H01L29/7843

FIN FIELD EFFECT TRANSISTOR (FINFET) DEVICE STRUCTURE WITH DIFFERENT GATE PROFILE AND METHOD FOR FORMING THE SAME

A FinFET device structure is provided. The FinFET device structure includes a fin structure formed over a substrate and an isolation structure formed over the substrate. The FinFET device structure includes a first gate structure and a second gate structure formed over the fin structure. The first gate structure has a first top width in a direction that is parallel to the fin structure, the second gate structure has a second top width in a direction that is parallel to the fin structure, and the first top width is greater than the second top width.

Semiconductor device and fabrication method therefor
09837534 · 2017-12-05 · ·

A semiconductor device includes: a first substrate on which a first field effect transistor is provided; and a second substrate on which a second field effect transistor of a second conductive type is provided; the first and second substrates being bonded to each other at the substrate faces thereof on which the first and second field transistors are provided, respectively; the first field effect transistor and the second field effect transistor being electrically connected to each other.

METHODS FOR PRODUCING A 3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH MEMORY CELLS

A method for producing a 3D semiconductor device including: providing a first level including a first single crystal layer; forming a first metal layer on top of first level; forming a second metal layer on top of the first metal layer; forming at least one second level above the second metal layer; performing a first lithography step on the second level; forming a third level on top of the second level; performing a second lithography step on the third level; perform processing steps to form first memory cells within the second level and second memory cells within the third level, where first memory cells include at least one second transistor, and the second memory cells include at least one third transistor; and deposit a gate electrode for the second and the third transistors simultaneously.

CARRIER BARRIER LAYER FOR TUNING A THRESHOLD VOLTAGE OF A FERROELECTRIC MEMORY DEVICE

The present disclosure relates to an integrated circuit (IC) chip including a memory cell with a carrier barrier layer for threshold voltage tunning. The memory cell may, for example, include a gate electrode, a ferroelectric structure, and a semiconductor structure. The semiconductor structure is vertically stacked with the gate electrode and the ferroelectric structure, and the ferroelectric structure is between the gate electrode and the semiconductor structure. A pair of source/drain electrodes is laterally separated and respectively on opposite sides of the gate electrode, and a carrier barrier layer separates the source/drain electrodes from the semiconductor structure.

Semiconductor device with strained layer

A semiconductor device and method of fabricating thereof is described that includes a substrate including at least one fin, at least one gate stack formed on a top surface of the at least one fin, a first inter-layer dielectric (ILD) layer formed on the top surface of the at least one fin, and a strained layer formed at least on a top surface of the at least one gate stack, wherein the strained layer is configured to provide a strain force to the at least one gate stack.

3D semiconductor memory device and structure

A 3D semiconductor device including: a first single crystal layer including a plurality of first transistors and a first metal layer, where a second metal layer is disposed atop the first metal layer; a plurality of logic gates including the first metal layer and first transistors; a plurality of second transistors disposed atop the second metal layer; a plurality of third transistors disposed atop the second transistors; a top metal layer disposed atop the third transistors; and a memory array including word-lines, where the memory array includes at least four memory mini arrays, where each of the mini arrays includes at least two rows by two columns of memory cells, where each memory cell includes one of the second transistors or one of the third transistors, and where one of the second transistors is self-aligned to one of the third transistors, being processed following a same lithography step.

TRENCH PLUG HARDMASK FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION

Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin comprising silicon. A plurality of gate structures is over the fin, individual ones of the plurality of gate structures along a direction orthogonal to the fin and having a pair of dielectric sidewall spacers. A trench contact structure is over the fin and directly between the dielectric sidewalls spacers of a first pair of the plurality of gate structures. A contact plug is over the fin and directly between the dielectric sidewalls spacers of a second pair of the plurality of gate structures, the contact plug comprising a lower dielectric material and an upper hardmask material.

TRENCH POWER DEVICE WITH ENHANCED CHARGE CARRIER MOBILITY

A power transistor device includes a semiconductor substrate, a gate trench extending into the semiconductor substrate, a transistor gate provided in the gate trench, and an insulating structure formed between the transistor gate and a side wall of the gate trench. The insulating structure is configured to electrically insulate the transistor gate from a channel region which extends along the side wall of the gate trench. The insulating structure includes a layer of piezoelectric material.

Semiconductor device and manufacturing method thereof

A semiconductor device includes a substrate comprising a semiconductor fin, a gate structure over the semiconductor fin, and source/drain structures over the semiconductor fin and on opposite sides of the gate structure. The gate stack comprises a high-k dielectric layer; a first work function metal layer over the high-k dielectric layer; an oxide of the first work function metal layer over the first work function metal layer; and a second work function metal layer over the oxide of the first work function metal layer, in which the first and second work function metal layers have different compositions; and a gate electrode over the second work function metal layer.

III-N transistors with local stressors for threshold voltage control

Disclosed herein are IC structures, packages, and device assemblies with III-N transistors that include additional materials, referred to herein as “stressor materials,” which may be selectively provided over portions of polarization materials to locally increase or decrease the strain in the polarization material. Providing a compressive stressor material may decrease the tensile stress imposed by the polarization material on the underlying portion of the III-N semiconductor material, thereby decreasing the two-dimensional electron gas (2DEG) and increasing a threshold voltage of a transistor. On the other hand, providing a tensile stressor material may increase the tensile stress imposed by the polarization material, thereby increasing the 2DEG and decreasing the threshold voltage. Providing suitable stressor materials enables easier and more accurate control of threshold voltage compared to only relying on polarization material recess.