A MEMS capacitive pressure sensor is provided. The MEMS capacitive pressure sensor includes a substrate having a first region and a second region, and a first dielectric layer formed on the substrate. The capacitive pressure sensor also includes a second dielectric layer having a step surface profile formed on the first dielectric layer, and a first electrode layer having a step surface profile formed on the second dielectric layer. Further, the MEMS capacitive pressure sensor includes an insulation layer formed on the first electrode layer, and a second electrode layer having a step surface profile with a portion formed on the insulation layer in the peripheral region and the rest suspended over the first electrode layer in the device region. Further, the MEMS capacitive pressure sensor also includes a chamber having a step surface profile formed between the first electrode layer and the second electrode layer.

A micro-nano incremental mechanical surface treatment method, comprising the following steps: using a modification tool having a designable end to contact a surface of a substrate material, rotating the modification tool in a local region and compressing the material surface, presetting processing parameters by means of 3D modeling software, and after the tool has processed the entire surface, enabling the tool to move downwards to the indented surface compressed previously. The process continues until the surface material is compressed to a pre-defined thickness, thereby achieving the goals of grain refinement and surface performance improvement. By means of the present method, a workpiece having a complex shape can be flexibly and designably surface modified. The method has the advantages of high bonding strength, no pollution, and low cost.

A micro fluid actuator includes a first substrate, a chamber layer, a vibration layer, a first metal layer, a piezoelectric actuation layer, a second metal layer, a second substrate, an inlet layer, a resonance layer and an aperture array plate. The first substrate includes a plurality of first outflow apertures and a plurality of second outflow apertures. The chamber layer includes a storage chamber. The second metal layer includes an upper electrode pad and a lower electrode pad. While driving power having different phase charges is provided to the upper electrode pad and the lower electrode pad to drive and control the vibration layer to displace in a reciprocating manner, the fluid is inhaled from the exterior through the inlet layer, converged to the storage chamber, compressed and pushes out the aperture array plate, and then is discharged out from the micro fluid actuator to achieve fluid transportation.

A micro fluid actuator includes a first substrate, a chamber layer, a vibration layer, a first metal layer, a piezoelectric actuation layer, a second metal layer, a second substrate, an inlet layer, a resonance layer and an aperture array plate. The first substrate includes a plurality of first outflow apertures and a plurality of second outflow apertures. The chamber layer includes a storage chamber. The second metal layer includes an upper electrode pad and a lower electrode pad. While driving power having different phase charges is provided to the upper electrode pad and the lower electrode pad to drive and control the vibration layer to displace in a reciprocating manner, the fluid is inhaled from the exterior through the inlet layer, converged to the storage chamber, compressed and pushes out the aperture array plate, and then is discharged out from the micro fluid actuator to achieve fluid transportation.

A micro-nano incremental mechanical surface treatment method, comprising the following steps: using a modification tool having a designable end to contact a surface of a substrate material, rotating the modification tool in a local region and compressing the material surface, presetting processing parameters by means of 3D modeling software, and after the tool has processed the entire surface, enabling the tool to move downwards to the indented surface compressed previously. The process continues until the surface material is compressed to a pre-defined thickness, thereby achieving the goals of grain refinement and surface performance improvement. By means of the present method, a workpiece having a complex shape can be flexibly and designably surface modified. The method has the advantages of high bonding strength, no pollution, and low cost.

A method for manufacturing a three-dimensional structure comprising supplying a stack comprising, stacked in a vertical direction, a support substrate, a sacrificial layer, a layer of interest having a sidewall and a tensor layer having a sidewall, the tensor layer having a residual stress. The method also comprises removing a removal portion of the sacrificial layer, while retaining a remaining portion of the sacrificial layer underlying the layer of interest. The removal portion is located in line with a lateral portion of the layer of interest extending from the entire sidewall of the layer of interest. The residual stress of the tensor layer is configured to cause bending of the layer of interest during the step of removing the removal portion.