An imprint apparatus that forms a pattern made of an imprint material on each of a plurality of shot regions of a substrate, includes a user interface configured to allow a user to perform editing for assigning each of the plurality of shot regions to any one of a plurality of groups such that each of the plurality of groups is formed by at least one shot region onto which the imprint material is continuously supplied from a dispenser.

A clamping device has an actuator that moves linearly and is actuated by a drive. A pivoting clamping element is operatively connected, via a toggle lever mechanism, with the actuator. The toggle lever mechanism includes a drive-side adapter and a hand lever-side adapter. The drive side adapter and hand lever side adapter can be adjusted relative to one another to define an opening angle of the clamping element. One of the adapters has a profiled bar extending in a direction of actuation. The other adapter has an insertion region to accommodate the bar. A fixing element is provided in one of the adaptors to define the location of the adapters relative to one another. The fixing element can be clamped against the profiled bar and also against an insertion region.

Disclosed herein are techniques for molding a slanted structure. In some embodiments, a mold for nanoimprint lithography includes a support layer, a polymeric layer on the support layer and including a slanted structure, and an oxide layer on surfaces of the slanted structure. In some embodiments, the oxide layer is conformally deposited on the surfaces of the slanted structure by atomic layer deposition. In some embodiments, the mold further includes an anti-sticking layer on the oxide layer.

A hand-operated tool for embossing a membrane or other soft pliable implant with microgrooves or microgeometries is disclosed. The tool includes an embossing surface such as a pressure plate or roller that includes a specific microgroove or microtopographical pattern. This allows a user such as a clinician to create an embossed surface on a membrane or other implantable device at the time of surgery for the purposes of directing cellular orientation and migration, increasing cell migration velocity and enhancing re-epithelialization rates in various medical and dental applications.

Disclosed is a stamp (14) for an imprint lithography process, the stamp comprising an elastomer stamp body including a polysiloxane bulk portion (110) and a patterned surface comprising a feature pattern (16) for imprinting an imprinting composition (12) wherein the elastomer stamp body comprises a basic organic amine in an amount of at least 0.1% by weight based on the total weight of the elastomer stamp body. Also disclosed are methods of manufacturing such a stamp, and a method of forming a patterned layer on a substrate using such a stamp.

An imprint apparatus configured to form a pattern of an imprint material on a substrate using a mold includes a holding unit configured to hold the mold with a holding surface making contact with a first surface of the mold, a deformation unit configured to apply a force to the mold held at the holding surface to deform the mold, and a drive unit configured to move at least one of the mold held by the holding unit and the deformation unit to change a relative position between the mold held by the holding unit and the deformation unit. The drive unit changes a position where the deformation unit applies a force to the mold in a direction vertical to the first surface based on information about a position of a second surface on an opposite side of the first surface.

An imprint mold includes a mesa portion projecting from a base material. The mesa portion includes a contact surface configured for contact with a curable composition made of an organic material, and a surface of a side wall at which the contact surface projects from the base material. A liquid repellent surface is formed on at least the surface of the side wall, the liquid repellent surface having a contact angle with respect to the curable composition being higher than a contact angle of the contact surface. The liquid repellent surface includes at least one type of compound selected from the group consisting of an oxide of an inorganic element, a fluoride of an inorganic element, and a nitride of an inorganic element.

Disclosed is a method of manufacturing a polyorganosiloxane-based stamp comprising providing a master including a transfer pattern surface; forming a first layer of a first curable composition onto the transfer pattern surface such that the first layer includes a relief pattern of said transfer pattern; partially curing the first layer; depositing a second layer of a second curable composition onto the partially cured first layer; co-curing the partially cured first layer and the second layer to form a cured first layer having a first Young's modulus, adhered to a cured second layer having a second Young's modulus smaller than the first Young's modulus; depositing a third layer of a third curable composition onto the second layer, and curing the third layer to form a cured third layer adhered to the cured second layer. Further disclosed is a polyorganosiloxane-based stamp obtainable from the method; use of the same for printing process; and an imprinting method using the same.

The present invention provides a forming apparatus that forms a composition on a substrate using a mold including a contact region to be brought into contact with the composition, comprising: a deformation unit configured to deform the contact region; and a controller configured to perform, for each of a first shot region and a second shot region on the substrate, a process of bringing the contact region and the composition on the substrate into contact with each other while controlling the deformation of the contact region, wherein an area where the mold faces the substrate during the process is different between the first and second shot regions, and wherein the controller is configured to change, between the first and second shot regions, a process condition for bringing the contact region and the composition into contact with each other.

The invention relates to a nozzle for use in a device for administering a liquid medical formulation, to a method for producing the nozzle in the form of a microfluidic component and to a tool for producing microstructures of the microfluidic component. The nozzle is formed by a plastics plate with groove-like microstructures which are covered by a plastics cover on the longitudinal side in a fixed manner. The production method includes a moulding process in which a moulding tool is used, which moulding tool has complementary metal microstructures which have been produced from a semiconductor material in an electrodeposition process by means of a master component.