Patent classifications
H01L29/1045
Semiconductor device
A semiconductor device of an embodiment includes: a first and second semiconductor regions of a first conductivity type; a third semiconductor region of a second conductivity type disposed between the first and second semiconductor regions; a fourth semiconductor region of the first conductivity type disposed below the first semiconductor region; a fifth semiconductor region of the first conductivity type disposed below the second semiconductor region; a first region containing carbon disposed between the first and fourth semiconductor regions; a second region containing carbon disposed between the second and fifth semiconductor regions; a third region disposed between the first and second regions; the first and second regions having a first and second carbon concentrations respectively, the third region not containing carbon or having a lower carbon concentration than the first and second carbon concentrations in a portion below an end of a lower face of a gate electrode.
Hole Channel Semiconductor Transistor, Manufacturing Method, and Application thereof
The present disclosure provides a non-planar hole channel transistor and a fabrication method thereof. The non-planar hole channel transistor has a substrate, and a surface of the substrate has a step structure comprising a vertical surface. A non-planar channel layer is epitaxially grown laterally with the vertical surface as a core. A barrier layer is formed on the channel layer, so as to simultaneously form a two-dimensional hole gas and/or a two-dimensional electron gas at an interface between the barrier layer and the channel layer.
Semiconductor structure and associated fabricating method
A semiconductor structure is disclosed. The semiconductor structure includes: a substrate of a first conductivity; a first region of the first conductivity formed in the substrate; a second region of the first conductivity formed in the first region, wherein the second region has a higher doping density than the first region; a source region of a second conductivity formed in the second region; a drain region of the second conductivity formed in the substrate; a pickup region of the first conductivity formed in the second region and adjacent to the source region; and a resist protective oxide (RPO) layer formed on a top surface of the second region. An associated fabricating method is also disclosed.
Power IC including a feedback resistor, and a switching power supply and electronic appliance including the power IC
This power supply IC is a semiconductor integrated circuit device serving as a main part for controlling a switching power supply and is formed by integrating a feedback resistor and an output feedback control unit on a single semiconductor substrate, said feedback resistor generating a feedback voltage by dividing the output voltage of the switching power supply (or the induced voltage appearing across an auxiliary winding provided on the primary side of a transformer included in an insulation-type switching power supply), said output feedback control unit performing output feedback control of the switching power supply in accordance with the feedback voltage. The feedback resistor is a polysilicon resistor having a withstand voltage of 100 V or more. A high-voltage region having higher withstand voltage in the substrate thickness direction than the other region is formed in the semiconductor substrate, and the feedback resistor is formed on the high-voltage region.
Transistor including two-dimensional (2D) channel
A transistor including at least one two-dimensional (2D) channel is disclosed. A transistor according to some example embodiments includes first to third electrodes separated from each other, and a channel layer that is in contact with the first and second electrodes, parallel to the third electrode, and includes at least one 2D channel. The at least one 2D channel includes at least two regions having different doping concentrations. A transistor according to some example embodiments includes: first to third electrodes separated from each other; a 2D channel layer that is in contact with the first and second electrodes and parallel to the third electrode; a first doping layer disposed under the 2D channel layer corresponding to the first electrode; and a second doping layer disposed under the 2D channel layer corresponding to the second electrode, wherein the first and second doping layers contact the 2D channel layer.
SIC MOSFET WITH BUILT-IN SCHOTTKY DIODE
A power SiC MOSFET with a built-in Schottky rectifier provides advantages of including a Schottky rectifier, such as avoiding bipolar degradation, while reducing a parasitic capacitive charge and related power losses, as well as system cost. A lateral built-in channel layer may enable lateral spacing of the MOSFET gate oxide from a high electric field at the Schottky contact, while also providing current limiting during short-circuit events.
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
A semiconductor device and a method of manufacturing the semiconductor device to achieve both of a high breakdown voltage and a low on resistance are provided. A semiconductor substrate includes a convex portion protruding upward from a surface of the semiconductor substrate. An n-type drift region is arranged on the semiconductor substrate so as to be positioned between a gate electrode and an n.sup.+-type drain region in plan view, and has an impurity concentration lower than an impurity concentration of the n.sup.+-type drain region. A p-type resurf region is arranged in the convex portion and forms a pn junction with the n-type drift region.
SIC TRENCH MOSFET WITH LOW ON-RESISTANCE AND SWITCHING LOSS
An improved SiC trench MOSFET having first and second type gate trenches for formation of a gate electrode, and a grounded P-shield region under the gate electrode for gate oxide electric-field reduction is disclosed. The gate electrodes are disposed into the first type gate trench having a thick oxide layer on trench bottom. The grounded P-shield region surrounding the second type gate trench filled up with the thick oxide layer is connected with a source metal through a grounded P region. The device further comprises a current spreading region surrounding the first type gate trench for on-resistance reduction.
Surface-Doped Channels for Threshold Voltage Modulation
GAAFET threshold voltages are tuned by introducing dopants into a channel region. In a GAAFET that has a stacked channel structure, dopants can be introduced into multiple channels by first doping nano-structured layers adjacent to the channels. Then, by an anneal operation, dopants can be driven, from surfaces of the doped layers into the channels, to achieve a graduated dopant concentration profile. Following the anneal operation and after the dopants are diffused into the channels, depleted doped layers can be replaced with a gate structure to provide radial control of current in the surface-doped channels.
SEMICONDUCTOR DEVICE INCLUDING CURRENT SPREAD REGION
A semiconductor device includes a silicon carbide semiconductor body. A first shielding region of a first conductivity type is connected to a first contact at a first surface of the silicon carbide semiconductor body. A current spread region of a second conductivity type is connected to a second contact at a second surface of the silicon carbide semiconductor body. A doping concentration profile of the current spread region includes peaks along a vertical direction perpendicular to the first surface. A doping concentration of one peak or one peak-group of the peaks is at least 50% higher than a doping concentration of any other peak of the current spread region. A vertical distance between the one peak or the one peak-group of the current spread region and the first surface is larger than a second vertical distance between the first surface and a maximum doping peak of the first shielding region.