According to an example aspect of the present invention, there is provided a lens for a Microelectrical System, MEMS, mirror apparatus, comprising a circular top surface, the circular top surface being provided with a recess having an inclined surface extending from the circular top surface and a side wall having an inclined section extending from the circular top surface, wherein the inclined section is inclined towards the recess and the inclined surface is inclined outward of the recess towards the inclined section.

An optical scanning system includes one or more Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) used to scan a field-of-view (FOV) over a field-of-regard (FOR). The MEMS MMA is configured such that optical radiation from each point in the FOV does not land on or originate from out-of-phase mirror segments and a diffraction limited resolution of the optical system is limited by the size of the entrance pupil and not by the size of individual mirrors.

An optical light package includes an optical output lens, an optical filter located thereunder and between the output lens and LEDS, a tray of LEDs arrayed on a stage mounted on a linear comb based MEMS device that is distributed in such a way that the stage is movable, and a driver that controls movement of the stage.

The disclosed subject matter relates to a method of projecting an image by means of a light source emitting light pulses and an oscillating micro-electro-mechanical system (MEMS) mirror deflecting the emitted light pulses, comprising: providing a matrix of durations for each pixel, and incrementing or decrementing a pixel index whenever a respective duration indexed by the respective pixel indices in the playout matrix has lapsed; for each light pulse: retrieving the respective intensity and durations indexed by the current pixel indices, calculating an interval from at least one of said durations, emitting said light pulse with said retrieved intensity, and waiting said calculated interval before emitting the next light pulse. The disclosed subject matter further relates to a projector carrying out said method.

An addressable display system configured for use in a mounting adapter configured to mount a personal electronic device (PED) on an aircraft includes a transparent surface configured to overlay the display surface of a PED when the PED is mounted in the mounting adapter wherein the transparent surface includes a region that is uniformly coated with a coating layer that when activated with a select excitation wavelength is configured to emit visible light to annunciate a message indicating a problem with an image displayed on a PED display; a lighting source configured to provide light in at an excitation wavelength; a MEMS (microelectromechanical systems) scanner module that is controllable to write desired symbology for annunciation at different addressable locations on the transparent surface; and an imaging device configured to capture an image of the PED display for an integrity check of data displayed on the PED display.

An optical scanning device includes a control unit, a light deflector, light detection units, and a light source. A mirror unit of the light deflector has a flat reflection part for generating scanning light and a groove-shaped reflection part for generating twice reflected light, and performs reciprocating rotation about a rotation axis. The light detection units are disposed at positions on the scanning trajectory of the scanning light where the twice reflected light is received, and are each divided into light detectors in the scanning direction of the scanning light by a division line. The control unit detects the deflection angle θ of the mirror unit based on both the output of the light detector and the output of the light detector.

An acquisition and tracking sensor includes a quad detector with a narrow field of view (NFOV) and a micro-electromechanical system (MEMS) mirror with a wide field of view (WFOV). The quad detector is placed behind the MEMS mirror to produce a WFOV to allow the quad detector to scan a larger area for the incoming laser beam.

In one example, an apparatus comprises a semiconductor integrated circuit, the semiconductor integrated circuit including a microelectromechanical system (MEMS) device layer and a silicon substrate, the MEMS layer including at least one micro-mirror assembly, the at least one micro-mirror assembly including a micro-mirror and electrodes. The at least one micro-mirror assembly further includes a light reduction layer formed below a surface of the silicon substrate. A method of fabricating the semiconductor integrated circuit is also provided.

An optical electronics device includes first, second and third wafers. The first wafer has a semiconductor substrate with a dielectric layer on a side of the semiconductor substrate. The second wafer has a transparent substrate with an anti-reflective coating on a side of the transparent substrate. The first wafer is bonded to the second wafer at a silicon dioxide layer between the semiconductor substrate and the anti-reflective coating. The first and second wafers include a cavity extending from the dielectric layer through the semiconductor substrate and through the silicon dioxide layer to the anti-reflective coating. The third wafer includes micromechanical elements. The third wafer is bonded to the dielectric layer, and the micromechanical elements are contained within the cavity.

A microelectromechanical system (MEMS) actuator device includes a substrate; a shape memory alloy over the substrate; and a reflective coating on the shape memory alloy. The shape memory alloy and the reflective coating form a bi-layer cantilever beam having a first end anchored to the substrate, and a second end released from the substrate. The second end of the cantilever beam articulates between a deflection configuration away from the substrate and a non-deflection configuration towards the substrate based on a thermal phase change in the shape memory alloy.