A split gate MOSFET is provided. The split gate MOSFET may have a low capacitance between a gate electrode and a source electrode. The trench MOSFET includes a substrate; a gate trench formed on the substrate; a sidewall insulating layer formed on a sidewall of the gate trench; a source electrode surrounded by the sidewall insulating layer; a first upper electrode provided above the source electrode; a first inter-electrode insulating layer formed between the source electrode and the first upper electrode; a second upper electrode formed adjacent to a side of the first upper electrode and surrounding the first upper electrode; and an interlayer insulating layer formed on the first upper electrode and the second upper electrode.

A method includes sequentially depositing a floating gate layer, a dielectric structure stack, and a control gate layer over a substrate. A first etching process is performed to pattern the control gate layer, the dielectric structure stack, and a top portion of the floating gate layer to form a control gate, a dielectric structure, and a top portion of a floating gate over a bottom portion of the floating gate layer. A sidewall of the top portion of the floating gate is concave. A first spacer structure is formed on the sidewall of the top portion of the floating gate, a sidewall of the dielectric structure, and a sidewall of the control gate. A second etching process is performed to pattern the bottom portion of the floating gate layer to form a bottom portion of the floating gate after forming the first spacer structure.

A semiconductor device may include: a gate structure including insulating layers and control gates, which are alternately stacked; a channel layer penetrating the gate structure; floating gates respectively located between the control gates and the channel layer; first blocking patterns respectively located between the control gates and the floating gates; and a second blocking pattern located between the first blocking patterns and the control gates and between the control gates and the insulating layers, the second blocking pattern including a material with a dielectric constant that is higher than that of the first blocking patterns.

Methods of forming memory structures are discussed. Specifically, methods of forming 3D NAND devices are discussed. Some embodiments form memory structures with a metal nitride barrier layer, an -tungsten layer, and a bulk metal material. The barrier layer comprises a TiXN or TaXN material, where X comprises a metal selected from one or more of aluminum (Al), silicon (Si), tungsten (W), lanthanum (La), yttrium (Yt), strontium (Sr), or magnesium (Mg).

An integrated chip (IC) device according to the present disclosure includes a device region, an interconnect structure disposed over the device region, and a seal ring surrounding the device region and the interconnect structure. The device region includes a transistor having a gate structure. The seal ring includes a metal structure. The gate structure is thermally coupled to the metal structure by way of a diode.

A method of forming a semiconductor device by providing a substrate having bulk silicon, an insulation layer over the bulk silicon, and a silicon layer over the insulation layer. The silicon and insulation layers are removed from first and second areas, while maintained in a third area. A memory cell is formed in the first area having a floating gate over a first portion of a memory cell channel region and a control gate over a second portion of the memory cell channel region. A transistor device is formed in the second area having a transistor gate over a transistor channel region. A logic device is formed in the third area having a logic device gate over a logic device channel region. The memory cell channel region and the transistor channel region are disposed in the bulk silicon. The logic device channel region is disposed in the silicon layer.

A semiconductor device includes an element region and a termination region. The element region includes a first semiconductor region of a first conductivity type located on a first electrode and a second semiconductor region of a second conductivity type located on the first semiconductor region. The second semiconductor region is electrically connected with a second electrode. The termination region includes a third semiconductor region of the first conductivity type, a first diffusion layer of the second conductivity type located at a surface of the third semiconductor region, and a second diffusion layer of the second conductivity type. The third semiconductor region is located outward of the first semiconductor region. The first diffusion layer surrounds the element region. The second diffusion layer surrounds the element region, and is deeper than the first diffusion layer.

A neuromorphic device for the analog computation of a linear combination of input signals, for use, for example, in an artificial neuron. The neuromorphic device provides non-volatile programming of the weights, and fast evaluation and programming, and is suitable for fabrication at high density as part of a plurality of neuromorphic devices. The neuromorphic device is implemented as a vertical stack of flash-like cells with a common control gate contact and individually contacted source-drain (SD) regions. The vertical stacking of the cells enables efficient use of layout resources.

A method of forming a semiconductor device includes forming a first layer on a semiconductor fin; forming a mask on the first layer, the mask being thicker on a top of the semiconductor fin than along a sidewall of the semiconductor fin. The first layer is thinned along the sidewall of the semiconductor fin using the mask. A second layer is formed on the semiconductor fin, the second layer covering the mask and the first layer. A dummy gate layer is formed on the semiconductor fin and patterned to expose a top surface of the semiconductor fin.

The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a source/drain region arranged within a substrate. A select gate and a memory gate are arranged over the substrate. An inter-gate dielectric structure is arranged between the memory gate and the select gate. A conductive contact is disposed on the source/drain region and vertically extends from a bottom of the select gate to a top of the select gate. The select gate is closer to the conductive contact than the memory gate. The select gate has a first outermost sidewall that faces away from the memory gate and a second outermost sidewall that faces the memory gate. The first outermost sidewall is taller than the second outermost sidewall.