H01L29/66621

FABRICATION METHOD OF BURIED WORDLINE STRUCTURE
20220037478 · 2022-02-03 · ·

A buried wordline structure fabrication method includes: providing a first trench in a semiconductor substrate, wherein the first trench has a tip on its bottom; performing epitaxial growth within the first trench to reduce the depth of the tip on the bottom of the first trench; and forming a gate dielectric layer on an inner wall of the first trench and filling a gate conductive layer within the first trench to form the buried wordline structure.

Semiconductor Structure and its Fabricating Method
20220037481 · 2022-02-03 · ·

Embodiments of the present application provide a semiconductor structure and its fabricating method, and a semiconductor memory. The method of fabricating a semiconductor structure comprises providing a substrate and performing ion implantation on the substrate to form an active area, forming a gate groove on surface of the substrate, measuring depth of the gate groove, and performing ion implantation compensation, if the depth of the gate groove meets a preset condition, on the substrate according to the depth of the gate groove, and forming an ion compensation region in the active area at one side of the gate groove.

IMAGE PICKUP DEVICE AND METHOD OF TRACKING SUBJECT THEREOF

The present invention provides an image pickup device that recognizes the object that the user is attempting to capture as the subject, tracks the movement of that subject, and can continue tracking the movement of the subject even when the subject leaves the capturing area so that the subject can always be reliably brought into focus. The image pickup device includes a main camera that captures the subject; an EVF that displays the captured image captured by the main camera, a sub-camera that captures the subject using a wider capturing region than the main camera, and a processing unit that extracts the subject from the captured images captured by the main camera and the sub-camera, tracks the extracted subject, and brings the subject into focus when an image of the subject is actually captured. When the subject moves outside of a capturing region of the main camera, the processing unit tracks the subject extracted from the captured image captured by the sub-camera.

Semiconductor device

A semiconductor device includes an active area having source and drain regions and a channel region between the source and drain regions, an isolation structure surrounding the active area, and a gate structure over the channel region of the active area and over the isolation structure, wherein the isolation structure has a first portion under the gate structure and a second portion free from coverage by the gate structure, and a top of the first portion of the isolation structure is lower than a top of the second portion of the isolation structure.

Method of fabricating a FINFET having a gate structure disposed at least partially at a bend region of the semiconductor fin

A semiconductor device including semiconductor material having a bend and a trench feature formed at the bend, and a gate structure at least partially disposed in the trench feature. A method of fabricating a semiconductor structure including forming a semiconductor material with a trench feature over a layer, forming a gate structure at least partially in the trench feature, and bending the semiconductor material such that stress is induced in the semiconductor material in an inversion channel region of the gate structure.

Process for producing an electrode in a base substrate and electronic device

An electrode is included in a base substrate. A trench is produced in the base substrate. The trench is filled with an annealed amorphous material to form the electrode. The electrode is made of a crystallized material which includes particles that are implanted into a portion of the electrode that is located adjacent the front-face side of the base substrate.

Semiconductor devices comprising gate structure sidewalls having different angles
09768175 · 2017-09-19 · ·

The present disclosure provides a semiconductor device including a substrate, a first active region, a second active region, and a gate structure. The first active region and the second active region are disposed in the substrate. The gate structure includes a bottom, a first sidewall attached to the first active region, and a second sidewall attached to the second active region. The first sidewall and the bottom have a first point of intersection, and the first sidewall and a first horizontal line starting from the first point toward the substrate have a first included angle. The second sidewall and the bottom have a second point of intersection, and the second sidewall and a second horizontal line starting from the second point toward the substrate have a second included angle. The first included angle is different from the second included angle. A method for manufacturing a semiconductor device is provided herein.

Semiconductor device having a wide-gap semiconductor layer in an insulating trench

A conventional DRAM needs to be refreshed at an interval of several tens of milliseconds to hold data, which results in large power consumption. In addition, a transistor therein is frequently turned on and off; thus, deterioration of the transistor is also a problem. These problems become significant as the memory capacity increases and transistor miniaturization advances. A transistor is provided which includes a wide-gap semiconductor and has a trench structure including a trench for a gate electrode and a trench for element isolation. Even when the distance between a source electrode and a drain electrode is decreased, the occurrence of a short-channel effect can be suppressed by setting the depth of the trench for the gate electrode as appropriate.

TRENCH-GATE TRANSISTOR WITH GATE DIELECTRIC HAVING A FIRST THICKNESS BETWEEN THE GATE ELECTRODE AND THE CHANNEL REGION AND A SECOND GREATER THICKNESS BETWEEN THE GATE ELECTRODE AND THE SOURCE/DRAIN REGIONS
20220238675 · 2022-07-28 ·

The present disclosure provides a transistor, a transistor forming method thereof, and a semiconductor device. The transistor forming method comprises providing a substrate, the substrate comprising a first region for forming a source region and a second region for forming a drain region; forming a gate groove in the substrate to separate the first region and the second region, a part of the substrate along the bottom of the gate groove being used for constituting an embedded channel region of a transistor; forming a gate dielectric layer on the gate groove of the substrate to cover the embedded channel region and to extend to cover a side of the first region and a side of the second region in the gate groove; and forming a gate conductive layer on the gate dielectric layer of the substrate and in the gate groove.

3D SEMICONDUCTOR DEVICES AND STRUCTURES WITH LOGIC GATES

A 3D semiconductor device including: a first level including a first single-crystal layer, a plurality of first transistors, a first metal layer (includes interconnection of first transistors), and a second metal layer, where first transistors' interconnection includes forming logic gates; a plurality of second transistors disposed atop, at least in part, of logic gates; a plurality of third transistors disposed atop, at least in part, of the second transistors; a third metal layer disposed above, at least in part, the third transistors; a global grid to distribute power and overlaying, at least in part, the third metal layer; a local grid to distribute power to the logic gates, the local grid is disposed below, at least in part, the second transistors, where the second transistors are aligned to the first transistors with less than 40 nm misalignment, where at least one of the second transistors includes a metal gate.