A semiconductor device with embedded cell is provided. A silicon substrate has a first area with at least one first cell and a second area with at least one second cell. The first cell is positioned in the first area and formed in a trench of the silicon substrate, and the second cell is positioned in the second area and formed on the silicon substrate. The first cell includes a first dielectric layer formed on sidewalls and a bottom of the trench, a floating gate formed on the first dielectric layer and embedded in the trench, a second dielectric layer formed on the floating gate and embedded in the trench, and a control gate formed on the second dielectric layer and embedded in the trench, wherein the control gate is separated from the floating gate by the second dielectric layer.

Provided is a memory device including a first gate, a second gate and an inter-gate dielectric layer. The first gate is buried in a substrate. The second gate includes metal and is disposed on the substrate. The inter-gate dielectric layer is disposed between the first and second gates. A method of forming a memory device is further provided.

A method for forming a semiconductor structure is provided. The method includes providing a semiconductor substrate with a tunnel dielectric layer, a conductive layer and a hard mask layer; etching the semiconductor layer, the tunnel dielectric layer, the conductive layer and the hard mask layer to define stack structures and trenches; forming a liner on the sidewalls of the stack structures; forming an isolation structure in the trenches; removing the hard mask layer to form openings exposing the conductive layer; filling the openings with a conductive material to form a floating gate which includes a lower portion covered by the liner and an upper portion not covered by the liner; recessing the isolation structure to expose the sidewalls of the upper portion of the floating gate; forming an inter-gate dielectric (IGD) layer on the isolation structure and the floating gate; and forming a control gate on the IGD layer.

A semiconductor device has an isolation layer pattern, a plurality of gate structures, and a first insulation layer pattern. The isolation layer pattern is formed on a substrate and has a recess thereon. The gate structures are spaced apart from each other on the substrate and the isolation layer pattern. The first insulation layer pattern is formed on the substrate and covers the gate structures and an inner wall of the recess. The first insulation layer pattern has a first air gap therein.

A method of manufacturing a semiconductor device includes forming on a lower structure, a first stack structure in which first material layers and second material layers are alternately stacked, forming, on the first stack structure, a second stack structure in which third material layers and fourth material layers are alternately stacked, forming preliminary holes penetrating the second stack structure, forming a fifth material layer covering the preliminary holes on the second stack structure to define a first air-gap inside the preliminary holes, and forming through holes connected to the preliminary holes by penetrating from the fifth material layer overlapping the preliminary holes to the first stack structure.

A recess channel semiconductor non-volatile memory (NVM) device is disclosed. The recess channel MOSFET devices by etching into the silicon substrate for the device channel have been applied to advanced DRAM process nodes. The same etching process of the recess channel MOSFET device is applied to form the recess channel semiconductor NVM device. The tunneling oxides are grown on silicon surface after the recess channel hole etching process. The storing material is deposited into the recess channel holes with coupling dielectrics on top of the storing material. The gate material is then deposited and etched to form the control gate. Owing to the recess channel embedded below the silicon substrate, the scaling challenges such as gate channel length, floating gate interference, high aspect ratio for gate stack etching, and the mechanical stability of gate formation for the semiconductor NVM device can be significantly reduced.

A non-volatile memory device includes at least one memory cell, and the memory cell includes a substrate, a trench, an erase gate, a control gate, and a floating gate. The trench is disposed in the substrate. The erase gate is disposed in the trench and includes a concave corner. The control gate is disposed on the substrate, and a bottom surface of the control gate is higher than a bottom surface of the erase gate. The floating gate is disposed on the substrate, and the floating gate includes a lower tip pointing toward the concave corner of the erase gate and extending beyond a sidewall of the trench.

Various embodiments provide a memory cell that includes a vertical selection gate, a floating gate extending above the substrate, wherein the floating gate also extends above a portion of the vertical selection gate, over a non-zero overlap distance, the memory cell comprising a doped region implanted at the intersection of a vertical channel region extending opposite the selection gate and a horizontal channel region extending opposite the floating gate.

An integrated circuit includes a semiconductor substrate and at least one memory cell provided with a vertical gate selection transistor buried in the substrate and a floating gate state transistor. The floating gate state transistor covers a first active region and a second active region of the substrate delimited by lateral isolation regions. The memory cell includes a lateral isolation region thickness (in breadth) dimension between a sidewall of the vertical gate of the buried transistor and the second active region.

A split gate MOSFET is provided. The split gate MOSFET may have a low capacitance between a gate electrode and a source electrode. The trench MOSFET includes a substrate; a gate trench formed on the substrate; a sidewall insulating layer formed on a sidewall of the gate trench; a source electrode surrounded by the sidewall insulating layer; a first upper electrode provided above the source electrode; a first inter-electrode insulating layer formed between the source electrode and the first upper electrode; a second upper electrode formed adjacent to a side of the first upper electrode and surrounding the first upper electrode; and an interlayer insulating layer formed on the first upper electrode and the second upper electrode.