Described are compounds of the structure R.sub.4-a—Si-(Sp-Y).sub.a—Z.sub.b, wherein “a” is an integer from 1 to 4; “b” is an integer from 0 to (3×a); “Z,” which is absent when “b”=0, is “R” or ##STR00001##
wherein each “R” is halogen, C.sub.1-6 linear or branched alkyl, alkenyl, or alkynyl or C.sub.1-6 linear or branched halo-alkyl, halo-alkenyl, or halo-alkynyl; each “Sp” C.sub.1-15 linear or branched alkylenyl or C.sub.1-15 linear or branched halo-alkylenyl; and each “Y” an organic polar group. Also described are electrolyte compositions containing one or more of these compounds.

One aspect of the present invention provides an electrolytic solution comprising a compound represented by the following formula (1): ##STR00001##
wherein R.sup.1 to R.sup.3 each independently represent an alkyl group or a fluorine atom, R.sup.4 represents an alkylene group, and R.sup.5 represents an organic group containing a sulfur atom.

The invention provides an organosilane compound having a more bulky substituent group than the existing organosilane compounds. The compound is represented by formula (1) wherein R.sup.1 is a C.sub.4-C.sub.10 tertiary hydrocarbon group, R.sup.2 is a C.sub.1-C.sub.10 alkyl group, and LG is halogen or trifluoromethanesulfonyloxy. ##STR00001##

The invention provides an organosilane compound having a more bulky substituent group than the existing organosilane compounds. The compound is represented by formula (1) wherein R.sup.1 is a C.sub.4-C.sub.10 tertiary hydrocarbon group, R.sup.2 is a C.sub.1-C.sub.10 alkyl group, and LG is halogen or trifluoromethanesulfonyloxy.

##STR00001##

The invention relates to a process for the manufacture of organomonosilanes bearing both hydrogen and chlorine substituents at the silicon atom by subjecting a silane substrate comprising one or more silanes selected from organomonosilanes, organodisilanes and organocarbodisilanes, with the proviso that at least one of these silanes has at least one chlorine substituent at the silicon atom, to a redistribution reaction in the presence of a phosphane or amine acting as a redistribution catalyst.

Provided is a process for preparing certain silane precursor compounds, e.g., triiodosilane from trichlorosilane utilizing lithium iodide in powder form and catalyzed by tertiary amines. The process provides triiodosilane in high yields and high purity. Triiodosilane is a precursor compound useful in the atomic layer deposition of silicon onto various microelectronic device structures.

One aspect of the present invention provides an electrolytic solution comprising a compound represented by the following formula (1):

##STR00001##

wherein R.sup.1 to R.sup.3 each independently represent an alkyl group or a fluorine atom, R.sup.4 represents an alkylene group, and R.sup.5 represents an organic group containing a sulfur atom.

The present invention provides, as one aspect, an electrolytic solution comprising a compound represented by the following formula (1) and a compound represented by the following formula (2):

##STR00001##

wherein R.sup.1 to R.sup.3 each independently represent an alkyl group or a fluorine atom, R.sup.4 represents an alkylene group, and R.sup.5 represents an organic group comprising a sulfur atom and not comprising a nitrogen atom; and

##STR00002##

wherein R.sup.6 to R.sup.8 each independently represent an alkyl group or a fluorine atom, R.sup.9 represents an alkylene group, and R.sup.10 represents an organic group comprising a nitrogen atom and not comprising a sulfur atom.

Methods of synthesizing fluorosilanes containing cyano-substituted alkyl groups are provided. For example, 3-cyanopropyldimethylfluorosilane may be produced by reacting tetramethyldisiloxane and boron trifluoride to obtain fluorodimethylsilane and then reacting the fluorodimethylsilane with allyl cyanide, in the presence of a hydrosilylation catalyst.

A method for making a halosilane compound comprises the steps of: (a) providing a first halosilane compound, (b) providing a reaction vessel containing a halide source disposed inside, (c) feeding the halosilane compound into the reaction vessel, and (d) collecting a product stream from the reaction vessel, where the product stream contains a second halosilane.