A cleaning apparatus for cleaning member has a member cleaning part 30 that cleans a cleaning member 10 that cleans a substrate W; and a measurement part 20 that measures a degree of cleanliness of the cleaning member 10 cleaned by the member cleaning part 30.

The present invention relates generally to a system and a method for cleaning the surface of an object. More particularly, the present invention relates to a system and a method that removes inorganic contaminants from the surface of the object and then activates the surface and removes organic contaminants therefrom. The system for cleaning an object includes a first cleaner (120), including at least one elastomeric roll (122), rotatably mounted to said first cleaner and having a generally cylindrical outer surface configured to contact a first surface of the object for removing inorganic contaminants. The system also includes at least one adhesive roll (424,434), rotatably mounted to said first cleaner and having a generally cylindrical outer surface in contact with a portion of said outer surface of said at least one elastomeric roll. Additionally, the system includes at least one second cleaner (440), configured to operably receive the object from said first cleaner, and comprising an electromagnetic radiation source (342) adapted to selectively emit electromagnetic radiation with a wavelength in a range of 10 nm to 280 nm to irradiate at least the first surface of the object so as to activate at least the first surface and to decontaminate organic contaminants therefrom.

The present invention relates to a contact cleaning apparatus (100) including an elastomeric roller (120), rotatably mounted within a contact cleaning apparatus such that an outer surface (123) of said elastomeric roller contactingly engages a substrate surface (112) during use. There is also provided an apparatus for evaluating said outer surface of said elastomeric roller, including an electromagnetic radiation source (140), configured to selectively emit electromagnetic radiation of a predetermined electromagnetic spectrum onto at least one predetermined region (125) of said outer surface, a detector (160), configured to receive at least a first reflection of said electromagnetic radiation from said at least one predetermined region, and a controller (270) operably coupled to said detector and adapted to determine at least one characteristic parameter of at least said first reflection. The present invention also relates to a method of evaluating a contact cleaning apparatus, including evaluating an elastomeric roller surface using electromagnetic radiation.

The present invention relates to a contact cleaning apparatus (100) including an elastomeric roller (120), rotatably mounted within a contact cleaning apparatus such that an outer surface (123) of said elastomeric roller contactingly engages a substrate surface (112) during use. There is also provided an apparatus for evaluating said outer surface of said elastomeric roller, including an electromagnetic radiation source (140), configured to selectively emit electromagnetic radiation of a predetermined electromagnetic spectrum onto at least one predetermined region (125) of said outer surface, a detector (160), configured to receive at least a first reflection of said electromagnetic radiation from said at least one predetermined region, and a controller (270) operably coupled to said detector and adapted to determine at least one characteristic parameter of at least said first reflection. The present invention also relates to a method of evaluating a contact cleaning apparatus, including evaluating an elastomeric roller surface using electromagnetic radiation.

According to one embodiment, there is provided a cleaning apparatus including a substrate cleaner and a member cleaner. The substrate cleaner has a substrate cleaning member placed over a first region to be opposite a substrate and a second region different from the first region. The member cleaner is placed adjacent to the second region.

The present disclosure provides a nozzle cleaning device, a doctor blade replacing apparatus and a doctor blade replacing method. The doctor blade replacing apparatus includes a first doctor blade box, a second doctor blade box, a transferring assembly and a clamping and conveying mechanism. The transferring assembly includes a first tray which is disposed between the first doctor blade box and the second doctor blade box and a pushing assembly which is configured to push the first doctor blade in the first doctor blade box to the first tray and push the second doctor blade on the first tray into the second doctor blade box. The clamping and conveying mechanism is disposed between the first tray and the nozzle cleaning device for clamping and conveying the first doctor blade and the second doctor blade between the first tray and the nozzle cleaning device.

A cleaning film designed to remove foreign matter and particulates from working surfaces of cleaning wafers used in semiconductor processes. These processes include wafer sort test for cleaning of probe card pins and FEOL tooling for cleaning during wafer handling equipment and wafer chucks. The debris collected on the cleaning wafer working surfaces is removed by the particle removal film allowing the debris and foreign matter to be discarded. The use of the cleaning film allows the operator to refresh the cleaning wafer without use of an outside vendor and eliminates wet washing and the use of solvents in the cleaning process.

A system (10) for cleaning an object (12) includes a roll cleaner (14) having a rotatable elastomeric roll (20) with a cylindrical outer surface configured to contact the first surface of the object (12), a rotatable adhesive roll (22) with a cylindrical outer surface contacting a portion of the outer surface of the elastomeric roll (20), and a support (24). The object (12) passes between the elastomeric roll (20) and the support (24), which contacts a second, opposing object surface. An atmospheric plasma cleaner (16) includes a sealed chamber (32) and at least one electrode (34) disposed in the chamber (32) and receiving a high voltage to generate a plasma applied to the first object surface. At least a portion of an inlet of the plasma cleaner (16) is formed by the elastomeric roll (20) and the support (24), and the contacting of the first and second surfaces of the object (12) by the elastomeric roll (20) and the support (24) seals the inlet of the plasma cleaner (16).

Novel materials and devices can remove small defects from long rolls of flexible electronics material while they are in continuous motion. The cleaning materials are designed to remove small particles without transferring defects or damaging the flexible electronics. The device generally consists of variable speed, motor-driven cylinders mounted on movable brackets. The cylinders are capable of matching the speed of the cleaning material such that the cleaning material is always in contact with the web roll to be cleaned. The brackets are capable of rotating so the same material can be used more than once. Another material is used to remove debris from the cleaning material. A similar device consisting of motor-driven cylinders and movable is used to apply the debris removal film to the cleaning film, allowing the cleaning film to be used multiple times.

Novel materials and devices can remove small defects from long rolls of flexible electronics material while they are in continuous motion. The cleaning materials are designed to remove small particles without transferring defects or damaging the flexible electronics. The device generally consists of variable speed, motor-driven cylinders mounted on moveable brackets. The cylinders are capable of matching the speed of the cleaning material such that the cleaning material is always in contact with the web roll to be cleaned. The brackets are capable of rotating so the same material can be used more than once. Another material is used to remove debris from the cleaning material. A similar device consisting of motor-driven cylinders and moveable is used to apply the debris removal film to the cleaning film, allowing the cleaning film to be used multiple times.