An imprint apparatus for forming a pattern of an imprint material on a substrate using a mold having a mesa including a pattern region where a pattern and a mark are formed. The apparatus includes an alignment optical system which includes an illumination system configured to illuminate the mark with illumination light and a detecting system configured to detect an image of the mark illuminated by the illumination system. The illumination system includes a limiter configured to limit incidence of the illumination light to a side of the mesa, a ridge line of the mesa, and an outer region of the side.

The present utility model discloses a three-dimensional reflective finish structure, a plurality of three-dimensional reflective units are integrally formed on the surface of a substrate, and at least one three-dimensional reflective surface is provided on a partial surface or the entire surface of the substrate, among which, a three-dimensional reflective surface comprises a plurality of three-dimensional reflective units scattered on the surface of the substrate or continuously distributed on the surface of the substrate and connected into one piece; and a three-dimensional reflective unit comprises at least one three-dimensional polyhedral reflective pit in the shape of a polygonal cone sinking below the surface of the substrate. The present utility model is less prone to abrasion and has extremely strong abrasion resistance as the three-dimensional reflective unit relatively sinks below the surface of the substrate material; has better light gathering and reflection effects, as well as better visual effects as the three-dimensional reflective unit has a plurality of reflective surfaces arranged obliquely to the surface of the substrate; and has simple structure and low cost.

A forming apparatus configured to, in a state in which a composition on a substrate and a mold have been brought into contact, cure the composition to thereby mold the composition, is provided. The forming apparatus includes a supplier configured to discretely supply droplets of the composition onto the substrate, a controller configured to control the supplier in accordance with a supply pattern that indicates a drop amount and a drop position of each droplet. The shot region has a rectangular outer shape. The controller determines the supply pattern such that a minimum distance between adjacent droplets supplied onto the shot region by the supplier gradually decreases from a center of each side of the rectangular outer shape of the shot region toward both corners of the each side of the rectangular outer shape of the shot region.

A production method of a mold having a recessed pattern includes: a plate precursor preparation step of preparing a plate precursor having a pedestal on which a protruding pattern is disposed; a resin plate preparation step of preparing a thermoplastic resin plate having a recessed step portion; and a resin plate precursor production step of producing a thermoplastic resin plate precursor, the resin plate precursor production step including a positioning step of positioning the protruding pattern of the plate precursor and a center position of the recessed step portion, and a recessed pattern forming step of forming a recessed pattern having an inverted shape of the protruding pattern on the thermoplastic resin plate by pressing the protruding pattern of the heated plate precursor and the pedestal against the recessed step portion, thereafter cooling the plate precursor, and separating the plate precursor from the thermoplastic resin plate.

An imprint apparatus that forms a pattern made of an imprint material on each of a plurality of shot regions of a substrate, includes a user interface configured to allow a user to perform editing for assigning each of the plurality of shot regions to any one of a plurality of groups such that each of the plurality of groups is formed by at least one shot region onto which the imprint material is continuously supplied from a dispenser.

An imprint apparatus that performs a supply step of supplying an imprint material onto each of shot regions adjacent to each other on a substrate and, after the supply step, execute an imprint process including a contact step, a curing step, and a mold releasing step for each of the shot regions. The apparatus comprises an irradiator that irradiates the imprint material on the shot region with light in the curing step, and a light-shielding member that defines an irradiation region of the light from the irradiator, wherein the light-shielding member defines the irradiation region such that the imprint material in an end portion of a first shot region on a side of a second shot region adjacent to the first shot region is complementarily cured by light irradiation in the curing step performed on the second shot region.

The present invention provides an imprint apparatus including a control unit that feedback-controls a mold deformation unit based on difference data indicating a shape difference between a pattern region of a mold and a shot region on a substrate, target data indicating a relative target deformation amount between the pattern region of the mold and the shot region on the substrate, and time series data indicating a relative deformation amount between the pattern region of the mold and the shot region on the substrate which changes at each time while performing shape control on the shot region.

An imprint apparatus includes first illumination optical system for emit light to cure imprint material between mold and substrate, second illumination optical system having light adjuster for illuminating the imprint material in part of region between the mold and the substrate, combiner located on pupil plane common to the first and second illumination optical systems and configured to combine the light from the first illumination optical system and the light from the second illumination optical system The combiner combines the light from the first illumination optical system and the light from the second illumination optical system by a mirror located in region surrounded by illumination region of the first illumination optical system including annular light intensity distribution on the pupil plane reflecting the light from the second illumination optical system.

A method for manufacturing a soft stamp includes providing a substrate having a first electrode and a second electrode, the second electrode being formed at a distance less than 100 nm from the first electrode so that a nanogap Ng is formed between the first and second electrodes; pouring a curable substance over the first and second electrodes and into the nanogap Ng; curing the curable substance to form a soft stamp; and removing the soft stamp from the first and second electrodes. The soft stamp has a nano-feature having a size less than 100 nm.

A production method of a mold having a recessed pattern includes: a plate precursor preparation step of preparing a plate precursor having a pedestal on which a protruding pattern is disposed; a resin plate preparation step of preparing a thermoplastic resin plate having a recessed step portion; and a resin plate precursor production step of producing a thermoplastic resin plate precursor, the resin plate precursor production step including a positioning step of positioning the protruding pattern of the plate precursor and a center position of the recessed step portion, and a recessed pattern forming step of forming a recessed pattern having an inverted shape of the protruding pattern on the thermoplastic resin plate by pressing the protruding pattern of the heated plate precursor and the pedestal against the recessed step portion, thereafter cooling the plate precursor, and separating the plate precursor from the thermoplastic resin plate.