B
PERFORMING OPERATIONS; TRANSPORTING
B
PERFORMING OPERATIONS; TRANSPORTING
B81
MICROSTRUCTURAL TECHNOLOGY
B81
MICROSTRUCTURAL TECHNOLOGY
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1/00
Manufacture or treatment of devices or systems in or on a substrate
1/00
Manufacture or treatment of devices or systems in or on a substrate
B81C1/00015
for manufacturing microsystems
B81C1/00015
for manufacturing microsystems
B81C1/00222
Integrating an electronic processing unit with a micromechanical structure
B81C1/00222
Integrating an electronic processing unit with a micromechanical structure