A semiconductor device includes a semiconductor layer of a first conductivity type. A well region that is a second conductivity type well region is formed on a surface layer portion of the semiconductor layer and has a channel region defined therein. A source region that is a first conductivity type source region is formed on a surface layer portion of the well region. A gate insulating film is formed on the semiconductor layer and has a multilayer structure. A gate electrode is opposed to the channel region of the well region where a channel is formed through the gate insulating film.

A semiconductor device includes fin patterns on a substrate, at least one gate electrode intersecting the fin patterns, source/drain regions on upper surfaces of the fin patterns, and at least one blocking layer on a sidewall of a first fin pattern of the fin patterns, the at least one blocking layer extending above an upper surface of the first fin pattern of the fin patterns, wherein a first source/drain region of the source/drain regions that is on the upper surface of the first fin pattern has an asymmetric shape and is in direct contact with the at least one blocking layer.

Provided are a semiconductor element and a semiconductor device capable of achieving on-resistance reduction and miniaturization. The semiconductor element is used in a semiconductor switch for protecting an electric circuit, and includes a semiconductor substrate SB, a MOS transistor Tr provided on the semiconductor substrate SB, and a source electrode SE provided on a front surface 2a side of the semiconductor substrate SB. The MOS transistor Tr includes an n-type source region 8 connected to the source electrode SE, an n-type drift region 21 arranged away from the source region 8, and a p-type well region 31 arranged between the source region 8 and the drift region 21. The source region 8 is interposed between the source electrode SE and the well region 31.

Provided is a first vertical field effect transistor in which first source regions and first connection portions via which a first body region is connected to a first source electrode are disposed alternately and cyclically in a first direction in which first trenches extend. In a second direction orthogonal to the first direction, Lxm≤Lxr≤0.20 μm holds true where Lxm denotes a distance between adjacent first trenches and Lxr denotes the inner width of a first trench. The lengths of the first connection portions are in a convergence region in which the on-resistance of the vertical field effect transistor at the time when a voltage having a specification value is applied to first gate conductors to supply current having a specification value does not decrease noticeably even when the lengths of the first connection portions are made much shorter.

The present disclosure relates to an electronic device comprising a semiconductor substrate and transistors having their gates contained in trenches extending in the semiconductor substrate, each transistor comprising a doped semiconductor well of a first conductivity type, the well being buried in the semiconductor substrate and in contact with two adjacent trenches among said trenches, a first doped semiconductor region of a second conductivity type, covering the well, in contact with the well, and in contact with the two adjacent trenches, a second doped semiconductor region of the second conductivity type more heavily doped than the first semiconductor region, extending in the first semiconductor region, and a third doped semiconductor region of the first conductivity type, more heavily doped than the well, covering the well, in contact with the first region, and extending in the semiconductor substrate in contact with the well.

A semiconductor device includes an enhancement-mode first p-channel MISFET, an enhancement-mode second p-channel MISFET, a drain conductor electrically and commonly connected to the first p-channel MISFET and the second p-channel MISFET, a first source conductor electrically connected to a source of the first p-channel MISFET, a second source conductor electrically connected to a source of the second p-channel MISFET, and a gate conductor electrically and commonly connected to a gate of the first p-channel MISFET and a gate of the second p-channel MISFET.

A semiconductor device includes: a first semiconductor layer of first conductivity type; a second semiconductor layer of first conductivity type provided on the first semiconductor layer; a first semiconductor region of second conductivity type provided on the second semiconductor layer; a second semiconductor region of first conductivity type provided on the first semiconductor region; a first electrode provided in a first trench, the first trench reaching the second semiconductor layer from above the first semiconductor region, the first electrode facing the first semiconductor region via a first insulating film; a second electrode provided in a second trench, the second trench reaching the second semiconductor layer from above the first semiconductor region, the second electrode facing the first semiconductor region via a second insulating film; a third electrode including a first electrode portion, a second electrode portion provided on the first electrode portion and a third electrode portion provided on the second electrode portion, the first electrode portion being provided between the first trench and the second trench, the first electrode portion reaching the first semiconductor region from above the second semiconductor region, the first electrode portion being electrically connected to the first semiconductor region and the second semiconductor region; a third semiconductor region provided between the third electrode and the second semiconductor region provided between the first insulating film and the third electrode, the third semiconductor region having a higher concentration of impurities of second conductivity type than the first semiconductor region; a fourth semiconductor region provided between the third electrode and the second semiconductor region provided between the second insulating film and the third electrode, the fourth semiconductor region having a higher concentration of impurities of second conductivity type than the first semiconductor region; and a fifth semiconductor region provided between the first semiconductor region and the third electrode, the fifth semiconductor region being provided apart from the third semiconductor region and the fourth semiconductor region, the fifth semiconductor region having a higher concentration of impurities of second conductivity type than the first semiconductor region.

Disclosed is a semiconductor device and a manufacturing method, comprising: forming a pad oxide layer and a silicon nitride layer on a substrate; etching the silicon nitride layer into a plurality of segments; forming an oxide layer, having an up-and-down wave shape, by performing a traditional thermal growth field oxygen method on the semiconductor device by use of the plurality of segments serving as forming-assisted structures; performing traditional processes on the semiconductor device having an up-and-down wavy semiconductor surface, to form a gate oxide layer, a polysilicon layer, and to form a source region and a drain region by implantation The semiconductor device having an up-and-down wavy channel region may be formed by a traditional thermal growth field oxygen method, thus the manufacturing processes are simple, the cost is low, and the completed device may have a larger effective channel width and a lower on-state resistance.

A semiconductor device includes a semiconductor substrate that includes a drift layer, a drain layer, a first well region and a second well region in the drift layer, a first source region selectively formed in the first well region, and a second source region selectively formed in the second well region; a gate insulating film selectively disposed on the semiconductor substrate and covering a portion of the drift layer sandwiched by the first well region and the second well region, the gate insulating film including a first portion and a second portion thicker than the first portion, arranged side by side so as to be laterally continuous to each other, the first portion being arranged on the first well region, the second portion being arranged on the second well region; and a gate electrode disposed on the gate insulating film that includes the first and second portions.

The present disclosure provides a trench field effect transistor and a manufacturing method. The manufacturing method includes: providing a semiconductor substrate, forming an epitaxial layer, a first trench, a second trench, a first gate dielectric layer, a first gate structure, a second gate dielectric layer, a second gate structure, and a body region, forming a source implantation mask, performing ion implantation based on the source implantation mask to form a source, and forming a source electrode structure. Self-aligned source implantation is implemented by designing a source implantation mask, and a body region lead-out region is formed while forming a source, so that the source and the body region are directly led out. The present disclosure uses a self-alignment technique to further reduce a cell dimension, and enables equal-potential electrical lead-out of the source and the body region without providing a source contact hole.