangement including a first silicide layer over the first doped portion, a second portion of the corresponding MD contact structure; and a second VD structure; or a lower contact arrangement including a second silicide layer under the first doped portion, and a second BVD structure.

Reliability of a gate resistor element during high-temperature operation is enhanced. A semiconductor device includes a drift layer, a base layer, an emitter layer, a gate insulation film, a gate electrode, a gate pad electrode, a first resistance layer, and a first nitride layer. A resistor of the first resistance layer has a negative temperature coefficient. The first resistance layer is made of hydrogen-doped amorphous silicon. The first nitride layer is made of a silicon nitride layer or an aluminum nitride layer.

An integrated circuit includes; a substrate including a single active region, a first active resistor formed on the substrate, and a transistor including a first junction area in the single active region. The first active resistor and the transistor are electrically connected through the first junction area. The first active resistor is formed between a first node and a second node included in the first junction area. The first node is connected to a first contact, and the second node is connected to a second contact.

Reliability of a gate resistor element during high-temperature operation is enhanced. A semiconductor device includes a drift layer, a base layer, an emitter layer, a gate insulation film, a gate electrode, a gate pad electrode, a first resistance layer, and a first nitride layer. A resistor of the first resistance layer has a negative temperature coefficient. The first resistance layer is made of hydrogen-doped amorphous silicon. The first nitride layer is made of a silicon nitride layer or an aluminum nitride layer.

The disclosure relates to power semiconductor devices in GaN technology. The disclosure proposes an integrated auxiliary gate terminal (15) and a pulldown network to achieve a normally-off (E-Mode) GaN transistor with threshold voltage higher than 2V, low gate leakage current and enhanced switching performance. The high threshold voltage GaN transistor has a high-voltage active GaN device (205) and a low-voltage auxiliary GaN device (210) wherein the high-voltage GaN device has the gate connected to the source of the integrated auxiliary low-voltage GaN transistor and the drain being the external high-voltage drain terminal and the source being the external source terminal, while the low-voltage auxiliary GaN transistor has the gate (first auxiliary electrode) connected to the drain (second auxiliary electrode) functioning as an external gate terminal. In other embodiments a pull-down network for the switching-off of the high threshold voltage GaN transistor is formed by a diode, a resistor, or a parallel connection of both connected in parallel with the low-voltage auxiliary GaN transistor.

Resistor structures of stacked devices and methods of forming the same are provided. The, resistor structures may include a substrate, an upper semiconductor layer that may be spaced apart from the substrate in a vertical direction, a lower semiconductor layer that may be between the substrate and the upper semiconductor layer, and first and second resistor contacts that may be spaced apart from each other in a horizontal direction. At least one of the upper semiconductor layer, the lower semiconductor layer, and a portion of the substrate may contact the first and second resistor contacts.

A semiconductor device structure includes a gate structure, first epitaxial structures, a power rail, and a second epitaxial structure. The gate structure is disposed on a substrate extending in a first direction. The first epitaxial structures are surrounded by a contact structure disposed on opposite sides of the gate structure extending in the first direction. The power rail is spaced apart from the gate structure and the first epitaxial structures. The power rail extends in the second direction, which is perpendicular to the first direction. The second epitaxial structure is surrounded by the contact structure disposed directly beneath the power rail. The second epitaxial structure is electrically connected to the power rail.

The present disclosure relates to a semiconductor device that includes a semiconductor substrate, a plurality of transistors disposed on the semiconductor substrate and each transistor including a gate electrode, a source electrode, and a drain electrode, a plurality of pads disposed on the semiconductor substrate and disposed at the outside of the plurality of transistors, a plurality of resistors disposed on the semiconductor substrate and electrically connected to the plurality of pads, respectively, and a plurality of upper metal layers disposed on the semiconductor substrate and configured to come into contact with the resistors. At least one of the plurality of resistors is an anti-resonance resistor that is disposed between two gate pads and is electrically connected to at least one gate pad of the two gate pads through the upper metal layer.