An integrated electronic device includes a silicon-on-insulator (SOI) substrate. At least one MOS transistor is formed in and on the SOI substrate. The at least one MOS transistor has a gate region receiving a control voltage, a back gate receiving an adjustment voltage, a source/drain region having a resistive portion, a first terminal coupled to a first voltage (e.g., a reference voltage) and formed in the source/drain region and on a first side of the resistive portion, and a second terminal generating a voltage representative of a temperature of the integrated electronic device, the second terminal being formed in the source/drain region and on a second side of the resistive portion. Adjustment circuitry generates the adjustment voltage as having a value dependent on the control voltage and on the voltage generated by the second terminal.

Thermally-sensitive structures and methods for sensing the temperature in a region of a FET during device operation are described. The region may be at or near a region of highest temperature achieved in the FET. Metal resistance thermometry (MRT) can be implemented with gate or source structures to evaluate the temperature of the FET.

A method for fabricating a semiconductor structure includes forming a plurality of semiconductor fins protruding through a trench isolation region above a substrate. A first gate structure is formed over a first of the plurality of semiconductor fins. A second gate structure is formed over a second of the plurality of semiconductor fins. A gate edge isolation structure is formed laterally between and in contact with the first gate structure and the second gate structure, the gate edge isolation structure on the trench isolation region and extending above an uppermost surface of the first gate structure and the second gate structure. A precision resistor is formed on the gate edge isolation structure, wherein the precision resistor and the first gate structure and second gate structure comprise a same material layer.

An integrated device and a method for making said integrated device. The integrated device includes a plurality of planar MOSFETs that have a first contact region formed in a first source region of a plurality of source regions and a second contact region formed in a second source region of the plurality of source regions. The first and second contact regions have respective portions of the source region doped with the second conductivity type, and the first and second contact regions are separated by a JFET region, wherein the JFET region is longer in one planar dimension than the other and the first and second contact regions are separated by the longer planar dimension. The JFET region is bounded on at least one side corresponding to the longer planar dimension by a source region and a body region in conductive contact with at least one contact region.

An e-fuse for a semiconductor device includes first and second electrodes; a gate metal electrically coupling the first and second electrodes with each other; a semiconductor layer formed under the gate metal, and forming a capacitor together with the gate metal; and a first oxide layer formed under the gate metal and on both sides of the semiconductor layer.

A trimmable resistor circuit and a method for operating the trimmable resistor circuit are provided. The trimmable resistor circuit includes first sources/drains and first gate structures alternatively arranged in a first row, second sources/drains and second gate structures alternatively arranged in a second row, third sources/drains and third gate structures alternatively arranged in a third row, first resistors disposed between the first row and the second row, and second resistors disposed between the second row and the third row. In the method for operating the trimmable resistor circuit, the first gate structures in the first row and the third gate structures in the third row are turned on. Then, the second gate structures in the second row are turned on/off according to a predetermined resistance value.

A semiconductor power conversion device includes a plurality of device cells in different portions of the active area, each including a respective gate electrode. The device includes a gate pad having a plurality of integrated resistors, each having a respective resistance. The device includes a first gate bus extending between the gate pad and the plurality of gate electrodes in a first portion of the active area. The plurality of gate electrodes in the first area is electrically connected to an external gate connection via a first integrated resistor and the first gate bus, and wherein the plurality of gate electrodes in a second portion of the active area is electrically connected to the external gate connection via a second integrated resistor, wherein the first and second integrated resistors have substantially different respective resistance values.

A semiconductor device includes a substrate including a first region and a second region, an active gate structure on the substrate in the first region, a dummy gate structure on the substrate in the second region, a source/drain on the substrate in the first region at each of opposite sides of the active gate structure, a plurality of first conductive contacts respectively connected to the active gate structure and the source/drain, a resistive structure on the dummy gate structure in the second region, a plurality of second conductive contacts respectively connected to the plurality of first conductive contacts and the resistive structure, and an etch stop layer between the dummy gate structure and the resistive structure. The etch stop layer includes a lower etch stop layer and an upper etch stop layer, which are formed of different materials.

An Electro-Static-Discharge (ESD) protection device has a Fin Field-Effect Transistor (FinFET) with a silicon fin with a step separating a top fin and a bottom fin. The gate wraps around the top fin but not the bottom fin. Normal gate-controlled channel conduction occurs in the top fin between a source and a drain in the top fin. Underneath the conducting channel is a buried conducting region in the bottom fin that conducts after a breakdown voltage is reached during ESD. A ledge, abrupt slope change in the sidewalls of the fin, or a doping increase occurs at the step between the top fin and bottom fin. The bottom fin is 2-3 times wider than the top fin, causing the resistance of the buried conducting region to be 2-3 times less than the resistance of the conducting channel, steering breakdown current away from the channel, reducing failures during breakdown.

An integrated electronic device includes a silicon-on-insulator (SOI) substrate. At least one MOS transistor is formed in and on the SOI substrate. The at least one MOS transistor has a gate region receiving a control voltage, a back gate receiving an adjustment voltage, a source/drain region having a resistive portion, a first terminal coupled to a first voltage (e.g., a reference voltage) and formed in the source/drain region and on a first side of the resistive portion, and a second terminal generating a voltage representative of a temperature of the integrated electronic device, the second terminal being formed in the source/drain region and on a second side of the resistive portion. Adjustment circuitry generates the adjustment voltage as having a value dependent on the control voltage and on the voltage generated by the second terminal.