A robot includes a power source and a power transmission mechanism configured to transmit an output of the power source. The power transmission mechanism includes a fixed member, a first pulley configured to rotate around a first axis with respect to the fixed member, a second pulley disposed to be separated from the first pulley and configured to rotate, with respect to the fixed member, around a second axis parallel to the first axis, a belt wound around the first pulley and the second pulley and configured to transmit the rotation of one of the first pulley and the second pulley to another, a restricting member including a restricting section disposed to be opposed to the belt with a gap in a portion where the first pulley and the belt mesh with each other, and a screw having a center axis along the first axis and configured to fix the restricting member to the fixed member. The restricting member rotates around the center axis to thereby change a separation distance between the restricting section and the belt in a plan view from a direction extending along the first axis.

A ball screw spline assembly includes a ball screw spline including a first nut including a first mounting surface adapted to receive a first fastening element; a second nut including a second mounting surface adapted to receive a second fastening element; and a shaft passing through the first nut and the second nut; the housing including a first portion and a second portion, the first portion extends in a direction substantially parallel to the shaft, and the second portion extends in a direction substantially perpendicular to the shaft; a connecting plate coupling the second nut to the first portion, the first nut is installed to the second portion; the first mounting surface and the second mounting surface are located within a space defined by the first portion, the second portion and the connecting plate, such that the ball screw spline is integrally installable to the housing.

A travel robot for moving a substrate transfer robot in a transfer chamber includes: an elevating part for driving an elevating drive shaft installed in the transfer chamber, a first travel link arm engaged with the elevating drive shaft, a second and a third travel link arm respectively having a first and a second driving motors installed therein, wherein two travel drive shafts are interlocked with the first driving motor and their corresponding travel output shafts, wherein the travel drive shafts and the travel output shafts are installed on the first travel link arm, wherein a rotation drive shaft interlocked with the second driving motor and a rotation output shaft interlocked with the rotation drive shaft and the substrate transfer robot are installed on the third travel link arm, and wherein the travel output shafts are engaged with the first and the third travel link arm.

A robot system includes a robot having an arm pivoting about a pivot axis (first pivot axis), a motor (first motor) pivoting the arm, a shaft (spline shaft) coupled to the arm and moving in an axial direction of a linear motion axis parallel to the pivot axis, and an inertial sensor provided in the arm or shaft, and a control apparatus having a control unit controlling the motor, wherein the inertial sensor detects an angular velocity about a roll axis orthogonal to the pivot axis and the linear motion axis or an acceleration in a tangential direction of a circle around the roll axis, and the control unit controls the motor based on information representing a pivot direction of the arm about the roll axis when the arm stops or decelerates and output from the inertial sensor.

Provided is a method for controlling a robot including a base, a robot arm coupled to the base, and a drive unit including a motor for driving the robot arm. The method includes a first step of acquiring target position information on a target position when the robot arm is moved; a second step of determining a frequency component to be removed from a drive signal for driving the motor based on a posture of the robot arm at the target position of the acquired target position information; and a third step of removing the frequency component determined in the second step from the drive signal to generate a correction drive signal.

A self-traveling articulated robot for working in a production factory is provided, which includes a carriage having at least two operation shafts driven by servomotors, respectively, and self-travelable in a two-dimensional plane, a robotic arm supported by the carriage and having at least one operation shaft driven by a servomotor and constituting a joint, an end effector provided to a tip portion of the robotic arm, and a control unit provided in the carriage and for controlling the operation shaft of the robotic arm and the operation shafts of the carriage to operate in cooperation with each other so that a control point defined in one of the robotic arm and the end effector reaches a target position.

A motor unit includes a motor and an amplifier section including a drive circuit that drives the motor. The amplifier section includes an amplifier cover. A power line for supplying power to the motor is bound to the amplifier cover.

A robot includes a first member and a second member, the first member includes a housing having a first wall and a second wall disposed to face each other, a first protrusion, and a second protrusion, a drive section having a motor body, a drive pulley and a flange, a joint section having a driven pulley and a belt, the first protrusion and the second protrusion having support sections that support both end portions of the flange, a separation distance between the support sections being shorter than a length of the flange in which the flange protrudes, and missing sections configured such that a separation distance between the missing sections is longer than the length of the flange in the direction in which the flange protrudes, both end portions of the flange passing through the missing sections.

A robot arm includes a first member, and a second member translating along an axis located in the first member or rotating around the axis, and the first member has a base, a drive unit generating a drive force, a joint portion having a driven pulley and transmitting the drive force to the second member, a belt transmitting the drive force generated by the drive unit to the driven pulley, a sensor provided in a position overlapping with a region surrounded by the driven pulley and the belt in a plan view along the axis and detecting vibration, a wire routed to the region and coupled to the sensor, and a supporting member provided in the region and supporting the wire.

A robot assembly for transporting a substrate is presented. The robot assembly having a first arm and a second arm supported by a column, the first arm further having a first limb, the first limb having a first set of revolute joint/line pairs configured to provide translation and rotation of the distal most link of the first limb in the horizontal plane. The assembly further having a second arm further having a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a distalmost link of the second limb in the horizontal plane. The first limb and second limb further having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing. The assembly further having an actuator assembly coupled to the first set of revolute joint/link pairs and to the second set of revolute joint/link pairs to effect rotation and translation of the distalmost links of the first limb and the second limb, each of the first limb and the second limb defining, in conjunction with the actuator assembly, at least three degrees of freedom per limb, whereby the distalmost links of the first limb and the second limb are independently horizontally translatable for extension and retraction.