The present invention provides a transistor and a fabrication method thereof. By a silicon nanowire as a core region being serially wrapped by a germanium channel, a gate insulating film and a gate, the present invention enables to form a potential well for storing holes as a carrier of HHMT in the germanium channel by a valance band energy offset between the silicon core region and the germanium channel, to gain maximum gate controllability to the germanium channel, and to simplify a fabricating process by simultaneously forming the germanium channel and the gate insulating film in one process.

Semiconductor devices with graphene nanoribbons and methods of manufacture are disclosed. The method includes forming at least one layer of Si material on a substrate. The method further includes forming at least one layer of carbon based material adjacent to the at least one layer of Si. The method further includes patterning at least one of the at least one layer of Si material and the at least one layer of carbon based material. The method further includes forming graphene on the patterned carbon based material.

An integrated circuit that includes: providing a substrate including a support structure, a dielectric layer, and a variable thickness film processed to include the dielectric layer within a recess of the variable thickness film; forming a gate over the variable thickness film; and forming a channel and a source/drain within the variable thickness film.

The benefits of strained semiconductors are combined with silicon-on-insulator approaches to substrate and device fabrication.

Transistor structures having channel regions comprising alternating layers of compressively and tensilely strained epitaxial materials are provided. The alternating epitaxial layers can form channel regions in single and multigate transistor structures. In alternate embodiments, one of the two alternating layers is selectively etched away to form nanoribbons or nanowires of the remaining material. The resulting strained nanoribbons or nanowires form the channel regions of transistor structures. Also provided are computing devices comprising transistors comprising channel regions comprised of alternating compressively and tensilely strained epitaxial layers and computing devices comprising transistors comprising channel regions comprised of strained nanoribbons or nanowires.

A semiconductor is provided that includes an nFET gate structure straddling over a first nanowire stack and a portion of a first SiGe layer having a first Ge content. The first nanowire stack comprises alternating layers of a tensily strained silicon layer, and a second SiGe layer having a second Ge content that is greater than the first Ge content and being compressively strained. Portions of the tensily strained silicon layers extend beyond sidewalls surfaces of the nFET gate structure and are suspended. The structure further includes a pFET gate structure straddling over a second nanowire stack and another portion of the first SiGe layer. The second nanowire stack comprises alternating layers of the tensily strained silicon layer, and the second SiGe layer. Portions of the second SiGe layers extend beyond sidewalls surfaces of the pFET gate structure and are suspended.

The benefits of strained semiconductors are combined with silicon-on-insulator approaches to substrate and device fabrication.

A Method for producing a layer of strained semiconductor material, the method comprising steps for: a) formation on a substrate of a stack comprising a first semiconductor layer based on a first semiconductor material coated with a second semiconductor layer based on a second semiconductor material having a different lattice parameter to that of the first semiconductor material, b) producing on the second semiconductor layer a mask having a symmetry, c) rendering amorphous the first semiconductor layer along with zones of the second semiconductor layer without rendering amorphous one or a plurality of regions of the second semiconductor layer protected by the mask and arranged respectively opposite the masking block(s) d) performing recrystallisation of the regions rendered amorphous and the first semiconductor layer resulting in this first semiconductor layer being strained (FIG. 1A).

A semiconductor is provided that includes an nFET gate structure straddling over a first nanowire stack and a portion of a first SiGe layer having a first Ge content. The first nanowire stack comprises alternating layers of a tensily strained silicon layer, and a second SiGe layer having a second Ge content that is greater than the first Ge content and being compressively strained. Portions of the tensily strained silicon layers extend beyond sidewalls surfaces of the nFET gate structure and are suspended. The structure further includes a pFET gate structure straddling over a second nanowire stack and another portion of the first SiGe layer. The second nanowire stack comprises alternating layers of the tensily strained silicon layer, and the second SiGe layer. Portions of the second SiGe layers extend beyond sidewalls surfaces of the pFET gate structure and are suspended.

Gate-all-around integrated circuit structures having differential nanowire thickness and gate oxide thickness, and methods of fabricating gate-all-around integrated circuit structures having differential nanowire thickness and gate oxide thickness, are described. For example, an integrated circuit structure includes a nanowire with an outer thickness and an inner thickness, the inner thickness less than the outer thickness. The nanowire tapers from outer regions having the outer thickness to an inner region having the inner thickness. A dielectric material is on and surrounding the nanowire such that a combined thickness of the nanowire and the dielectric material in the inner region is approximately the same as the outer thickness of the nanowire.