A method for automatically generating chip identifier for semiconductor dies in a stacked structure is provided. The method includes the following steps: obtaining a first semiconductor die and a second semiconductor die, wherein the first semiconductor die and the second semiconductor die include a first identifier generation circuit and a second identifier generation circuit, respectively; forming a stacked structure by stacking the second semiconductor die on the first semiconductor die, wherein the first identifier generation circuit is electrically connected to the second identifier generation circuit; and generating a first chip identifier and a second chip identifier for the first semiconductor die and the second semiconductor die by the first identifier generation circuit and the second identifier generation circuit, respectively. The second chip identifier is generated using the first chip identifier and an auxiliary input signal.

A semiconductor memory device including a memory cell array and a peripheral circuit element configured to control an operation of the memory cell array, and a wiring structure including first and second wiring structures spaced apart from each other on the peripheral circuit element, a first voltage and a second voltage different from the first voltage applied to two opposite ends of the first wiring structure, respectively, and a third voltage different from the first and second voltages applied to the second wiring structure, may be provided. The first wiring structure includes first lines extended in a first direction and spaced apart from each other in a second direction crossing the first direction, the second wiring structure includes second lines extended in the first direction and spaced apart from each other in the second direction, and one of the first lines is between the second lines.

In an embodiment, a device includes: a first integrated circuit die comprising a semiconductor substrate and a first through-substrate via; a gap-fill dielectric around the first integrated circuit die, a surface of the gap-fill dielectric being substantially coplanar with an inactive surface of the semiconductor substrate and with a surface of the first through-substrate via; a dielectric layer on the surface of the gap-fill dielectric and the inactive surface of the semiconductor substrate; a first bond pad extending through the dielectric layer to contact the surface of the first through-substrate via, a width of the first bond pad being less than a width of the first through-substrate via; and a second integrated circuit die comprising a die connector bonded to the first bond pad.

A method includes bonding a first wafer to a second wafer; after bonding the first wafer to the second wafer, bonding a third wafer to the first wafer; conducting a process control monitor on the first and second wafers via a first electrical pathway that traverses an interface between the first and second wafers; determining whether a charge present at the interface between the first and second wafers.

A semiconductor structure includes an interposer that includes: a substrate; a redistribution structure (RDS) on the substrate; a passivation film on the RDS, where the passivation film includes a first etch stop layer (ESL) on the RDS and a first dielectric layer on the first ESL; a via embedded in the passivation film, where the via is electrically coupled to a conductive feature of the RDS; a bonding film on the passivation film, where the bonding film includes a second ESL on the passivation film and a second dielectric layer on the second ESL; and a bonding pad and a first dummy bonding pad that are embedded in the bonding film, where the bonding pad is electrically coupled to the via, and the first dummy bonding pad is electrically isolated; and a die attached to the interposer, where a die connector of the die is bonded to the bonding pad.

According to one aspect of the present disclosure, a semiconductor structure is provided. The semiconductor structure may include a first semiconductor chip and a second semiconductor chip that are bonded along a first direction. The first semiconductor chip may include a first semiconductor layer. The first semiconductor chip may include a plurality of first connection structures extending through the first semiconductor layer along the first direction. A dielectric material may be between and in contact with any two of the first connection structures. The first semiconductor chip and the second semiconductor chip may be coupled by a plurality of first bonding contacts and the plurality of first connection structures. The plurality of first bonding contacts may extend through a first dielectric layer. The first connection structure may be coupled with the first bonding contact.

Provided is a memory device including an anti-fuse cell array in a cell array structure. The memory device includes a core peripheral circuit structure including a first bonding metal pad, and a cell array structure arranged above the core peripheral circuit structure and including a second bonding metal pad in contact with the first bonding metal pad. The cell array structure includes a plurality of memory blocks and a plurality of anti-fuse cells. The core peripheral circuit structure further includes a repair circuit connected to the anti-fuse cells, and the repair circuit is configured to control each anti-fuse cell to be programmed, and perform, based on fuse data of the anti-fuse cells received through the first and second bonding metal pads connected to the anti-fuse cells, a repair operation of replacing a defective memory cell in the memory cell array area with a redundancy memory cell.

A copper diffusion-suppressing electrical bond between a first semiconductor wafer or chip or interposer and a second semiconductor wafer or chip or interposer includes a first bond pad metal with a first bond pad metal surface disposed on the first semiconductor wafer or chip or interposer, bonded with a second bond pad metal with a second bond pad metal surface disposed on the second semiconductor wafer or chip or interposer. A copper outdiffusion-suppressing coating such as a titanium, cobalt, nickel/gold, or nickel/palladium/gold layer may be disposed on the first copper bond pad metal surface and/or on the second copper bond pad metal surface. The copper of the bond pad metal may be doped with manganese to form a copper outdiffusion-suppressing surface manganese oxide. The bond pad metal may alternatively be tungsten to prevent copper outdiffusion.

A semiconductor device may include a transistor on a substrate, a first wiring structure on the transistor, a first bonding pad structure on the first wiring structure, a second wiring structure on the first wiring structure and at least partially overlapping the first bonding pad structure in a horizontal direction, a second bonding pad structure on and spaced apart from the second wiring structure and overlapping the first bonding pad structure in the horizontal direction, a bit line structure on the first and second bonding pad structures, a gate structure on the bit line structure, a channel adjacent to the gate structure and in contact with the bit line structure, and a capacitor on the channel.

A semiconductor package includes a wiring structure. A buffer die is disposed on the wiring structure. A logic die is disposed alongside the buffer die on the wiring structure. A first encapsulating material covers at least a portion of each of the buffer die and the logic die. A memory stack is disposed on the buffer die and is electrically connected to the buffer die. A bridge die is disposed so as to extend over at least a portion of each of the buffer die and the logic die, and is electrically connected to each of the buffer die and the logic die. A second encapsulating material covers at least a portion of each of the memory stack and the bridge die. The buffer die and the logic die are disposed at a level that is between those of the wiring structure and the bridge die.