Double sided versions of several power transistor types are devices that are already known in the literature. Devices built in this configuration are generally required to have a separate driver circuit to control the front and rear control electrodes and provide the gate or base voltage and/or currents for the power switch. This is because there may be of the order of 1000V potential-difference between the frontside and rearside potentials when the transistor is in the off conditionand a single integrated circuit cannot generally sustain this within a single package. The NPN configuration is preferred in this case to benefit from electron conduction for the main power path between the emitters. However, problems arising when using a P-type wafer. The present invention seeks to avoid the use of P-type wafers while still getting the higher conduction performance of NPN operation.

A bipolar transistor is supported by a single-crystal silicon substrate including a collector contact region. A cyclical epitaxy process is performed to provide a collector region of a first conductivity type on the collector contact region that is laterally separated from a silicon layer by an air gap. A second epitaxial region forms a base region of a second conductivity type. Deposited semiconductor material forms an emitter region of the first conductivity type. The collector region, base region and emitter region are located within an opening formed in a stack of insulating layers that includes a sacrificial layer. The sacrificial layer is selectively removed to expose a side wall of the base region. Epitaxial growth from the exposed sidewall forms a base contact region.

The present disclosure relates to an integrated circuit element and a manufacturing method thereof. An integrated circuit element may include a substrate including a first region and a second region, a first element in the first region of the substrate and configured to generate an electric field in a horizontal direction, and a second element in the second region of the substrate and configured to generate an electric field is formed in a vertical direction, wherein a thickness of the second region of the substrate is thicker than a thickness of the first region.

Methods according to the present disclosure include: providing a substrate including: a first semiconductor region, a second semiconductor region, and a trench isolation (TI) laterally between the first and second semiconductor regions; forming an epitaxial layer on at least the first semiconductor region of the substrate, wherein the epitaxial layer includes a first semiconductor base material positioned above the first semiconductor region of the substrate; forming an insulator region on at least the first semiconductor base material, the trench isolation (TI), and the second semiconductor region; forming a first opening in the insulator over the second semiconductor region; and growing a second semiconductor base material in the first opening, wherein a height of the second semiconductor base material above the substrate is greater than a height of the first semiconductor base material above the substrate.

The present application discloses new approaches to providing passive-off protection for a B-TRAN-like device. Even if the control circuitry is inactive, AC coupling uses transient voltage on the external terminals to prevent forward biasing an emitter junction. Preferably the same switches which implement diode-mode and pre-turnoff operation are used as part of the passive-off circuit operation.

A method of forming a lateral bipolar junction transistor (LBJT) that includes providing a germanium containing layer on a crystalline oxide layer, and patterning the germanium containing layer stopping on the crystalline oxide layer to form a base region. The method may further include forming emitter and collector extension regions on opposing sides of the base region using ion implantation, and epitaxially forming an emitter region and collector region on the crystalline oxide layer into contact with the emitter and collector extension regions. The crystalline oxide layer provides a seed layer for the epitaxial formation of the emitter and collector regions.

A BJT includes a pillar formed on a buried oxide layer that is itself formed on a silicon substrate. The pillar has top and bottom surfaces and sidewalls, the bottom surface contacting the buried oxide layer and opposite the top surface. The pillar forms part of a base of the BJT. Si:C layers are formed on a bottom portion of each of the sidewalls of the pillar and leave a top portion of the sidewalls of the pillar exposed. A doped base contact is formed to contact at least part of the exposed sidewalls in the top portion of the pillar. E/C regions are formed abutting the Si:C layers. Contacts are formed to connect to the doped base contact and to the E/C regions. Methods for forming the BJT are also disclosed.

A power semiconductor device is disclosed. In one example, the device comprises: a semiconductor body comprising a drift region, the drift region having dopants of a first conductivity type; an active region having at least one power cell; least partially into the semiconductor body; the at least one power cell being configured to conduct a load current between said terminals and to block a blocking voltage applied between said terminals; an edge that laterally terminates the semiconductor body; and a non-active termination structure arranged in between the edge and the active region. The termination structure comprises: at least one doped semiconductor region implemented in the semiconductor body; a conductor structure, and an ohmic path that electrically couples the conductor structure with an electrical potential of the first load terminal.

A method of forming a lateral bipolar junction transistor (LBJT) that includes providing a germanium containing layer on a crystalline oxide layer, and patterning the germanium containing layer stopping on the crystalline oxide layer to form a base region. The method may further include forming emitter and collector extension regions on opposing sides of the base region using ion implantation, and epitaxially forming an emitter region and collector region on the crystalline oxide layer into contact with the emitter and collector extension regions. The crystalline oxide layer provides a seed layer for the epitaxial formation of the emitter and collector regions.

Methods for fabricating a bipolar junction transistor (BJT) are provided. A method includes forming a collector region, forming base regions over the collector region, and forming emitter regions over the base regions. The method further includes forming base dielectric layers over the collector region and on opposite sides of the base regions, forming base conductive layers over the base dielectric layers and on the opposite sides of the base regions, and forming base contacts over the base conductive layers. The top surface of the collector region is coplanar with bottom surfaces of the base regions and bottom surfaces of the base dielectric layers. The base contacts are divided into a first group of base contacts disposed between the base regions and a second group of base contacts disposed between the base regions and the STI region.