A multiaxial robot of multitasking includes a base, a plurality of arms, at least one wrist, a first engaging structure, and a second engaging structure. The arms are sequentially connected from the base, and any adjacent two of the base and the arms are configured to rotate relative to each other. The wrist is connected to the farthest arm arranged relative to the base and configured to rotate relative to the connected arm. The first engaging structure is disposed on the wrist and configured to connect a first tool. The second engaging structure is disposed on one of the arms and configured to connect a second tool.

The present disclosure provides a transfer apparatus and a processing system. The transfer apparatus includes a first transfer assembly configured to transfer a first workpiece to a chamber. The transfer apparatus includes a second transfer assembly configured to transfer a second workpiece from the chamber. The transfer apparatus includes an isolation assembly disposed between the first transfer assembly and the second transfer assembly and configured to isolate energy transfer between the first workpiece and the second workpiece. The transfer apparatus further includes a support assembly configured to restrict the isolation assembly between the first transfer assembly and the second transfer assembly.

An apparatus having a drive unit having a first drive axis rotatable about a first axis of rotation and a second drive axis rotatable about a second axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis. A robot arm has an upper arm connected to the drive unit at the first drive axis, a forearm coupled to the upper arm, the forearm being coupled to the upper arm at a first rotary joint and rotatable about the first rotary joint, the first rotary joint being actuatable by a first band arrangement coupled to the second drive axis, and an end effector coupled to the forearm, the end effector being coupled to the forearm at a second rotary joint and rotatable about the second rotary joint, the second rotary joint being actuatable by a second band arrangement coupled to the first rotary joint. The second band arrangement is configured to provide a variable transmission ratio.

A substrate processing apparatus including a frame, a SCARA arm mounted to the frame at a shoulder joint having two links with at least one end effector dependent therefrom, the links defining an upper arm and a forearm, each end effector pivotally joined to the forearm at a wrist to rotate about a wrist axis, and a drive section with at least one degree of freedom operably coupled to the arm to rotate the arm about a shoulder axis articulating extension and retraction, wherein the end effector is coupled to a wrist joint pulley so that extension and retraction effects rotation of the pulley and end effector as a unit about the wrist axis, and wherein a height of the end effector is within a stack height profile of the wrist joint so that a total stack height is sized to conform with and pass through a pass-through of a slot valve.

A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, the transfer link arms include at least some of drive shafts, interlocked with transfer driving motors or speed reducers, and output shafts interlocked with the drive shafts, and wherein the end effectors are positioned at different heights from each other through using a bracket.

In a box assembly device, a holding mechanism causes one of bottom boards to contact a first jig and folds the bottom board inside, while the holding mechanism holding the box material in a state where the box material is developed in a cylindrical shape from a folded state. The folding mechanism folds the bottom flap inside so as to overlap with one of the bottom boards. The holding mechanism causes the other bottom board to contact the second jig while holding the box material and folds the other bottom board inside and upwardly so as to overlap with the bottom flap to engage the bottom boards with each other.

A device for ensuring safe operation of a robot used for cosmetics applications, including the retrofitting of robots not originally design for such applications. In some embodiments, the robot is used for the automatic placement of eyelash extensions onto the natural eyelashes of a subject. In some embodiments, a safety barrier is provided by a physical barrier or light curtain. In other embodiments, readily deformable end effectors are used.

An apparatus including a robot drive, a first arm connected to the robot drive, and a second arm connected to the robot drive. The first arm includes a first upper arm, a first forearm and a first end effector. The second arm includes a second upper arm, a second forearm and a second end effector. The first and second upper arms are connected to a first drive shaft of the robot drive. The first and second upper arms are either a same member or two members stationarily connected to one another. While the first arm is being extended and retracted, straight movement of the first end effector is provided relative to the robot drive along an axis which intersects a drive axis of the robot drive, where a wrist joint of the first arm does not intersect the drive axis while the first arm is being extended and retracted.

A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.

A box packing device includes a first arm, a first hand, and a controller. The first hand includes a hand base, a gripping mechanism at the hand base and including a gripper to grip an upper-end of a flap of a large box, and a holding mechanism at the hand base and including a holder to hold an inner box. The controller controls the operation of the first arm and the first hand so as to perform a developing operation in which the gripping part of the gripping mechanism moves in a horizontal plane so as to develop the large box while gripping the upper-end part of the flap part of the large box in a folded state, and an accommodating operation in which the holder of the holding mechanism accommodates the inner box into the developed large box while holding the inner box.