H01L2224/29739

Thermal Bonding Sheet and Thermal Bonding Sheet with Dicing Tape
20180315729 · 2018-11-01 ·

Provided is a thermal bonding sheet capable of preventing bonding irregularity by uniform thickness, and imparting the bonding reliability at high temperatures, and a thermal bonding sheet with dicing tape having the thermal bonding sheet. A thermal bonding sheet includes a precursor layer that is to become a sintered layer by heating, and the precursor layer has an average thickness of 5 m to 200 m, and a maximum thickness and a minimum thickness falling within a range of 20% of the average thickness. A thermal bonding sheet includes a precursor layer that is to become a sintered layer by heating, and the precursor layer has an average thickness of 5 m to 200 m, and a surface roughness Sa measured in a field of view of 200 m200 m by a confocal microscope of 2 m or less.