The semiconductor device includes a semiconductor substrate, a plurality of source regions formed in a stripe shape on the semiconductor substrate, a plurality of gate electrodes formed in a stripe shape between a plurality of the stripe shaped source regions on the semiconductor substrate, an insulating film for covering the source regions and the gate electrodes, the insulating film including a contact hole for partly exposing the source regions in a part of a predetermined region with respect to a longitudinal direction of the source regions; and a source electrode formed on the insulating film and electrically connected to the source region via the contact hole.

An electronic device can include a semiconductor layer, an insulating layer overlying the semiconductor layer, and a conductive electrode. In an embodiment, a first conductive electrode member overlies the insulating layer, and a second conductive electrode member overlies and is spaced apart from the semiconductor layer. The second conductive electrode member has a first end and a second end opposite the first end, wherein each of the semiconductor layer and the first conductive electrode member are closer to the first end of the second conductive electrode member than to the second end of the second conductive electrode member. In another embodiment, the conductive electrode can be substantially L-shaped. In a further embodiment, a process can include forming the first and second conductive electrode members such that they abut each other. The second conductive electrode member can have the shape of a sidewall spacer.

This invention discloses a new switching device supported on a semiconductor that includes a drain disposed on a first surface and a source region disposed near a second surface of said semiconductor opposite the first surface. The switching device further includes an insulated gate electrode disposed on top of the second surface for controlling a source to drain current. The switching device further includes a source electrode interposed into the insulated gate electrode for substantially preventing a coupling of an electrical field between the gate electrode and an epitaxial region underneath the insulated gate electrode. The source electrode further covers and extends over the insulated gate for covering an area on the second surface of the semiconductor to contact the source region. The semiconductor substrate further includes an epitaxial layer disposed above and having a different dopant concentration than the drain region. The insulated gate electrode further includes an insulation layer for insulating the gate electrode from the source electrode wherein the insulation layer having a thickness depending on a Vgsmax rating of the vertical power device.

The disclosed technology generally relates to semiconductor devices, and more particularly to a static random access memory (SRAM) having vertical channel transistors and methods of forming the same. In an aspect, a semiconductor device includes a semiconductor substrate and a semiconductor bottom electrode region formed on the substrate and including a first region, a second region and a third region arranged side-by-side. The second region is arranged between the first and the third regions. A first vertical channel transistor, a second vertical channel transistor and a third vertical channel transistor are arranged on the first region, the second region and the third region, respectively. The first, second and third regions are doped such that a first p-n junction is formed between the first and the second regions and a second p-n junction is formed between the second and third regions. A connection region is formed in the bottom electrode region underneath the first, second and third regions, wherein the connection region and the first and third regions are doped with a dopant of a same type. A resistance of a path extending between the first and the third regions through the connection region is lower than a resistance of a path extending between the first and the third regions through the second region. A second aspect is a method of forming the semiconductor device of the first aspect.

In an insulated-gate type semiconductor device in which a gate-purpose conductive layer is embedded into a trench which is formed in a semiconductor substrate, and a source-purpose conductive layer is provided on a major surface of the semiconductor substrate, a portion of a gate pillar which is constituted by both the gate-purpose conductive layer and a cap insulating film for capping an upper surface of the gate-purpose conductive layer is projected from the major surface of the semiconductor substrate; a side wall spacer is provided on a side wall of the projected portion of the gate pillar; and the source-purpose conductive layer is connected to a contact region of the major surface of the semiconductor substrate, which is defined by the side wall spacer.

A semiconductor device includes a substrate, an active gate trench in the substrate; a source polysilicon pickup trench in the substrate; a polysilicon electrode disposed in the source polysilicon pickup trench; and a body region in the substrate. The top surface of the polysilicon electrode is below the bottom of the body region.

A vertical trench MOSFET is formed with deep P-shield regions below portions of each gate trench. The deep P-shield regions are effectively downward extensions of the P-body/well, and are electrically coupled to the top source electrode. The P-shield regions abut the bottom portions and lower sides of the gate trenches, so that those small portions of the gate trench do not create N-channels and do not conduct current. Accordingly, each trench comprises an active gate portion that creates an N-channel and a small non-active portion that abuts the P-shield regions. The spacing of the P-shield regions along each gate trench is selected to achieve the desired electric field spreading to protect the gate oxide from punch-through. No field plate trenches are needed to be formed in the active area of the MOSFET. The deep P-shield regions are formed by implanting P-type dopants through the bottom of the trenches.

One embodiment provides a semiconductor device. The device comprises a substrate having a first face and a second face, a well region, a source region disposed in the well region, a contact region contacting the well region and the source region, a Schottky region, and a source metal layer. A first part of the source metal layer contacts the Schottky region to form a Schottky diode. The Schottky region is surrounded by the contact region and the well region in a first plane perpendicular to a direction from the first face toward the second face.

A method of processing a semiconductor device includes: creating first and second recesses in a surface of a semiconductor body; creating an insulation layer that forms first and second wells each having a common lateral extension range with the portion of the insulation layer located between the recesses; filling the wells with a plug material having the respective common lateral extension range with the insulation layer; removing a middle portion of the insulation layer located between the recesses; filling, with a filling material, a third recess created in a region where the middle portion has been removed and at least a portion of the space located between the wells; creating a first common surface of the insulation layer, the plug material, and the filling material; removing the plug material from the second well; and creating a second insulation layer that covers a side wall of the second recess.

A trench MOSFET can include: a semiconductor base having a first doping type; a trench extending from an upper surface of the semiconductor base to internal portion of the semiconductor base; an insulating layer and an electrode conductor located in the trench; a body region having a second doping type and extending from the upper surface of the semiconductor base to the inside thereof and adjacent to the trench; a source region having the first doping type and located in the body region, a first barrier layer located on the electrode conductor and the semiconductor base; and a contact hole in the semiconductor base on both sides of the first barrier layer, where the contact hole is formed by etching process using the first barrier layer as a mask.