A method of making an integrated circuit includes forming a drift region in a substrate, the drift region having a first dopant type; forming a drain well in the drift region, the drain well having the first dopant type. The drain well includes a first zone with a first concentration of the first dopant and a second zone having a second concentration of the first dopant different from the first concentration of the first dopant. The method further includes forming a source well in the substrate, the source well having a second dopant type opposite from the first dopant type, the source well being adjacent to the drift region in the substrate. The method includes forming a gate electrode over a top surface of the substrate over the drift region and the source well, and being laterally separated from the drain well. The method includes forming a drain low-density doped (LDD) region in the second zone of the drain well.

An integrated circuit and method having an LDMOS transistor with multiple current channels. A first current channel is above a buried p-type diffusion and a second one current channel is below the buried p-type diffusion.

An apparatus includes a first lateral diffusion field effect transistor (LDFET) having a first threshold voltage and that includes a first gate electrode, a first drain contact, a first source contact, and a first electrically conductive shield plate separated from the first gate electrode and the first source contact by a first interlayer dielectric. A second LDFET of the apparatus has a second threshold voltage and includes a second gate electrode, a second drain contact, and a second source contact. The second source contact is electrically connected to the first source contact of the first LDFET. A control circuit of the apparatus is electrically coupled to the first electrically conductive shield plate and is configured to apply to the first electrically conductive shield plate a first gate bias voltage of a first level to set the first threshold voltage of the first LDFET to a first desired threshold voltage.

A transistor arrangement comprising an electrically conductive substrate; a semiconductor body including a transistor structure, the transistor structure including a source terminal connected to said substrate; a bond pad providing a connection to the transistor structure configured to receive a bond wire; wherein the semiconductor body includes an RF-return current path for carrying return current associated with said bond wire, said RF-return current path comprising a strip of metal arranged on said body, said strip configured such that it extends beneath said bond pad and is connected to said source terminal of the transistor structure.

A transistor amplifier package includes a base, one or more transistor dies on the base, first and second leads coupled to the one or more transistor dies and defining respective radio frequency (RF) signal paths, and an isolation structure on the base between the respective RF signal paths. The isolation structure includes first and second wire bonds. The first and second wire bonds may have a crossed configuration defining at least one cross point therebetween. Related wire bond-based isolation structures are also discussed.

An LDMOS device includes a handle portion having a buried dielectric layer and a semiconductor layer thereon doped a second dopant type. A drift region doped a first type is within the semiconductor layer providing a drain extension. A gate stack includes a gate electrode on a gate dielectric layer on respective sides of a junction with the drift region. A DWELL region is within the semiconductor layer. A source region doped the first type is within the DWELL region. A drain region doped the first type is within the drift region. A first partial buried layer doped the second type is in a first portion of the drift region including under the gate electrode. A second partial buried layer doped the first type is in a second portion of the drift region including under the drain.

Aspects of the invention provide a compact semiconductor device having a surge protection element, which can reliably protect against surge and is unlikely to be affected by manufacturing variation. By forming a parasitic n-p-n transistor on a guard ring, and adopting the parasitic n-p-n transistor as a surge protection element, it is possible to provide a compact semiconductor device having a surge protection element. Also, by adopting the parasitic n-p-n transistor as a surge protection element, it is possible to reduce the operating resistance in comparison with when using a parasitic n-p-n transistor as a surge protection element, and thus possible to improve the surge protection function. Further, by providing one surge protection element on the guard ring, rather than providing a surge protection element in each cell, it is possible minimize the effect of manufacturing variation (i.e., in-plane variation) on the surge protection function.

Embodiments are directed to devices and methods for integrating laterally diffused metal oxide semiconductor (LDMOS) technology on vertical field effect transistor (VFET) technology, which enables VFET applications to be broadened to include power amplifiers. By providing a combined asymmetric underlapped drain, high current, low subthreshold slope and LDMOS lightly doped drain, high drain resistance and high drain voltage are enabled.

A semiconductor device capable of high-voltage operation includes a semiconductor substrate, a first well region, a second well region, a first gate structure, a first doped region, a second doped region, and a second gate structure. The first well region is formed in a portion of the semiconductor substrate. The second well region is formed in a portion of the first well region. The first gate structure is formed over a portion of the second well region and a portion of the first well region. The first doped region is formed in a portion of the second well region. The second doped region is formed in a portion of the first well region. The second gate structure is formed over a portion of the first gate structure, a portion of the first well region, and a portion of the second doped region.

A method for forming a semiconductor device includes forming a first guard ring around at least one transistor over a substrate. The method further includes forming a second guard ring around the first guard ring, wherein the second guard ring directly contacts the first guard ring. The method further includes forming an isolation structure between the first guard ring and the second guard ring. The method further includes forming a first doped region adjacent to the first guard ring, the first doped region having a first dopant type. The method further includes forming a second doped region adjacent to the second guard ring, the second doped region having a second dopant type.