Disclosed are three-dimensional semiconductor device and their fabrication methods. The device includes a first active region on a substrate and including a first source/drain pattern and a first channel pattern connected to the first source/drain pattern, a first active contact on the first source/drain pattern, a second active region on the first active region and the first active contact and including a second source/drain pattern and a second channel pattern connected to the second source/drain pattern, a second active contact on the second source/drain pattern, a gate electrode that vertically extends from the first channel pattern toward the second channel pattern, a first power line and a second power line that are below the first active region, and a first metal layer on the gate electrode and the second active contact.

Provided is a semiconductor super junction power device which includes a super junction MOSFET cell array composed of multiple super junction MOSFET cells. A gate structure of the super junction MOSFET cell includes a gate dielectric layer, a gate and an n-type floating gate. The gate and the n-type floating gate are located above the gate dielectric layer; the gate is located on a side close to the n-type source region, and the n-type floating gate is located on a side close to the n-type drift region; the gate acts on the n-type floating gate through capacitive coupling. The n-type floating gate of at least one MOSFET cell is isolated from the p-type body region through the gate dielectric layer, and the n-type floating gate of at least one MOSFET cell contacts the p-type body region through an opening in the gate dielectric layer to form a p-n junction diode.

A semiconductor device of embodiments includes: an element region including a transistor, a first diode, and a first contact portion; a termination region surrounding the element region and including a second contact portion; and an intermediate region provided between the element region and the termination region and not including the transistor, the first diode, the first contact portion, and the second contact portion. The element region includes a first electrode, a second electrode, a gate electrode, a silicon carbide layer, and a gate insulating layer. The termination region includes a first wiring layer electrically connected to the first electrode, the second electrode, and the silicon carbide layer. The intermediate region includes the silicon carbide layer. The width of the intermediate region in a direction from the element region to the termination region is equal to or more than twice the thickness of the silicon carbide layer.

A transistor device is disclosed. The transistor device includes: a semiconductor body (100); a drift region (11) in the semiconductor body (100); a plurality of transistor cells (10); and a gate node (G) and a source node (S), wherein each of the plurality of transistor cells (10) includes: a first trench electrode (21) insulated from the semiconductor body (100) by a first dielectric layer (22); a second trench electrode (23) insulated from the semiconductor body (100) by a second dielectric layer (24); a source region (13) and a body region (14) in a first mesa region (111) between the first trench electrode (21) and the second trench electrode (23); and a compensation region (12), wherein the compensation region (12) adjoins the body region (14), the first dielectric (22), the second dielectric (24), and forms a pn-junction with the drift region (11), and wherein from the first trench electrode (21) and the second trench electrode (23) at least the first trench electrode (21) is connected to the gate node (G).

A semiconductor device includes a transistor array and a sense pad. The transistor array includes a plurality of transistor cells electrically connected in parallel between a source electrode and a drain structure. The drain structure is formed in a semiconductor portion based on a single-crystalline wide bandgap material. A sense element formed from the wide bandgap material includes at least one rectifying junction electrically connected between the sense pad and the source electrode.

In an embodiment, a semiconductor device includes: a main transistor having a load path; a sense transistor configured to sense a main current flowing in the load path of the main transistor; and a bypass diode structure configured to protect the sense transistor and electrically coupled in parallel with the sense transistor. A sense transistor cell of the sense transistor includes a sense trench and a sense mesa. The sense trench and a bypass diode trench of the bypass diode structure form a common trench. The sense mesa and a bypass diode mesa of the bypass diode structure form a common mesa.

Provided is a semiconductor power device, including an n-type drain region and an n-type epitaxial layer located upon the n-type drain region. The n-type epitaxial layer includes at least two first p-type body regions, where an n-type source region is disposed in a respective one of the at least two first p-type body regions; a p-type columnar doped region located below the respective one of the at least two first p-type body regions; and two gate trenches located between two adjacent first p-type body regions, where a second p-type body region is disposed between the two gate trenches. A gate dielectric layer and a gate are disposed in a respective one of the two gate trenches.

A method of manufacturing an insulated gate semiconductor device includes simultaneously forming a gate trench and a contact trench that respectively penetrate form a top of the electrode contact region through a main electrode contact region and a injection control region in a depth direction and respectively reach a charge transport region, the contact trench being disposed at a position laterally separated from the gate trench in a plan view; and embedding a gate electrode inside the gate trench with a gate insulating film interposed therebetween, thereby forming an insulated gate structure, and simultaneously embedding an injection suppression region inside the contact trench, the gate electrode and the injection suppression region being both made of a second semiconductor material having a narrower bandgap than a bandgap of the first semiconductor material of the charge transport region.

A semiconductor device includes a semiconductor layer, a first conductor disposed on the semiconductor layer, a second conductor disposed on the semiconductor layer so as to be separated from the first conductor, a relay portion that is formed on the semiconductor layer so as to straddle the first conductor and the second conductor and that is made of a semiconductor having a first conductivity type region and a second conductivity type region, a first contact by which the first conductivity type region and the second conductivity type region are electrically connected to the first conductor, and a second contact that electrically connects the first conductivity type region of the relay portion and the second conductor together and that is insulated from the second conductivity type region.

The present invention suppresses an increase in manufacturing cost and reduces switching noise. A field-effect transistor having a gate electrode embedded in a trench in an upper surface of a semiconductor substrate, a source region formed in the semiconductor substrate, and a drain region formed on a lower surface of the semiconductor substrate is provided with a gate wiring formed on the semiconductor substrate and being electrically connected to the gate electrode, a gate pad formed on the semiconductor substrate, a first resistor connected between the gate pad and the gate wiring and being configured to function when the field-effect transistor is turned ON, a second resistor connected between the gate pad and the gate wiring and being configured to function when the field-effect transistor is turned OFF, and a rectifier diode included in the first resistor or the second resistor between the gate pad and the gate wiring.