A method for preparing an electronic grade sulfuric acid from a waste sulfuric acid solution includes the steps of: performing, in sequence, a concentration treatment, a cracking treatment, and a purification treatment; performing a first oxidation treatment on sulfur dioxide; performing a first absorption treatment and a second oxidization treatment; performing an evaporation treatment; performing a first removal treatment on an acid mist containing metal ions and anion impurities; performing a second absorption treatment; and performing a second removal treatment on residual sulfur dioxide.

A method for preparing an electronic grade sulfuric acid from a waste sulfuric acid solution includes the steps of: performing, in sequence, a concentration treatment, a cracking treatment, and a purification treatment; performing a first oxidation treatment on sulfur dioxide; performing a first absorption treatment and a second oxidization treatment; performing an evaporation treatment; performing a first removal treatment on an acid mist containing metal ions and anion impurities; performing a second absorption treatment; and performing a second removal treatment on residual sulfur dioxide.

A method for preparing an electronic grade sulfuric acid from a waste sulfuric acid solution includes the steps of: performing, in sequence, a concentration treatment, a cracking treatment, and a purification treatment; performing a first oxidation treatment on sulfur dioxide; performing a first absorption treatment and a second oxidization treatment; performing an evaporation treatment; performing a first removal treatment on an acid mist containing metal ions and anion impurities; performing a second absorption treatment; and performing a second removal treatment on residual sulfur dioxide.

A method for preparing an electronic grade sulfuric acid from a waste sulfuric acid solution includes the steps of: performing, in sequence, a concentration treatment, a cracking treatment, and a purification treatment; performing a first oxidation treatment on sulfur dioxide; performing a first absorption treatment and a second oxidization treatment; performing an evaporation treatment; performing a first removal treatment on an acid mist containing metal ions and anion impurities; performing a second absorption treatment; and performing a second removal treatment on residual sulfur dioxide.

A process and apparatus for regenerating a spent acid stream or other stream, such as a spent acid stream or other stream containing sulfur, by decomposing the spent sulfuric acid stream and/or other sulfur-containing streams to recover sulfur dioxide from the stream. Also provided is a process for preparing sulfuric acid from the sulfur dioxide recovered by the apparatus and process.

A process and apparatus for regenerating a spent acid stream or other stream, such as a spent acid stream or other stream containing sulfur, by decomposing the spent sulfuric acid stream and/or other sulfur-containing streams to recover sulfur dioxide from the stream. Also provided is a process for preparing sulfuric acid from the sulfur dioxide recovered by the apparatus and process.

Sulfur trioxide is produced from a feed stream comprising sulfur-containing compounds and dissolved metals, such as alkali metals, in a plant comprising an incineration furnace, a waste heat boiler, a dilution air heater, a dust removal absorber and an SO.sub.2 converter. The plant may further comprise a sulfuric acid condenser for the production of sulfuric acid.

Sulfur trioxide is produced from a feed stream comprising sulfur-containing compounds and dissolved metals, such as alkali metals, in a plant comprising an incineration furnace, a waste heat boiler, a dilution air heater, a dust removal absorber and an SO.sub.2 converter. The plant may further comprise a sulfuric acid condenser for the production of sulfuric acid.

Sulfur trioxide is produced from a feed stream comprising sulfur-containing compounds and dissolved metals, such as alkali metals, in a plant comprising an incineration furnace, a waste heat boiler, a dilution air heater, a dust removal absorber and an SO.sub.2 converter. The plant may further comprise a sulfuric acid condenser for the production of sulfuric acid.

A RedOx furnace and process is provided for regenerating a spent sulfuric acid stream or other sulfur-containing stream by decomposing the spent sulfuric acid stream and/or other sulfur-containing stream to recover sulfur dioxide from the streams. The RedOx furnace includes a reduction chamber having an interior atmosphere, an oxidation chamber having an interior atmosphere positioned downstream from, and in fluid communication with, the reduction chamber, an inlet for supplying a spent sulfuric acid stream or other sulfur-containing stream into the interior atmosphere of the reduction chamber, and an inlet for supplying a pure oxygen stream into the interior atmosphere of the reduction chamber.