A semiconductor structure includes a semiconductor substrate, a trench being provided in the semiconductor substrate, and a gate being formed in the trench; an ion implantation layer located in the semiconductor substrate outside the trench, a top surface of the ion implantation layer being higher than that of the gate, and a bottom surface of the ion implantation layer being lower than the top surface of the gate and higher than a bottom surface of the gate; a transition layer located between the gate and the ion implantation layer, a bottom surface of the transition layer being lower than the top surface of the gate and higher than the bottom surface of the gate, and a doping concentration of the transition layer being lower than that of the ion implantation layer.

A semiconductor device including: a first level including a first single crystal silicon layer, a plurality of first transistors, and input/output circuits; a first metal layer; a second metal layer which includes a power delivery network; where interconnection of the plurality of first transistors includes the first and second metal layers; a second level including a plurality of metal gate second transistors and first array of memory cells, disposed over the first level; a third level including a plurality of metal gate third transistors and a second array of memory cells, disposed over the second level; a via disposed through the second and third levels; a third metal layer disposed over the third level; a fourth metal layer disposed over the third metal layer; and a fourth level disposed over the fourth metal layer and including a second single crystal silicon layer.

A semiconductor device including: a first level including a first single crystal silicon layer, a plurality of first transistors, and input/output circuits; a first metal layer; a second metal layer which includes a power delivery network; where interconnection of the plurality of first transistors includes the first and second metal layers; a second level including a plurality of metal gate second transistors and first array of memory cells, disposed over the first level; a third level including a plurality of metal gate third transistors and a second array of memory cells, disposed over the second level; a via disposed through the second and third levels; a third metal layer disposed over the third level; a fourth metal layer disposed over the third metal layer; and a fourth level disposed over the fourth metal layer and including a second single crystal silicon layer.

A semiconductor device according to embodiments of the present invention is a field-effect transistor including a gate electrode between a source electrode and a drain electrode, wherein carriers travel between the source electrode and the drain electrode, a channel control layer is provided between a channel through with the carriers travel and the gate electrode, a recess is disposed at least in part of a surface in contact with the gate electrode on a source electrode side in the channel control layer, and a part of the gate electrode is filled in the recess.

A high electron mobility transistor includes: a channel layer through which carriers are to flow; a pair of respective main electrodes coupled to one end and another end of the channel layer; a barrier layer that is disposed at the channel layer and induces the carriers; a gate electrode disposed at an intermediate part of the channel layer with the barrier layer interposed therebetween; a first spacer layer that is disposed between the channel layer and the barrier layer and decreases alloy scattering; and a second spacer layer that is disposed between the first spacer layer and the barrier layer in a region overlapping the gate electrode and traps the carriers.

A nitride semiconductor device includes: a substrate; a first semiconductor layer of a first conductivity type disposed above the substrate; a second semiconductor layer disposed above the first semiconductor layer, having a bandgap larger than that of the first semiconductor layer, and undoped; a third semiconductor layer of a second conductivity type disposed above the second semiconductor layer; a fourth semiconductor layer including a channel, and at least partially disposed above the third semiconductor layer; a gate electrode disposed above the first semiconductor layer; a drain electrode disposed below the substrate; and an insulating layer disposed above the gate electrode. The insulating layer covers a bottom and a side wall of a groove provided in an edge termination area of the nitride semiconductor device and penetrating through the third semiconductor layer to reach the second semiconductor layer.

A semiconductor device includes multiple GaN units arranged separately from each other in a first direction in a first encapsulation resin. The GaN unit includes a substrate, a GaN transistor arranged at a substrate front surface side of the substrate, and a post arranged on a source pad, a drain pad, and a gate pad of the GaN transistor and exposed from the first encapsulation resin. The post includes a source post formed on the source pad in one of two adjacent ones of the GaN units in the first direction, and a drain post formed on the drain pad in the other one of the two adjacent ones of the GaN units in the first direction. The semiconductor device includes an interconnect layer arranged on an encapsulation front surface and electrically connects the source post and the drain post.

A semiconductor device includes a dual-stage Schottky barrier. The dual-stage Schottky barrier includes a first stage and a second stage. The first stage is formed over a substrate stack and includes an upper layer having a length corresponding to a gate length for the device. The second stage is formed at least partially over the first stage and includes a contact segment having a length less than the gate length.

A semiconductor device includes, in this order: first to third channel layers made of a III-V group semiconductor containing Fe and C and a barrier layer made of a III-V group semiconductor having a wider bandgap than a bandgap of the third channel layer. A concentration profile satisfies below-mentioned conditions of: a) Fe concentration in the second channel layer and the third channel layer gradually decreases toward the barrier layer; b) a maximum value of the C concentration in the third channel layer is larger than an average value of the C concentration in the second channel layer; and c) the maximum value of the C concentration in the third channel layer is smaller than a maximum value of a sum of the Fe concentration and the C concentration in the first channel layer.

The present disclosure relates to a semiconductor device, and the semiconductor device includes: a semiconductor substrate; a channel layer provided over the semiconductor substrate and formed of a first nitride semiconductor; a barrier layer provided over the channel layer and formed of a second nitride semiconductor having a larger band gap than the first nitride semiconductor; a metal film selectively formed above the barrier layer; a composite layer provided to be in contact with the metal film and having at least a conductive material and an insulating material; and an insulating film formed over the barrier layer in a region where the metal film and the composite layer are not formed.