Patent classifications
H10D30/6734
Semiconductor Device
Provided is a semiconductor device including a transistor having excellent electrical characteristics (e.g., on-state current, field-effect mobility, or frequency characteristics) or a semiconductor device including a transistor with high reliability. In the channel width direction of a channel-etched transistor in which an oxide semiconductor film is between first and second gate electrodes, the first and second gate electrodes are connected to each other through an opening portion in first and second gate insulating films. In addition, the first and second gate electrodes surround the oxide semiconductor film in a cross-section in the channel width direction, with the first gate insulating film provided between the first gate electrode and the oxide semiconductor film and the second gate insulating film provided between the second gate electrode and the oxide semiconductor film. Furthermore, the channel length of the transistor is 0.5 m or longer and 6.5 m or shorter.
VERTICAL FIELD EFFECT TRANSISTORS WITH PROTECTIVE FIN LINER DURING BOTTOM SPACER RECESS ETCH
A method of fabricating a vertical field effect transistor comprising that includes forming openings through a spacer material to provide fin structure openings to a first semiconductor material, and forming an inner spacer liner on sidewalls of the fin structure openings. A channel semiconductor material is epitaxially formed on a surface of the first semiconductor material filling at least a portion of the fin structure openings. The spacer material is recessed with an etch that is selective to the inner spacer liner to form a first spacer. The inner spacer liner is removed selectively to the channel semiconductor material. A gate structure on the channel semiconductor material, and a second semiconductor material is formed in contact with the channel semiconductor material.
Tunneling field effect transistors with a variable bandgap channel
Tunneling field effect transistors (TFETs) including a variable bandgap channel are described. In some embodiments, one or more bandgap characteristics of the variable bandgap channel may be dynamically altered by at least one of the application or withdrawal of a force, such as a voltage or electric field. In some embodiments the variable bandgap channel may be configured to modulate from an ON to an OFF state and vice versa in response to the application and/or withdrawal of a force. The variable bandgap channel may exhibit a bandgap that is smaller in the ON state than in the OFF state. As a result, the TFETs may exhibit one or more of relatively high on current, relatively low off current, and sub-threshold swing below 60 mV/decade.
Approach for an area-efficient and scalable CMOS performance based on advanced Silicon-On-Insulator (SOI), Silicon-On-Sapphire (SOS) and Silicon-On-Nothing (SON) technologies
New, distinct, and useful architectures for single-legged SOI-MOS were established and fabricated for the very first time. They incorporated into their architectures an innovative new configuration to wire the device Body to the Body-Tied-Source. This new configuration drastically increased the conductance between the Body and the Body-Tied-Source. This consequently allowed these devices to effectively support much higher operating biases. Same configuration also functioned on structures with very large peripheries. These gave proportional increase in this same conductivity, and for same area-efficiency, with the increase of their peripheries to accommodate higher currents. The functional model that governs this proportional scaling in these new architectures for single-legged SOI-MOS devices was established and is being claimed through this patent for the very first time. Through it, single-legged SOI-MOS devices will efficiently scale to area-efficient ultra large peripheries with minimal hits to their bandwidth.
Graphene-based valley filter and method for operating the same
A graphene-based valley filter includes a bottom gate, a bilayer graphene and two top gates. The bilayer graphene is deposited on the bottom gate and includes scattering defects. The top gates are deposited on the bilayer graphene. The top gates define a channel in the bilayer graphene, and the scattering defects are located in the vicinity of the channel. A vertical electric field is formed to open a band gap and produce electronic energy subbands in the channel. A transverse in-plane electric field is formed to produce pseudospin splitting in the subbands of the bilayer graphene. The scattering defects are for producing scattering between two opposite energy valley states of the bilayer graphene, couples subband states of opposite pseudospins and opens a pseudogap at a crossing point of the two subbands. Electrons are passed through the channel to become valley polarized in the bilayer graphene.
Organic Light Emitting Diode Display Device and Method for Manufacturing the Same
An organic light emitting diode display device is disclosed which includes: scan, data and power lines crossing one another and arranged to define a pixel region; a switching thin film transistor disposed at an intersection of the scan and data lines; an organic light emitting diode disposed in the pixel region; a driving thin film transistor disposed between the power line and the organic light emitting diode; and a storage capacitor disposed adjacently to the organic light emitting diode and configured to charge a data signal which is applied from the data line. The storage capacitor includes a plurality of sub storage capacitors in which a plurality of storage electrodes are stacked alternately with one another.
SEMICONDUCTOR DEVICE
To provide a semiconductor device that includes an oxide semiconductor and is miniaturized while keeping good electrical properties. In the semiconductor device, an oxide semiconductor layer is surrounded by an insulating layer including an aluminum oxide film containing excess oxygen. Excess oxygen in the aluminum oxide film is supplied to the oxide semiconductor layer including a channel by heat treatment in a manufacturing process of the semiconductor device. Furthermore, the aluminum oxide film forms a barrier against oxygen and hydrogen. It is thus possible to suppress the removal of oxygen from the oxide semiconductor layer surrounded by the insulating layer including an aluminum oxide film, and the entry of impurities such as hydrogen into the oxide semiconductor layer; as a result, the oxide semiconductor layer can be made highly intrinsic. In addition, gate electrode layers over and under the oxide semiconductor layer control the threshold voltage effectively.
SEMICONDUCTOR DEVICE
To provide a semiconductor device which occupies a small area and is highly integrated. The semiconductor device includes an oxide semiconductor layer, an electrode layer, and a contact plug. The electrode layer includes one end portion in contact with the oxide semiconductor layer and the other end portion facing the one end portion. The other end portion includes a semicircle notch portion when seen from the above. The contact plug is in contact with the semicircle notch portion.
TFT switch and method for manufacturing the same
A thin-film transistor (TFT) switch includes a gate, a drain, a source, a semiconductor layer, and a fourth electrode. The drain is connected to a first signal. The gate is connected to a control signal to control the switch on or off. The source outputs the first signal when the switch turns on. The fourth electrode and the gate are respectively located at two sides of the semiconductor layer. The fourth electrode is conductive and is selectively coupled to different voltage levels, thereby reducing leakage current in a channel to improve switch characteristic when the switch turns off.
Semiconductor device
A semiconductor device which includes an oxide semiconductor and in which formation of a parasitic channel due to a gate BT stress is suppressed is provided. Further, a semiconductor device including a transistor having excellent electrical characteristics is provided. The semiconductor device includes a transistor having a dual-gate structure in which an oxide semiconductor film is provided between a first gate electrode and a second gate electrode; gate insulating films are provided between the oxide semiconductor film and the first gate electrode and between the oxide semiconductor film and the second gate electrode; and in the channel width direction of the transistor, the first or second gate electrode faces a side surface of the oxide semiconductor film with the gate insulating film between the oxide semiconductor film and the first or second gate electrode.