Patent classifications
H01L29/66212
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
The present disclosure discloses a semiconductor device and a method for preparing the same. The semiconductor device includes a substrate, a doped epitaxial layer located on one side of the substrate, a channel layer located on one side of the doped epitaxial layer away from the substrate, a potential barrier layer located on one side of the channel layer away from the doped epitaxial layer, and a first electrode and a second electrode located on one side of the potential barrier layer away from the channel layer, wherein the first electrode penetrates the potential barrier layer, the channel layer and part of the doped epitaxial layer, the first electrode forms a Schottky contact with the channel layer, and a resistance of the part of the doped epitaxial layer in contact with the first electrode is greater than a resistance of the channel layer.
Semiconductor MPS diode with reduced current-crowding effect and manufacturing method thereof
A merged-PN-Schottky, MPS, diode includes an N substrate, an N-drift layer, a P-doped region in the drift layer, an ohmic contact on the P-doped region, a plurality of cells within the P-doped region and being portions of the drift layer where the P-doped region is absent, an anode metallization on the ohmic contact and on said cells, to form junction-barrier contacts and Schottky contacts respectively. The P-doped region has a grid-shaped layout separating from one another each cell and defining, together with the cells, an active area of the MPS diode. Each cell has a same geometry among quadrangular, quadrangular with rounded corners and circular; and the ohmic contact extends at the doped region with continuity along the grid-shaped layout.
Implants to enlarge Schottky diode cross-sectional area for lateral current conduction
A semiconductor device is disclosed. The semiconductor device includes a substrate, an epitaxial layer above the substrate, a Schottky barrier material on the epitaxial layer, a Schottky metal contact extending into the Schottky barrier material, a fin structure that extends in a first direction, a first angled implant in a first side of the fin structure that has an orientation that is orthogonal to the first direction, and a second angled implant in a second side of the fin structure that has an orientation that is orthogonal to the first direction. The second side is opposite to the first side. A first cathode region and a second cathode region are coupled by parts of the first angled implant and the second angled implant that extend in the first direction.
GALLIUM NITRIDE POWER DEVICE AND MANUFACTURING METHOD THEREOF
A gallium nitride power device, including: a gallium nitride substrate; cathodes; a plurality of gallium nitride protruding structures arranged on the gallium nitride substrate and between the cathodes, a groove is formed between adjacent gallium nitride protruding structures; an electron transport layer, covering a top portion and side surfaces of each of the gallium nitride protruding structures; a gallium nitride layer, arranged on the electron transport layer and filling each of the grooves; a plurality of second conductivity type regions, where each of the second conductivity type regions extends downward from a top portion of the gallium nitride layer into one of the grooves, and the top portion of each of the gallium nitride protruding structures is higher than a bottom portion of each of the second conductivity type regions; and an anode, arranged on the gallium nitride layer and the second conductivity type regions.
N-POLAR III-N SEMICONDUCTOR DEVICE STRUCTURES
N-polar transistor structures have relied on the use of dry etch processes that use plasmas generated from gaseous species to remove III-N layers as commercially viable wet etchants do not exist. The present disclosure reports on methods for the fabrication of N-polar III-N transistors using wet etches along with transistor structures that are enabled by the availability of wet-etches.
Polarization circuit of a power component
The invention aims for a polarisation circuit of a power component comprising a capacitive dividing bridge and a resistive dividing bridge formed on the same substrate as the component. An additional electrode 1′ in the front face 100 of the substrate makes it possible to adjust one of the capacitance values of the capacitive dividing bridge according to the other of the capacitance values coming from one of the electrodes of the power component. The sizing of this additional electrode furthermore makes it possible to obtain a leakage resistance contributing to the resistive dividing bridge. Alternatively, two additional resistances R, R′ formed in the front face of the substrate making it possible to obtain the resistive dividing bridge independently of the capacitive dividing bridge.
JUNCTION BARRIER SCHOTTKY DIODE
A JBS diode includes a substrate; a first semiconductor layer arranged on a first face of the substrate and having a first type of conductivity, the first semiconductor layer including a projecting portion delimited by a trench; a second semiconductor layer arranged on the projecting portion and having a second type of conductivity opposite to the first type of conductivity; an electrically insulating layer arranged at the bottom of the trench; a first electrode including a first portion in Schottky contact with the first semiconductor layer, the first portion being arranged on the electrically insulating layer and against a side wall of the projecting portion of the first semiconductor layer; a second portion in ohmic contact with the second semiconductor layer; a second electrode in ohmic contact with the substrate.
Ballistic transport semiconductor device based on nano array and manufacturing method
The present disclosure discloses a ballistic transport semiconductor device based on nano array and a manufacturing method thereof. The ballistic transport semiconductor device based on nano array comprises a conducting substrate, more than one semiconductor nano bump portion is arranged on a first surface of the conducting substrate, a top end of the semiconductor nano bump portion is electrically connected with a first electrode, a second surface of the conducting substrate is electrically connected with a second electrode, the second surface and the first surface are arranged back to back, and the height of the semiconductor nano bump portion is less than or equal to a mean free path of a carrier. The carrier is not influenced by various scattering mechanisms in a transporting procedure by virtue of the existence of ballistic transport characteristics, thereby obtaining a semiconductor device having advantages of lower on resistance, less working power consumption.
METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
An ion implanted region is formed by implanting Mg ions into a predetermined region of the surface of the first p-type layer. Subsequently, a second n-type layer is formed on the first p-type layer and the ion implanted region. A trench is formed by dry etching a predetermined region of the surface of the second n-type layer until reaching the first n-type layer. Next, heat treatment is performed to diffuse Mg. Thus, a p-type impurity region is formed in a region with a predetermined depth from the surface of the first n-type layer below the ion implanted region. Since the trench is formed before the heat treatment, Mg is not diffused laterally beyond the trench. Therefore, the width of the p-type impurity region is almost the same as the width of the first p-type layer divided by the trench.
NITRIDE SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR LAMINATE, PROGRAM FOR SELECTING SUBSTRATE, PROGRAM FOR OUTPUTTING SUBSTRATE DATA, NITRIDE SEMICONDUCTOR SUBSTRATE WITH PROGRAM FOR OUTPUTTING SUBSTRATE DATA, OFF-ANGLE COORDINATE MAP, NITRIDE SEMICONDUCTOR SUBSTRATE WITH OFF-ANGLE COORDINATE MAP, PROGRAM FOR SELECTING SEMICONDUCTOR DEVICE, METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR SUBSTRATE, METHOD FOR PRODUCING SEMICONDUCTOR LAMINATE, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, AND METHOD FOR...
A nitride semiconductor substrate including a group III nitride semiconductor crystal and having a main surface, wherein a low index crystal plane is (0001) plane curved in a concave spherical shape to the main surface, and the off-angle (θ.sub.m, θ.sub.a) at a position (x, y) in the main surface approximated by x representing a coordinate in a direction along <1-100> axis, y is a coordinate in a direction along <11-20> axis, (0, 0) represents a coordinate (x, y) of the center, θ.sub.m represents a direction component along <1-100> axis in an off-angle of <0001> axis with respect to a normal, θ.sub.a represents a direction component along <11-20> axis in the off-angle, (M.sub.1, A.sub.1) represents a rate of change in the off-angle (θ.sub.m, θ.sub.a) with respect to the position (x, y) in the main surface, and (M.sub.2, A.sub.2) represents the off-angle (θ.sub.m, θ.sub.a) at the center.