C04B35/62222

METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS FOR SEMICONDUCTOR CHAMBER APPLICATIONS

Methods and apparatus for producing bulk silicon carbide and producing silicon carbide coatings are provided herein. The method includes feeding a mixture of silicon carbide and ceramic into a plasma sprayer. The plasma generates a stream towards a substrate forming a bulk material or optionally a coating on the substrate such as an article upon contact therewith. In embodiments, the substrate can be removed, leaving a component part fabricated from bulk silicon carbide.

Coating material, outer periphery-coated silicon carbide-based honeycomb structure, and method for coating outer periphery of silicon carbide-based honeycomb structure
11578001 · 2023-02-14 · ·

A coating material for a silicon carbide-based honeycomb structure, the coating material including from 20 to 75% by mass of ceramic powder (A), the ceramic powder (A) including from 55 to 95% by mass of silicon carbide and from 5 to 30% by mass of silicon dioxide as chemical components.

METHODS AND DEVICES FOR ELECTROMAGNETIC WAVE ABSORPTION USING GRADIENT, COATED HONEYCOMB STRUCTURES
20230041555 · 2023-02-09 ·

A device and method for absorbing electromagnetic waves can include a honeycomb sheet formed by a plurality of interconnected hexagon cells arranged in rows. The hexagon cells are made up of sidewalls, each sidewall formed by two surfaces that converge at a top of the sidewall and diverge from the top to a bottom of the sidewall such that a thickness of the sidewalls increases from top to bottom and an angle forms between the two surfaces at the top of the sidewall. In an example, the angle is about 8 degrees. The honeycomb sheet can be coated with a magnetic, composite coating to increase electromagnetic shielding. An example coating includes magnetic multi-granular nanoclusters (MGNC) and multi-walled carbon nanotubes (MWCNT). A base layer can be attached to the honeycomb sheet for mechanical stability and additional absorption. The device is suitable for radar absorbing materials (RAM) for aerospace and military applications.

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film is selected from a group consisting of an Er—Y composition, an Er—Al—Y composition, an Er—Y—Zr composition, and an Er—Al composition.

Ion beam sputtering with ion assisted deposition for coatings on chamber components

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film consists essentially of 40 mol % to less than 100 mol % of Y.sub.2O.sub.3, over 0 mol % to 60 mol % of ZrO.sub.2, and 0 mol % to 9 mol % of Al.sub.2O.sub.3.

Combustion chamber hot face refractory lining

A method for producing a refractory lining in a combustion chamber operating in a reducing atmosphere. The lining includes at least one or more Zirconia (Zr)-based refractory lining members comprising one or more Zr-based parts. The Zr-based parts comprise at least 90 wt. %, preferably at least 95 wt. %, of monoclinic ZrO.sub.2 and/or partially stabilized ZrO.sub.2 and/or fully stabilized ZrO.sub.2, wherein the total content of tetragonal and cubic ZrO.sub.2 amounts to at least 20 wt. %, preferably more than 35 wt. %, as well as Zr based refractory lining members and methods for manufacturing the Zr based refractory lining members.

SHAPED AND FIRED ZIRCONIA REFRACTORY MATERIAL

A refractory lining in a combustion chamber operating in a reducing atmosphere. The lining includes at least one or more Zirconia (Zr)-based refractory lining members comprising one or more Zr-based parts. The Zr-based parts comprise at least 90 wt. %, preferably at least 95 wt. %, of monoclinic ZrO.sub.2 and/or partially stabilized ZrO.sub.2 and/or fully stabilized ZrO.sub.2, wherein the total content of tetragonal and cubic ZrO.sub.2 amounts to at least 20 wt. %, preferably more than 35 wt. %, as well as Zr based refractory lining members and methods for manufacturing the Zr based refractory lining members.

SELF-HEALING CERAMIC COATING AND PROCESS FOR FORMATION THEREOF

An exterior body panel is provided that includes a substrate having a shape of the panel. A clear topcoat is on the panel. A cured composition of polysilazane moisture cured with interspersed disulfide moieties derived from disulfide monomers overlies the topcoat. A ceramic generating composition kit is also provided. A method for creating a ceramic coating on a topcoat overlying an exterior panel includes combining a first part including a polysilazane and a solvent in which said polysilazane is dissolved, with a second part stored separately from said first part that includes a monomer disulfide to form a reactive gel. The reactive gel cure is applied to the topcoat in ambient air. After allowing sufficient time, moisture cure of the reactive gel occurs and with evaporation of the solvent, the ceramic coating forms with disulfide bonds therein.

PLASMA-RESISTANT MEMBER
20230227375 · 2023-07-20 ·

According to an aspect of the invention, there is provided a plasma-resistant member including: a base member; and a layer structural component formed at a surface of the base member, the layer structural component including an yttria polycrystalline body and being plasma resistant, the layer structural component including a first uneven structure, and a second uneven structure formed to be superimposed onto the first uneven structure, the second uneven structure having an unevenness finer than an unevenness of the first uneven structure.

Coating for hot-shaping core

The invention concerns a method for coating a core (1) for producing a turbomachine part (2) by isostatic compacting, for example a leading-edge shield of a blade, the coating method comprising the steps of:—S1: covering the core (1) by means of a first solution comprising a first refractory component configured to oppose the diffusion of species, the first component comprising a metal oxide,—S2: covering the core (1) by means of a second solution comprising a second component designed to bind the first component in such a way as to form a homogeneous layer, the second component comprising a mineral binder;—S3: applying a heat treatment to the covered core (1) in such a way as to dry the solution and solidify the coating.